VET Energy siv cov khoom siv huv siab heevsilicon carbide (SiC)tsim los ntawm cov tshuaj lom neeg vapor deposition(CVD)ua ib qho khoom siv rau kev loj hlobSiC cov siv lead ualos ntawm kev thauj mus los ntawm lub cev (PVT). Hauv PVT, cov khoom siv tau thauj mus rau hauv ib qholub khob hliav qabthiab sublimated rau ntawm cov noob siv lead ua.
Yuav tsum muaj qhov chaw purity siab los tsim cov khoom zooSiC cov siv lead ua.
VET Energy tshwj xeeb hauv kev muab cov khoom loj SiC rau PVT vim nws muaj qhov ceev dua li cov khoom me me uas tsim los ntawm kev sib xyaw ua ke ntawm Si thiab C-muaj cov pa roj. Tsis zoo li cov khoom khov kho lossis cov tshuaj tiv thaiv ntawm Si thiab C, nws tsis xav tau lub cub tawg sintering tshwj xeeb lossis cov kauj ruam sintering siv sijhawm ntau hauv lub cub tawg loj hlob. Cov khoom loj no muaj qhov nrawm evaporation yuav luag tas li, uas txhim kho kev sib npaug ntawm kev khiav-rau-khiav.
Kev Taw Qhia:
1. Npaj CVD-SiC thaiv qhov chaw: Ua ntej, koj yuav tsum npaj ib qho zoo CVD-SiC thaiv qhov chaw, uas feem ntau yog purity siab thiab ceev ceev. Qhov no tuaj yeem npaj tau los ntawm kev siv tshuaj lom neeg vapor deposition (CVD) raws li cov xwm txheej tsim nyog.
2. Kev npaj cov khoom siv: Xaiv ib qho khoom siv uas tsim nyog ua cov khoom siv rau kev loj hlob ntawm SiC ib leeg siv lead ua ke. Cov ntaub ntawv siv feem ntau suav nrog silicon carbide, silicon nitride, thiab lwm yam, uas muaj qhov sib phim zoo nrog cov khoom siv SiC ib leeg siv lead ua ke uas loj hlob.
3. Kev Ua Kub thiab Kev Sublimation: Muab CVD-SiC block source thiab substrate tso rau hauv lub cub tawg kub thiab muab cov xwm txheej sublimation tsim nyog. Sublimation txhais tau tias thaum kub siab, qhov block source hloov pauv ncaj qha los ntawm khov mus rau lub xeev pa, thiab tom qab ntawd rov ua kom sib xyaw rau ntawm qhov chaw substrate los ua ib qho siv lead ua.
4. Kev tswj qhov kub thiab txias: Thaum lub sijhawm sublimation, qhov kub thiab txias yuav tsum tau tswj kom meej kom txhawb kev sublimation ntawm qhov chaw thaiv thiab kev loj hlob ntawm cov siv lead ua ib leeg. Kev tswj qhov kub thiab txias kom zoo tuaj yeem ua tiav qhov zoo tshaj plaws ntawm cov siv lead ua thiab kev loj hlob.
5. Kev tswj huab cua: Thaum lub sijhawm sublimation, qhov chaw ua haujlwm kuj tseem yuav tsum tau tswj. Cov roj inert siab-purity (xws li argon) feem ntau yog siv los ua cov roj nqa khoom kom tswj tau qhov siab thiab purity thiab tiv thaiv kev ua qias tuaj los ntawm cov khoom tsis huv.
6. Kev loj hlob ntawm cov siv lead ua ib leeg: Qhov chaw thaiv CVD-SiC raug hloov pauv mus rau theem pa thaum lub sijhawm sublimation thiab rov ua dua ntawm qhov chaw substrate los tsim cov qauv siv lead ua ib leeg. Kev loj hlob sai ntawm SiC cov siv lead ua ib leeg tuaj yeem ua tiav los ntawm cov xwm txheej sublimation tsim nyog thiab kev tswj qhov kub thiab txias.









