IC Igice kimwe-Crystal Silicon Epitaxy

Ibisobanuro ku bicuruzwa

Isosiyete yacu itanga serivise zo gutunganya SiC hakoreshejwe uburyo bwa CVD hejuru ya grafite, ceramique nibindi bikoresho, kugirango imyuka idasanzwe irimo karubone na silikoni ikora ubushyuhe bwinshi kugirango ibone molekile nziza ya SiC, molekile zashyizwe hejuru yibikoresho bisize, bikora urwego rukingira SIC.

Ibyingenzi byingenzi:

1. Kurwanya ubushyuhe bukabije bwa okiside:

kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.

2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.

3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.

4. Kurwanya ruswa: aside, alkali, umunyu na reagent.

Ibyingenzi byingenzi bya CVD-SIC