Ka whakamahia e te VET Energy te parakore tino-tiketikekāpira silicon (SiC)i hangaia e te whakatakotoranga kohu matū(CVD)hei rauemi pūtake mō te whakatipuNgā tioata SiCmā te kawe kohu ā-tinana (PVT). I roto i te PVT, ka utaina te rauemi pūtake ki roto i teipu paraā, ka whakakorōria ki runga i te tioata purapura.
E hiahiatia ana he pūtake parakore teitei hei hanga i te kounga teiteiNgā tioata SiC.
He tohunga a VET Energy ki te whakarato i te SiC matūriki nui mō te PVT nā te mea he nui ake tōna mātotoru i te rauemi matūriki iti i hangaia e te tahunga ohorere o ngā hau kei roto te Si me te C. Kāore i rite ki te sintering totoka-wāhanga, ki te tauhohenga rānei o te Si me te C, kāore e hiahiatia he oumu sintering motuhake, he taahiraa sintering roa rānei i roto i te oumu tipu. He tata tonu te tere mimiti o tēnei rauemi matūriki nui, e whakapai ake ana i te ōritetanga o te oma ki te oma.
Kupu Whakataki:
1. Whakaritea te pūtake poraka CVD-SiC: Tuatahi, me whakarite e koe he pūtake poraka CVD-SiC kounga teitei, he tino parakore, he tino matotoru hoki. Ka taea tēnei te whakarite mā te tikanga whakatakoto kohu matū (CVD) i raro i ngā tikanga tauhohenga e tika ana.
2. Te whakarite i te papa: Kōwhiria he papa tika hei papa mō te tipu o te tioata kotahi SiC. Ko ngā rauemi papa e whakamahia whānuitia ana ko te silicon carbide, te silicon nitride, me ētahi atu, he pai te ōrite ki te tioata kotahi SiC e tipu haere ana.
3. Te whakamahana me te whakapūmau: Whakanohoia te pūtake poraka CVD-SiC me te papa ki roto i te oumu pāmahana-tiketike, ā, whakaratohia ngā tikanga whakapūmau e tika ana. Ko te tikanga o te whakapūmau, i te pāmahana teitei, ka huri tika te pūtake poraka mai i te āhua totoka ki te āhua kohu, kātahi ka whakapūmau anō ki te mata o te papa hei hanga i te tioata kotahi.
4. Te whakahaere i te pāmahana: I te wā o te tukanga whakapūmau, me whakahaere tika te pikinga pāmahana me te tohatoha pāmahana hei whakatairanga i te whakapūmau o te pūtake poraka me te tipu o ngā tioata takitahi. Mā te whakahaere tika i te pāmahana ka taea te whakatutuki i te kounga tioata me te tere tipu pai rawa atu.
5. Te whakahaere i te āhuarangi: I te wā o te tukanga whakapūmau, me whakahaere hoki te āhuarangi tauhohenga. Ko te hau koretake tino parakore (pērā i te argon) ka whakamahia hei hau kawe hei pupuri i te pēhanga me te parakore e tika ana, hei ārai hoki i te poke o ngā poke.
6. Te tipu o te tioata kotahi: Ka pāngia te pūtake poraka CVD-SiC e te whakawhiti āhua kohu i te wā o te tukanga whakapūmau, ā, ka whakapūmau anō ki te mata o te papa hei hanga i tētahi hanganga tioata kotahi. Ka taea te whakatutuki i te tipu tere o ngā tioata takitahi SiC mā roto i ngā tikanga whakapūmau tika me te whakahaere i te pikinga pāmahana.









