Momwe mungasankhire, kugwiritsa ntchito ndi kukonza bwato la PECVD?

1. Kodi bwato la PECVD ndi chiyani?

1.1 Tanthauzo ndi ntchito zazikulu

Boti la PECVD (Plasma Enhanced Chemical Vapor Deposition) ndi chida chachikulu chomwe chimagwiritsidwa ntchito kunyamula zopyapyala kapena ma substrates munjira ya PECVD. Iyenera kugwira ntchito mokhazikika pakutentha kwambiri (300-600 ° C), plasma-activated and corrosive gas (monga SiH₄, NH₃) chilengedwe. Ntchito zake zazikulu ndi izi:

● Kuyika molongosoka: onetsetsani kuti tinthu tating'onoting'ono tating'ono tating'ono tating'ono tating'ono tating'ono ting'onoting'ono ndipo pewani kusokonezedwa ndi zokutira.
● Kuwongolera kumunda kwamafuta: kukhathamiritsa kufalitsa kutentha ndikuwongolera kufanana kwa filimu.
● Chotchinga choletsa kuipitsidwa: Chimapatula madzi a m’magazi a m’magazi ku kabowo ka zipangizo kuti achepetse kuipitsidwa ndi zitsulo.

1.2 Zomangamanga ndi zida zofananira

Zosankha:

● Boti la graphite (chisankho chachikulu): kutentha kwapamwamba kwambiri, kutentha kwapamwamba, kutsika mtengo, koma kumafuna kupaka kuti zisawonongeke gasi.
●Boti la quartz: Kuyera kwambiri, kusagwirizana ndi mankhwala, koma ndizovuta kwambiri komanso zodula.
●Ceramics (monga Al₂O₃): osavala, oyenera kupanga ma frequency apamwamba, koma kusayenda bwino kwamafuta.

Mawonekedwe akuluakulu:

● Kutalikirana kwa malo: Match wafer makulidwe (monga kulolerana kwa 0.3-1mm).
●Kapangidwe ka dzenje la mpweya: kukhathamiritsa kugawa kwa gasi ndikuchepetsa zotsatira zake.
●zokutira pamwamba: SiC wamba, TaC kapena DLC (monga diamondi ngati kaboni) kuti atalikitse moyo wautumiki.

2. N’chifukwa chiyani tiyenera kulabadira kachitidwe ka mabwato a PECVD?

2.1 Zinthu zinayi zazikulu zomwe zimakhudza mwachindunji zokolola

✔ Kuletsa kuwononga chilengedwe:
Zonyansa m'thupi la ngalawa (monga Fe ndi Na) zimagwedezeka pa kutentha kwakukulu, kuchititsa mapini kapena kutuluka mufilimuyo.
Kupaka utoto kumayambitsa tinthu tating'onoting'ono ndikupangitsa kuwonongeka kwa zokutira (mwachitsanzo, tinthu tating'ono> 0.3μm titha kupangitsa kuti batire litsike ndi 0.5%).

✔ Thermal field uniformity:
Kutentha kosagwirizana kwa boti la graphite la PECVD kumabweretsa kusiyana kwa makulidwe a filimu (mwachitsanzo, pakufunika kofanana kwa ± 5%, kusiyana kwa kutentha kumayenera kukhala kosachepera 10 ° C).

✔ Kugwirizana kwa Plasma:
Zida zosayenera zimatha kutulutsa madzi modabwitsa ndikuwononga chowotcha kapena maelekitirodi a chipangizo.

✔ Moyo wautumiki ndi mtengo wake:
Maboti otsika amafunikira kusinthidwa pafupipafupi (monga kamodzi pamwezi), ndipo ndalama zolipirira pachaka ndizokwera mtengo.

3. Momwe mungasankhire, kugwiritsa ntchito ndi kukonza bwato la PECVD?

3.1 Njira yosankha masitepe atatu

Khwerero 1: Fotokozerani magawo a ndondomeko

● Kutentha kosiyanasiyana: Kuphimba kwa Graphite + SiC kungasankhidwe pansi pa 450 ° C, ndipo quartz kapena ceramic imafunika pamwamba pa 600 ° C.
●Mtundu wa mpweya: Mukakhala ndi mpweya wowononga monga Cl2 ndi F-, zokutira zolimba kwambiri ziyenera kugwiritsidwa ntchito.
●Kukula kwa Wafer: 8-inchi / 12-inchi mphamvu ya bwato ndi yosiyana kwambiri ndipo imafuna kapangidwe kake.

