Nnukwu Ịdị Ọcha CVD SiC siri ike

Foto dị elu nke CVD siri ike SiC dị ukwuu

Nkọwa Dị Mkpirikpi:

Mmụba ngwa ngwa nke kristal otu SiC site na iji isi mmalite CVD-SiC (Chemical Vapor Deposition – SiC) bụ usoro a na-ejikarị eme ihe maka ịkwadebe ihe kristal otu SiC dị elu. Enwere ike iji kristal otu ndị a mee ihe n'ọtụtụ ngwa, gụnyere ngwaọrụ eletrọnịkị dị elu, ngwaọrụ optoelectronic, sensọ, na ngwaọrụ semiconductor.

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Nkọwa Ngwaahịa

Akara Ngwaahịa

VET Energy na-eji ịdị ọcha dị elusilicon carbide (SiC)e guzobere site na nkwụnye anwụrụ ọkụ kemịkalụ(CVD)dị ka isi mmalite ihe ọkụkụ maka ịkọ iheKristal SiCsite na njem ikuku nkịtị (PVT). Na PVT, a na-ebu ihe sitere na ya n'imeihe mkpuchima tinye ya n'elu kristal mkpụrụ.

A chọrọ isi iyi dị ọcha dị elu iji mepụta mma dị eluKristal SiC.

VET Energy bụ ọkachamara n'inye nnukwu SiC maka PVT n'ihi na o nwere njupụta dị elu karịa obere ihe ndị e ji ekpo ọkụ nke gas Si na C na-agba n'oge na-adịghị anya mepụta. N'adịghị ka sintering siri ike ma ọ bụ mmeghachi omume nke Si na C, ọ chọghị ka e jiri sintering raara onwe ya nye ma ọ bụ usoro sintering na-ewe oge n'ime ọkụ na-eto eto. Ihe ndị a buru ibu nwere ọnụego sintering fọrọ nke nta ka ọ bụrụ mgbe niile, nke na-eme ka otu ihe ahụ na-agba ọsọ ka ọ na-agba ọsọ ka mma.

Okwu Mmalite:
1. Kwadebe isi iyi nke ihe mgbochi CVD-SiC: Nke mbụ, ịkwesịrị ịkwadebe isi iyi nke ihe mgbochi CVD-SiC dị elu, nke na-abụkarị nke dị ọcha ma dị oke njupụta. Enwere ike ịkwadebe nke a site na usoro kemịkalụ vapor deposition (CVD) n'okpuru ọnọdụ mmeghachi omume kwesịrị ekwesị.

2. Nkwadebe ihe e ji eme ihe: Họrọ ihe e ji eme ihe kwesịrị ekwesị dị ka ihe e ji eme ihe maka uto otu kristal SiC. Ihe e ji eme ihe a na-ejikarị eme ihe gụnyere silicon carbide, silicon nitride, wdg, nke dabara nke ọma na kristal otu SiC nke na-eto eto.

3. Ịkpo ọkụ na itinye ihe n'okpuru: Tinye isi iyi na ihe n'elu ihe n'elu ihe n'ime ọkụ ọkụ dị elu ma nye ọnọdụ itinye ihe n'okpuru ihe kwesịrị ekwesị. Ntinye ihe n'okpuru ihe pụtara na n'oge okpomọkụ dị elu, isi iyi ihe n'elu ihe n'elu ihe na-agbanwe ozugbo site na steeti siri ike gaa na nke ikuku, wee gbakọta ọzọ n'elu ihe n'elu ihe n'elu ihe n'elu ihe ahụ iji mepụta otu kristal.

4. Njikwa okpomọkụ: N'oge usoro sublimation, a chọrọ ka a chịkwaa oke okpomọkụ na nkesa okpomọkụ nke ọma iji kwalite sublimation nke isi iyi blọk na uto nke otu kristal. Njikwa okpomọkụ kwesịrị ekwesị nwere ike nweta ịdị mma kristal na ọnụego uto zuru oke.

5. Njikwa ikuku: N'oge usoro sublimation, a chọkwara ịchịkwa ikuku mmeghachi omume. A na-ejikarị gas na-adịghị ọcha (dịka argon) eme ihe dị ka gas na-ebu ibu iji nọgide na-enwe nrụgide na ịdị ọcha kwesịrị ekwesị ma gbochie mmetọ site na ihe ndị na-adịghị ọcha.

6. Otu kristal uto: Isi iyi blọk CVD-SiC na-agafe mgbanwe nke usoro uzuoku n'oge usoro sublimation ma na-agbakọta n'elu ihe owuwu ahụ iji mepụta otu kristal nhazi. Enwere ike inweta uto ngwa ngwa nke kristal otu SiC site na ọnọdụ sublimation kwesịrị ekwesị na njikwa gradient okpomọkụ.