VET Energy e ikhethile ka ho hlahisa boleng bo holimoSebōpi sa Graphite se Hloekileng ka ho Fetisisas e etselitsoe ho sebelisoa ha thepa ea semiconductor le e tsoetseng pele ka thata. E entsoe ka graphite e ntle haholo ea isostatic ea lijo-thollo tse ntle haholo 'me e hloekisitsoe ka mekhoa ea tlhoekiso ea halogen ea mocheso o phahameng, li-crucible tsa rona tsa graphite li fana ka botsitso bo ikhethang ba mocheso, maemo a tlase a litšila, le botsitso bo ikhethang ba litekanyo tlas'a maemo a feteletseng a ts'ebetso.
E sebelisoa haholo kholong ea kristale ea SiC, tlhahiso ea kristale ea GaN, tlhahiso ea thepa ea epitaxial, le ho sintering e tsoetseng pele ea ceramic, High-PuritySebōpi sa Graphite se IsostaticLi bapala karolo ea bohlokoa ho netefatseng boleng ba kristale, botsitso ba ts'ebetso, le katleho ea tlhahiso ho pholletsa le tlhahiso ea semiconductor ea sejoale-joale.
Sekoahelo sa Graphite se Hloekileng ka ho Fetisisa ke eng?
Sejana sa Graphite se Hloekileng ka ho Fetisisa se entsoeng ka mokhoa o nepahetseng se entsoeng ka thepa ea graphite ea isotropic e entsoeng ka mokhoa oa ho hatella oa isostatic. Ha e bapisoa le lihlahisoa tsa graphite tse bōpiloeng ka mokhoa o tloaelehileng, graphite ea isostatic e fana ka:
● Sebopeho se tšoanang sa microstructure ka mahlakoreng 'ohle
● Boima bo phahameng le matla a mechine
● Ho khanna ha mocheso ho phahameng ka ho fetisisa
● Ho hanyetsa mocheso hantle haholo
● Ho ba le masoba a tlase
● Dikahare tse sa hloekang haholo
Kamora ho hlwekisa, molora o ka laolwa ka tlase ho 5 ppm, mme thepa e meng ya maemo a semiconductor e fihlella maemo a ho se hlweke ka tlase ho 3 ppm.
Litšobotsi tsena li etsa hore Li-Crucible tsa Graphite tse Hloekileng ka ho Fetisisa li be ntle bakeng sa lits'ebetso tsa mocheso o phahameng tse fetang 2,000°C, moo taolo ea tšilafalo le ho tšoana ha mocheso li leng bohlokoa.
Mesebetsi Tlhahisong ea Semiconductor
Khōlong ea kristale ea Silicon Carbide (SiC) ho sebelisoa mokhoa oa ho Tsamaisa Mouoane oa 'Mele (PVT), li-crucible tsa graphite li sebetsa e le sejana sa mohloli oa thepa le karolo ea bohlokoa ea sistimi ea tšimo ea mocheso. E sebetsa mochesong o atisang ho feta 2,200°C, se-crucible se tlameha ho boloka botsitso ba boholo ha se ntse se tšehetsa maemo a nepahetseng a mocheso a hlokahalang bakeng sa ho tsamaisoa ha mouoane le ho thehoa ha kristale. Bohloeki le sebopeho sa isotropic sa graphite li ama ka ho toba ho kenyelletsoa ha litšila, kabo ea mocheso, sekhahla sa kholo ea kristale le tlhahiso ea sekoli.
Karolo ea High-Purity Isostatic Graphite Crucibles e atoloha ka nģ'ane ho tlhahiso ea SiC ho ea ho mahlale a tsoetseng pele a kholo ea kristale ea Gallium Nitride (GaN). Ebang e sebelisoa ho HVPE, kholo ea flux, kapa mekhoa e mecha ea tlhahiso ea kristale e kholo, graphite crucibles e fana ka tikoloho e tsitsitseng ea mocheso o phahameng e tšehetsang ho tsamaisoa ha thepa le ho thehoa ha kristale ha e ntse e fokotsa likotsi tsa tšilafalo.
Tlhahisong ea thepa ea epitaxial ea semiconductor, ho kenyeletsoa SiC epitaxy, kholo ea kristale ea AlN, le ts'ebetso e tsoetseng pele ea semiconductor ea metsoako, li-crucible tsa graphite li kenya letsoho ho ts'oanang ha mocheso le ho pheta-pheta ha ts'ebetso. Ho tsamaisa ha tsona mocheso hantle le ho hanyetsa ho tšoha ha mocheso ho nolofalletsa ts'ebetso e tsitsitseng tlas'a maemo a feteletseng a ts'ebetso, ho tšehetsa taolo e nepahetseng ea mouoane, sublimation le mekhoa ea ho beha.
Di-Crucible tsa Graphite tse Hloekileng ka ho Fetisisa le tsona di bapala karolo ya bohlokwa tlhahisong ya thepa e tswetseng pele ya letsopa le phofo ya semiconductor ya moloko wa boraro. Nakong ya ho silwa ha silicon carbide, aluminium nitride, boron nitride, le di-ceramic tse ding tse sebetsang hantle, sebopi se fana ka tikoloho e tsitsitseng ya dikhemikhale le e tshwanang le mocheso e kgothaletsang ho tiya ha e ntse e fokotsa tshilafatso. Dintlafatso tse hlahang bohlweking ba thepa, ho tsamaisa mocheso, le tshebetso ya mechini di bohlokwa bakeng sa ditshebediso tse tlohang dikarolong tsa disebediswa tsa semiconductor ho isa ho diphutheloana tsa elektroniki tse matla haholo.
Mekhoa ea Indasteri le Nts'etsopele ea Bokamoso
Ha di-semiconductor tse nang le lekhalo le leholo di ntse di tswela pele ho fetola indasteri ya di-elektroniki tsa motlakase, tlhoko ya di-crucible tse tswetseng pele tsa graphite e ntse e eketseha ka potlako.
Litlhoko tsa Bohloeki bo Phahameng ka ho Fetisisa
Ditshebediso tsa semiconductor tsa nakong e tlang di hloka maemo a ho se hlweke a ka tlase ho 5 ppm mme, maemong a mang, di atamele 1 ppm ho tshehetsa boholo bo boholo ba kristale le ho fokotseha ha sekoli.
Mahlale a ho Koahela
Liaparo tse tsoetseng pele tsa holim'a metsi li ntse li sebelisoa haholoanyane ho li-crucible tsa graphite, ho kenyeletsoa:
● Seaparo sa Silicon Carbide (SiC)
● Seaparo sa Tantalum Carbide (TaC)
● Seaparo sa Pyrolytic Carbon (PyC)
Liaparo tsena lia ntlafatsa:
● Ho hanyetsa ts'enyeho
● Ho tsitsa ha mocheso
● Tshebetso ea bophelo bohle
● Bohloeki ba ts'ebetso
● Meralo e Meholo ea ho Etsa Liqhomane
Khoebo ea:
● Li-wafer tsa SiC tsa lisenthimithara tse 8
● Li-substrate tse kholoanyane tsa GaN
● Lisebelisoa tse tsoetseng pele tsa semiconductor ea matla
e kganna ntshetsopele ya di-crucible tse kgolo, tse tsitsitseng haholoanyane tsa graphite tse kgonang ho boloka taolo e nepahetseng ya mocheso hodima dipotoloho tse atolositsweng tsa tlhahiso.
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