Khwerero 2: Yang'anirani zoyezetsa zogwirira ntchito

Mametriki Ofunika:

●Kukula kwapamtunda (Ra) : ≤0.8μm (malo olumikizana ayenera kukhala ≤0.4μm)
●Mphamvu zomangira zomangira: ≥15MPa (ASTM C633 standard)
●Kutentha kwakukulu (600 ℃) : ≤0.1mm/m (mayeso a maola 24)

Gawo 3: Tsimikizirani kuti zikugwirizana

● Zofananira ndi zida: Tsimikizirani kukula kwa mawonekedwe ndi mitundu yodziwika bwino monga AMAT Centura, centrotherm PECVD, etc.
● Kuyesa kupanga mayesero: Ndibwino kuti muyese mayeso ang'onoang'ono a zidutswa za 50-100 kuti mutsimikizire kufanana kwa zokutira (kusiyana kosiyana kwa filimu makulidwe <3%).

3.2 Njira Zabwino Zogwiritsira Ntchito ndi Kusamalira

Zokhudza ntchito:

✔Njira yoyeretseratu:

● Asanagwiritse ntchito koyamba, Xinzhou amafunika kuwomberedwa ndi Ar plasma kwa mphindi 30 kuti achotse zonyansa zomwe zatuluka pamwamba.

●Pambuyo pa ndondomeko iliyonse, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) imagwiritsidwa ntchito poyeretsa kuchotsa zotsalira za organic.

✔ Kutsitsa tabo:

●Kuchulukitsitsa ndikoletsedwa (mwachitsanzo, kuchuluka kwakukulu kumapangidwa kukhala zidutswa za 50, koma katundu weniweni ayenera kukhala ≤ zidutswa 45 kuti asungire malo kuti awonjezere).

●Mphepete mwa mtandawo uyenera kukhala ≥2mm kutali ndi mapeto a thanki ya ngalawa kuti ateteze zotsatira za plasma.

✔ Malangizo Okulitsa Moyo Wanu

● Kukonza zokutira: Pamene roughness pamwamba Ra＞1.2μm, SiC ❖ kuyanika akhoza re-deposit ndi CVD (mtengo ndi 40% m'munsi kuposa m'malo).

✔ Kuyesa pafupipafupi:

● Mwezi uliwonse: Yang'anani kukhulupirika kwa zokutira pogwiritsa ntchito kuwala koyera interferometry.
●Kotala: Unikani kuchuluka kwa crystallization ya bwato kudzera mu XRD (boti la quartz wafer lomwe lili ndi gawo la kristalo> 5% likufunika kusinthidwa).

4. Ndi mavuto ati omwe anthu ambiri amakumana nawo?

Q1: KodiPECVD bwatokugwiritsidwa ntchito munjira ya LPCVD?

A: Osavomerezeka! LPCVD imakhala ndi kutentha kwakukulu (nthawi zambiri 800-1100 ° C) ndipo imayenera kupirira kupanikizika kwa mpweya wambiri. Zimafunika kugwiritsa ntchito zipangizo zomwe zimagonjetsedwa ndi kusintha kwa kutentha (monga isostatic graphite), ndipo mapangidwe a slot ayenera kuganizira za chiwongoladzanja chowonjezera kutentha.
Q2: Kodi mungadziwe bwanji ngati bwato lalephera?

A: Siyani kugwiritsa ntchito nthawi yomweyo ngati zizindikiro zotsatirazi zichitika:
Ming'alu kapena kupukuta kumawonekera ndi maso.
Kupatuka kofanana kwa zokutira zophika kwakhala> 5% pamagulu atatu otsatizana.
Mlingo wa vacuum wa chipinda chochitirako chatsika ndi 10%.

Q3: Boti la graphite vs. bwato la quartz, mungasankhe bwanji?

Kutsiliza : Maboti a graphite amakondedwa pakupanga zinthu zambiri, pomwe mabwato a quartz amaganiziridwa kuti akafufuze zasayansi / njira zapadera.

Pomaliza:

Ngakhale aPECVD bwatosi zida zazikulu, ndi "woyang'anira chete" wa kukhazikika kwa ndondomeko. Kuchokera pakusankha mpaka kukonza, chilichonse chikhoza kukhala chofunikira kwambiri pakuwongolera zokolola. Ndikukhulupirira kuti bukhuli likuthandizani kulowa mkati mwa chifunga chaukadaulo ndikupeza njira yabwino yochepetsera mtengo ndikuwongolera bwino!