Yadda za a zaɓa, amfani da kula da jirgin ruwan PECVD?

1. Menene jirgin ruwan PECVD?

1.1 Ma'anar da ainihin ayyuka

Jirgin ruwan PECVD (Plasma Enhanced Chemical Vapor Deposition) babban kayan aiki ne da ake amfani da shi don ɗaukar wafers ko abubuwan da ake amfani da su a cikin tsarin PECVD. Yana buƙatar yin aiki da ƙarfi a cikin babban zafin jiki (300-600 ° C), kunna plasma da iskar gas (kamar SiH₄, NH₃) yanayi. Babban ayyukansa sun haɗa da:

● Madaidaicin matsayi: tabbatar da tazarar wafer iri ɗaya kuma guje wa tsoma baki.
● Kula da filin thermal: inganta rarraba zafin jiki da inganta daidaiton fim.
● Katangar hana gurɓataccen gurɓataccen abu: Ya ware plasma daga kogon kayan aiki don rage haɗarin gurɓataccen ƙarfe.

1.2 Na yau da kullun da kayan aiki

Zaɓin kayan aiki:

● Jirgin ruwan graphite (zaɓi na al'ada): haɓakar zafin jiki mai girma, juriya mai zafi, ƙananan farashi, amma yana buƙatar sutura don hana lalata gas.
●Kwale-kwalen Quartz: Tsabtataccen tsafta, mai juriya da sinadarai, amma mai karyewa da tsada.
●Ceramics (kamar Al₂O₃): mai jurewa sawa, dace da samarwa mai yawa, amma rashin kyawun yanayin zafi.

Maɓalli na ƙira:

● Tazarar Ramin: Match kauri (kamar 0.3-1mm haƙuri).
●Tsarin rami mai kwararar iska: inganta rarraba iskar gas da rage tasirin sakamako.
●Shafi saman: SiC na gama gari, TaC ko DLC (kamar carbon kamar lu'u-lu'u) shafi don tsawaita rayuwar sabis.

2. Me ya sa dole ne mu kula da aikin jiragen ruwa na PECVD?

2.1 Manyan abubuwa guda huɗu waɗanda ke shafar yawan amfanin ƙasa kai tsaye

✔ Kula da Gurbacewa:
Najasa a jikin jirgin ruwa (kamar Fe da Na) suna canzawa a yanayin zafi mai yawa, suna haifar da ramuka ko ɗigo a cikin fim ɗin.
Kwasfa mai rufi zai gabatar da barbashi kuma yana haifar da lahani (misali, barbashi> 0.3μm na iya haifar da ingancin baturi ya ragu da kashi 0.5%).

✔ Daidaitawar filin thermal:
Rashin daidaituwar zafi na jirgin ruwan graphite na PECVD zai haifar da bambance-bambance a cikin kauri na fim (misali, a ƙarƙashin ƙa'idar daidaito na ± 5%, bambancin zafin jiki yana buƙatar zama ƙasa da 10 ° C).

✔ Daidaitawar Plasma:
Abubuwan da ba su da kyau na iya haifar da fitarwa mara kyau da lalata wafer ko na'urar lantarki.

✔ Rayuwar sabis da farashi:
Ana buƙatar maye gurbin guraben kwale-kwale marasa inganci akai-akai (misali sau ɗaya a wata), kuma farashin kulawa na shekara yana da tsada.

3. Yadda za a zaɓa, amfani da kula da jirgin ruwan PECVD?

3.1 Hanyar zaɓin mataki uku

Mataki 1: Bayyana sigogin tsari

● Zazzabi kewayon: Za'a iya zaɓar shafi na graphite + SiC a ƙasa da 450 ° C, kuma ana buƙatar ma'adini ko yumbura sama da 600 ° C.
●Nau'in iskar gas: Lokacin da ke ɗauke da iskar gas mai lalata kamar Cl2and F-, dole ne a yi amfani da shafi mai girma.
●Girman wafer: Ƙarfin tsarin jirgin ruwa 8-inch/12-inch ya bambanta sosai kuma yana buƙatar ƙira da aka yi niyya.

