Kaihanga Haina SiC Paninga Graphite MOCVD Epitaxy Susceptor

Kaihanga Haina SiC Panipanihia te Karāhe MOCVD Epitaxy Susceptor Whakaahua Matua

Whakaahuatanga Poto:

Te Parakore < 5ppm
‣ He pai te ōritetanga o te doping
‣ Te matotoru me te piri
‣ He ātete pai ki te waikura me te ātete waro

‣ Whakaritenga ngaio
‣ He wā poto te arahi
‣ Te putunga pumau
‣ Te whakahaere kounga me te whakapai tonu

Te Epitaxy o GaN i runga i te Sapphire(RGB/Iti/Maikoro LED);
Te Epitaxy o GaN i runga i te Si Substrate(UVC);
Te Epitaxy o GaN i runga i te Si Substrate(Pūrere Hiko);
Te Epitaxy o te Si i runga i te Si Substrate(Porohiko whakauru);
Te Epitaxy o te SiC i runga i te Papa SiC(Papa raro);
Te epitaxy o InP i runga i te InP

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Taipitopito Hua

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Te hoko i te MOCVD Susceptor kounga teitei i runga ipurangi i Haina

Me haere te wafer i roto i ētahi taahiraa i mua i te rite mō te whakamahi i roto i ngā taputapu hiko. Ko tētahi tukanga nui ko te epitaxy silicon, e haria ai ngā wafer i runga i ngā kaitautoko graphite. He pānga nui ngā āhuatanga me te kounga o ngā kaitautoko ki te kounga o te paparanga epitaxial o te wafer.

Mō ngā wāhanga whakatakoto kiriata angiangi pērā i te epitaxy, te MOCVD rānei, ka tukuna e VET ngā taputapu graphite tino parakore e whakamahia ana hei tautoko i ngā papa, i ngā "wafers" rānei. I te ngako o te tukanga, ko ēnei taputapu, arā, ngā kaitautoko epitaxy, ngā papa amiorangi rānei mō te MOCVD, ka tukuna tuatahitia ki te taiao whakatakoto:

● Te pāmahana teitei.
● Te korehau nui.
● Te whakamahinga o ngā matū hau kaha.
● Kāore he poke, kāore he kiri e tihorea ana.
● Ātete ki ngā waikawa kaha i te wā e horoi ana

Ko VET Energy te kaihanga tuturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me te paninga mō te umanga haurua-ira me te ahumahi photovoltaic. Nō ngā umanga rangahau o te motu te tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake māu.

Kei te whakawhanake tonu mātou i ngā tukanga matatau hei whakarato i ngā rauemi matatau ake, ā, kua hangaia e mātou he hangarau motuhake kua patenttia, hei whakakaha ake i te hononga i waenga i te paninga me te papa, ā, hei whakaiti ake i te ngāwari o te wetewete.

Ngā āhuatanga o ā mātou hua:

1. Ātete waikura pāmahana teitei tae atu ki te 1700℃.
2. Teitei o te parakore me te ōritetanga wera
3. Ātete pai ki te waikura: waikawa, kawakore, tote me ngā matū waro.
4. He pakeke rawa, he mata kiato, he matūriki angiangi.
5. He roa ake te ora ratonga, he pakari ake

CVD SiC Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga
Taonga	Uara Noa
Hanganga Karaihe	Te āhua polycrystalline o te FCC β, te nuinga o te whakatakotoranga (111)
Kiato	3.21 karamu/cm³
Te pakeketanga	2500 te pakeke o Vickers (kawenga 500g)
Rahi o te Witi	2~10μm
Te Parakore o te Matū	99.99995%
Te kaha wera	640 J·kg^-1·K^-1
Te Pāmahana Whakatōtō	2700℃
Kaha Whakapiko	415 MPa RT 4-ira
Te Modulus a Young	430 Gpa 4pt piko, 1300℃
Te Arahi Wera	300W·m^-1·K^-1
Te Whanuitanga Wera (CTE)	4.5×10^-6K^-1