Chochuluka cha High Purity CVD Solid SiC

Chithunzi Chodziwika cha High Purity CVD Solid SiC Bulk

Kufotokozera Kwachidule:

Kukula mwachangu kwa makhiristo a SiC amodzi pogwiritsa ntchito magwero ambiri a CVD-SiC (Chemical Vapor Deposition - SiC) ndi njira yodziwika bwino yokonzekera zipangizo zapamwamba za SiC imodzi. Makhiristo amodzi awa angagwiritsidwe ntchito m'njira zosiyanasiyana, kuphatikizapo zipangizo zamagetsi zamphamvu kwambiri, zipangizo zamagetsi, masensa, ndi zipangizo za semiconductor.

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Tsatanetsatane wa Zamalonda

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VET Energy imagwiritsa ntchito kuyera kwambirisilicon carbide (SiC)zopangidwa ndi nthunzi ya mankhwala(CVD)monga gwero la kukulaMakristalo a SiCkudzera mu mayendedwe a nthunzi yeniyeni (PVT). Mu PVT, gwero la chinthucho limayikidwa mumtandandipo imayikidwa pa kristalo wa mbewu.

Chitsime choyera kwambiri chikufunika kuti munthu apange khalidwe labwino kwambiriMakristalo a SiC.

VET Energy imadziwika bwino popereka SiC ya tinthu tating'onoting'ono ta PVT chifukwa imakhala ndi kuchuluka kwakukulu kuposa tinthu tating'onoting'ono tomwe timapangidwa ndi kuyaka kwa mpweya wokhala ndi Si ndi C. Mosiyana ndi sintering ya gawo lolimba kapena momwe Si ndi C zimachitira, sifunikira ng'anjo yapadera yosinkhira kapena sitepe yosinkhira yomwe imatenga nthawi yayitali mu ng'anjo yokulira. Tinthu tating'onoting'ono tating'onoting'onoti timatha kuuluka nthawi zonse, zomwe zimapangitsa kuti zinthu zizigwirizana bwino.

Chiyambi:
1. Konzani gwero la CVD-SiC block: Choyamba, muyenera kukonzekera gwero la CVD-SiC block lapamwamba kwambiri, lomwe nthawi zambiri limakhala loyera kwambiri komanso lolemera kwambiri. Izi zitha kukonzedwa pogwiritsa ntchito njira ya chemical vapor deposition (CVD) pansi pa mikhalidwe yoyenera yochitira.

2. Kukonzekera gawo lapansi: Sankhani gawo lapansi loyenera ngati gawo lapansi la kukula kwa kristalo imodzi ya SiC. Zipangizo za gawo lapansi zomwe zimagwiritsidwa ntchito kwambiri ndi silicon carbide, silicon nitride, ndi zina zotero, zomwe zimagwirizana bwino ndi kristalo imodzi ya SiC yomwe ikukula.

3. Kutentha ndi kupopera: Ikani gwero la CVD-SiC block ndi substrate mu ng'anjo yotentha kwambiri ndipo perekani mikhalidwe yoyenera ya kupopera. Kupopera kumatanthauza kuti kutentha kwakukulu, gwero la block limasintha mwachindunji kuchokera ku mkhalidwe wolimba kupita ku nthunzi, kenako limabwereranso pamwamba pa substrate kuti lipange kristalo imodzi.

4. Kuwongolera kutentha: Panthawi yogwiritsira ntchito sublimation, kusintha kwa kutentha ndi kufalikira kwa kutentha ziyenera kuyendetsedwa bwino kuti zilimbikitse sublimation ya gwero la block ndi kukula kwa makristalo amodzi. Kuwongolera kutentha koyenera kungathandize kukwaniritsa mtundu wabwino wa kristalo ndi kuchuluka kwa kukula.

5. Kulamulira mpweya: Panthawi yogwiritsa ntchito sublimation, mpweya wochitapo kanthu uyeneranso kulamulidwa. Mpweya wopanda mpweya woyeretsedwa kwambiri (monga argon) nthawi zambiri umagwiritsidwa ntchito ngati mpweya wonyamulira mpweya kuti usunge kupanikizika koyenera komanso kuyera ndikuletsa kuipitsidwa ndi zinthu zodetsedwa.

6. Kukula kwa kristalo imodzi: Gwero la CVD-SiC block limadutsa mu kusintha kwa nthunzi panthawi ya sublimation ndipo limabwereranso pamwamba pa substrate kuti lipange kapangidwe kamodzi ka kristalo. Kukula mwachangu kwa makristaro amodzi a SiC kumatha kuchitika kudzera mu mikhalidwe yoyenera ya sublimation ndi kuwongolera kutentha.