Mataki 2: Auna ma'aunin aiki

Mahimman Ma'auni:

●Tsawon saman (Ra): ≤0.8μm (Tsarin lamba yana buƙatar zama ≤0.4μm)
●Ƙarfin haɗin gwiwa: ≥15MPa (ASTM C633 misali)
●Babban nakasawa (600 ℃): ≤0.1mm/m (gwajin awanni 24)

Mataki na 3: Tabbatar da dacewa

● Daidaita kayan aiki: Tabbatar da girman dubawa tare da samfura na yau da kullun kamar AMAT Centura, centrotherm PECVD, da sauransu.
● Gwajin gwaji na gwaji: An ba da shawarar yin gwajin gwaji na ƙananan nau'i na 50-100 don tabbatar da daidaitattun suturar (daidaituwar kauri na fim <3%).

3.2 Mafi kyawun Ayyuka don Amfani da Kulawa

Ƙayyadaddun Ayyuka:

✔Tsarin tsaftacewa:

Kafin amfani da farko, Xinzhou yana buƙatar bama-bamai da Ar plasma na tsawon mintuna 30 don cire dattin da aka tallata a saman.

●Bayan kowane tsari na tsari, ana amfani da SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) don tsaftacewa don cire ragowar kwayoyin halitta.

✔ Loading haramun:

●An haramta yin lodi (misali matsakaicin ƙarfin da aka tsara don zama guda 50, amma ainihin nauyin ya kamata ya zama ≤ 45 guda don ajiye sarari don fadadawa).

●Gefen wafer dole ne ya kasance ≥2mm nesa da ƙarshen tankin jirgin don hana tasirin gefen plasma.

✔ Nasihu Don Tsawaita Rayuwa

● Gyaran sutura: Lokacin da rashin ƙarfi na ƙasa Ra：1.2μm, SiC shafi na iya sake sakawa ta CVD (farashin shine 40% ƙasa da maye gurbin).

✔ Gwaji akai-akai:

● Wata-wata: Bincika amincin shafi ta amfani da farar haske interferometry.
●Kwata-kwata: Yi nazarin matakin crystallization na jirgin ta hanyar XRD (kwale-kwalen wafer na quartz tare da lokaci crystal> 5% yana buƙatar maye gurbin).

4. Menene matsalolin gama gari?

Q1: iyaJirgin ruwa PECVDza a yi amfani da shi a cikin tsarin LPCVD?

A: Ba a ba da shawarar ba! LPCVD yana da zafi mafi girma (yawanci 800-1100 ° C) kuma yana buƙatar jure matsi mai girma na iskar gas. Yana buƙatar amfani da kayan da suka fi juriya ga canje-canjen zafin jiki (kamar graphite isostatic), kuma ƙirar ramin yana buƙatar la'akari da diyya ta haɓakar thermal.
Q2: Yadda za a tantance ko jikin jirgin ya gaza?

A: Dakatar da amfani da gaggawa idan waɗannan alamun sun faru:
Ana iya ganin tsagawa ko bawon sutura ga ido tsirara.
Matsakaicin daidaitattun daidaiton suturar wafer ya kasance> 5% don batches uku a jere.
Matsayin vacuum na ɗakin tsari ya ragu da fiye da 10%.

Q3: Graphite jirgin vs. ma'adini jirgin ruwa, yadda za a zabi?

Ƙarshe : An fi son jiragen ruwa na zane-zane don al'amuran samar da yawa, yayin da kwale-kwalen quartz ana la'akari da binciken kimiyya / matakai na musamman.

Ƙarshe:

Ko da yakeJirgin ruwa PECVDba shine babban kayan aiki ba, shine "mai kula da shiru" na zaman lafiyar tsari. Daga zaɓi zuwa kiyayewa, kowane daki-daki na iya zama maɓalli mai mahimmanci don haɓaka yawan amfanin ƙasa. Ina fatan wannan jagorar zai taimaka muku ku shiga cikin hazo na fasaha kuma ku nemo mafita mafi kyau don rage farashi da ingantaccen inganci!