Babban Tsarkakakken CVD Solid SiC Bulk

Takaitaccen Bayani:

Saurin girma na lu'ulu'u guda ɗaya na SiC ta amfani da tushen CVD-SiC (SiC) hanya ce da aka saba amfani da ita wajen shirya kayan lu'ulu'u guda ɗaya na SiC masu inganci. Ana iya amfani da waɗannan lu'ulu'u guda ɗaya a aikace-aikace iri-iri, gami da na'urorin lantarki masu ƙarfi, na'urorin lantarki na optoelectronic, firikwensin, da na'urorin semiconductor.


Cikakken Bayani game da Samfurin

Alamun Samfura

VET Energy yana amfani da tsafta mai matuƙar ƙarfisilicon carbide (SiC)wanda aka samar ta hanyar ajiyar tururin sinadarai(CVD)a matsayin tushen kayan shukaLu'ulu'u na SiCta hanyar jigilar tururi ta zahiri (PVT). A cikin PVT, ana ɗora kayan tushe a cikinmai kama da wutakuma an sanya shi a kan wani nau'in lu'ulu'u.

Ana buƙatar tushen tsarki mai ƙarfi don ƙera inganci mai girmaLu'ulu'u na SiC.

VET Energy ta ƙware wajen samar da babban sinadari na SiC don PVT saboda yana da yawan sinadari fiye da ƙananan sinadari da aka samar ta hanyar ƙonewa na iskar gas mai ɗauke da Si da C ba zato ba tsammani. Ba kamar sinadari mai ƙarfi ko kuma amsawar Si da C ba, ba ya buƙatar tanderu na musamman ko matakin sinadari mai ɗaukar lokaci a cikin tanderu mai girma. Wannan babban sinadari yana da saurin ƙafewa kusan akai-akai, wanda ke inganta daidaiton gudu-zuwa-gudu.

Gabatarwa:
1. Shirya tushen toshewar CVD-SiC: Da farko, kuna buƙatar shirya tushen toshewar CVD-SiC mai inganci, wanda yawanci yana da tsarki da yawan gaske. Ana iya shirya wannan ta hanyar amfani da hanyar adana tururin sinadarai (CVD) a ƙarƙashin yanayin amsawa mai dacewa.

2. Shirya substrate: Zaɓi substrate mai dacewa a matsayin substrate don haɓakar lu'ulu'u guda ɗaya na SiC. Kayan substrate da aka saba amfani da su sun haɗa da silicon carbide, silicon nitride, da sauransu, waɗanda ke da kyau daidai da girma na lu'ulu'u guda ɗaya na SiC.

3. Dumamawa da kuma sublimation: Sanya tushen toshewar CVD-SiC da substrate a cikin tanda mai zafi sosai kuma samar da yanayin sublimation mai dacewa. Sublimation yana nufin cewa a yanayin zafi mai yawa, tushen toshe yana canzawa kai tsaye daga yanayin tauri zuwa tururi, sannan ya sake taruwa a saman substrate don samar da lu'ulu'u guda ɗaya.

4. Kula da zafin jiki: A lokacin aikin sublimation, ana buƙatar a sarrafa yanayin zafin jiki da rarrabawar zafin jiki daidai don haɓaka sublimation na tushen toshe da haɓakar lu'ulu'u guda ɗaya. Kula da zafin jiki mai dacewa zai iya cimma ingantaccen ingancin lu'ulu'u da ƙimar girma.

5. Kula da Yanayi: A lokacin aikin sublimation, ana kuma buƙatar a kula da yanayin amsawar. Ana amfani da iskar gas mai tsabta (kamar argon) a matsayin iskar gas mai ɗaukar kaya don kiyaye matsin lamba da tsarki mai dacewa da kuma hana gurɓatawa daga ƙazanta.

6. Girman lu'ulu'u ɗaya: Tushen toshewar CVD-SiC yana fuskantar canjin yanayin tururi yayin aikin sublimation kuma yana taruwa a saman substrate don samar da tsarin lu'ulu'u ɗaya. Ana iya samun saurin girma na lu'ulu'u guda ɗaya na SiC ta hanyar yanayin sublimation mai dacewa da kuma sarrafa yanayin zafin jiki.

Tubalan CVD SiC (2)

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