VET Energy's 8-inch silicon wafers ka a na-ejikarị na ngwa eletrọnịkị ike, sensọ, sekit agbakwunyere na mpaghara ndị ọzọ. Dịka onye ndu na ụlọ ọrụ semiconductor, anyị na-agba mbọ ịnye ngwaahịa Si Wafer dị elu iji gboo mkpa na-eto eto nke ndị ahịa anyị.
Na mgbakwunye na Si Wafer, VET Energy na-enyekwa ihe dị iche iche nke semiconductor substrate, gụnyere SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, wdg. ahịrị ngwaahịa anyị na-ekpuchikwa ihe ọhụrụ bandgap semiconductor dị ka Gallium Oxide Ga2O3 na AlN Wafer, na-enye nkwado siri ike maka mmepe nke ngwaọrụ eletriki na-esote ọgbọ.
VET Energy nwere akụrụngwa mmepụta ihe dị elu yana usoro njikwa njikwa zuru oke iji hụ na wafer ọ bụla na-agbaso ụkpụrụ ụlọ ọrụ siri ike. Ngwaahịa anyị abụghị naanị nwere ezigbo ọkụ eletrik, ma nweekwa ike nrụpụta dị mma na nkwụsi ike ọkụ.
VET Energy na-enye ndị ahịa ihe ngwọta wafer ahaziri ahazi, gụnyere wafers nke nha dị iche iche, ụdị na itinye uche doping. Tụkwasị na nke ahụ, anyị na-enyekwa nkwado ọrụ ọkachamara ọkachamara na ọrụ ahịa mgbe ọ gasịrị iji nyere ndị ahịa aka dozie nsogbu dị iche iche zutere n'oge usoro mmepụta.
Nkọwapụta WAFERING
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.
| Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
| nP | n-Pm | n-Ps | SI | SI | |
| TTV(GBIR) | ≤6um | ≤6um | |||
| Ụta(GF3YFCD)-Uru zuru oke | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
| Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
| LTV (SBIR) -10mmx10mm | <2μm | ||||
| Wafer Edge | Beveling | ||||
IMEcha elu ala
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.
| Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
| nP | n-Pm | n-Ps | SI | SI | |
| Emecha elu elu | Akụkụ abụọ Optical Polish, Si- Face CMP | ||||
| Ọdịdị elu | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
| ibe ibe | Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm) | ||||
| Indents | Ọnweghị nke ekwenyere | ||||
| Scratches (Si-Ihu) | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | ||
| Mgbawa | Ọnweghị nke ekwenyere | ||||
| Mwepu ihu | 3mm | ||||





