TaC Coating ke eng?

Indasteri ea semiconductor e ntseng e tsoela pele ka potlako, lisebelisoa tse ntlafatsang ts'ebetso, ho tšoarella, le ts'ebetso li bohlokoa. E 'ngoe ea mekhoa e joalo e ncha ke Tantalum Carbide (TaC) e koahetsoeng, e leng lesela le sireletsang le sebelisoang likarolong tsa graphite. Blog ena e hlahloba tlhaloso ea ho roala ha TaC, melemo ea tekheniki, le ts'ebeliso ea eona ea phetoho tlhahisong ea li-semiconductor.

Ⅰ. TaC Coating ke eng?

Ho roala ha TaC ke lera la ceramic le sebetsang hantle haholo le entsoeng ka tantalum carbide (motsoako oa tantalum le carbon) e behiloeng holim'a graphite. Ho roala ka tloaelo ho sebelisoa ho sebelisoa mekhoa ea Chemical Vapor Deposition (CVD) kapa Physical Vapor Deposition (PVD), ho theha mokoallo o teteaneng, o hloekileng haholo o sireletsang graphite maemong a feteletseng.

Lintho tsa Bohlokoa tsa TaC Coating

●Botsitso bo Phahameng ba Mocheso: E mamella mocheso o fetang 2200 ° C, e feta thepa ea setso e sebetsang hantle joalo ka silicon carbide (SiC), e theolelang ho feta 1600 ° C.

●Khanyetso ea Lik'hemik'hale: E hanela kutu ho tsoa ho hydrogen (H₂), ammonia (NH₃), mouoane oa silicon, le litšepe tse qhibilihisitsoeng, tse bohlokoa bakeng sa tikoloho ea ts'ebetso ea semiconductor.

●Bohloeki bo Phahameng ka ho Fetisisa: Maemo a litšila a ka tlase ho 5 ppm, a fokotsa likotsi tsa tšilafalo mekhoeng ea kholo ea kristale.

●Thermal le Mechanical Durability: Ho khomarela ka matla ho graphite, ho atolosoa ha mocheso o tlaase (6.3 × 10⁻⁶/K), le boima (~ 2000 HK) ho netefatsa bophelo bo bolelele tlas'a libaesekele tse futhumetseng.

Ⅱ. TaC Coating in Semiconductor Manufacturing: Lisebelisoa tsa Bohlokoa

Likarolo tsa graphite tse koahetsoeng ke TaC ke tsa bohlokoa haholo ha ho etsoa masela a tsoetseng pele a semiconductor, haholo-holo bakeng sa lisebelisoa tsa silicon carbide (SiC) le gallium nitride (GaN). Mona ke lintlha tsa bohlokoa tsa tšebeliso ea bona:

1. Khōlo ea SiC Single Crystal

Li-wafers tsa SiC li bohlokoa bakeng sa lisebelisoa tsa motlakase tsa motlakase le likoloi tsa motlakase. Li-crucibles le li-susceptors tse koahetsoeng ke TaC li sebelisoa ho Physical Vapor Transport (PVT) le High-Temperature CVD (HT-CVD) mekhoa ho:

● Thibela Tšilafalo: Lintho tse fokolang tse sa hloekang tsa TaC (mohlala, boron <0.01 ppm vs. 1 ppm ka graphite) e fokotsa mefokolo ea likristale tsa SiC, e ntlafatsa ho hanyetsa ka matla (4.5 ohm-cm vs. 0.1 ohm-cm bakeng sa graphite e sa koahetsoeng).

● Ntlafatsa Tsamaiso ea Thermal: Uniform emissivity (0.3 ho 1000 ° C) e tiisa kabo e tsitsitseng ea mocheso, ho ntlafatsa boleng ba kristale.

2. Khōlo ea Epitaxial (GaN/SiC)

Ho li-reactor tsa Metal-Organic CVD (MOCVD), likarolo tse koahetsoeng ke TaC joalo ka li-wafer carriers le liente:

●Thibela Maikutlo a Khase: E hanela ho chesoa ke ammonia le hydrogen ho 1400°C, e boloka botšepehi ba reactor.

●Ntlafatsa Kotulo: Ka ho fokotsa ho ntšoa ha likaroloana ho tsoa ho graphite, ho roala ha CVD TaC ho fokotsa bofokoli ho li-epitaxial layers, tse bohlokoa bakeng sa li-LED tse sebetsang hantle le lisebelisoa tsa RF.

3. Lisebelisoa tse ling tsa Semiconductor

●Li-Reactors tsa Mocheso o Phahameng: Li-susceptors le li-heaters tlhahiso ea GaN li rua molemo ho tsoa ho botsitso ba TaC libakeng tse nang le haedrojene e ngata.

●Ho sebetsana le Wafer: Likarolo tse koahetsoeng tse kang mehele le li-lids li fokotsa tšilafalo ea tšepe nakong ea phetisetso ea liphaephe

Ⅲ. Hobaneng ha TaC Coating e Feta Mekhoa e Meng?

Papiso le thepa e tloaelehileng e totobatsa bophahamo ba TaC:

Lintlha tse tsoang lipapisong tsa indasteri

IV. Hobaneng u khetha VET?

Kamora ho tsetela khafetsa lipatlisisong le nts'etsopele ea thekenoloji,VET's Tantalum carbide (TaC) likarolo tse koahetsoeng, tse kangLesale la tataiso la graphite le koahetsoeng ke TaC, CVD TaC Coated plate susceptor, TaC Coated Susceptor bakeng sa Epitaxy Equipment,Tantalum carbide e koahetsoeng ka lintho tse nang le porous graphiteleWafer susceptor e nang le koae ea TaC, li tumme haholo limmarakeng tsa Europe le Amerika. VET e labalabela ka tieo ho ba molekane oa hau oa nako e telele.