Sida loo doorto, loo isticmaalo oo loo ilaaliyo doonta PECVD?

1. Waa maxay doonta PECVD?

1.1 Qeexida iyo hawlaha asaasiga ah

Doonta PECVD (Plasma Enhanced Chemical Vapor Deposition) waa aalad xudunta u ah in lagu qaado maraqyada ama substrates ee habka PECVD. Waxay u baahan tahay inay si joogto ah ugu shaqeyso heerkul sare (300-600 ° C), balasma-firfircoon iyo gaaska daxalka ah (sida SiH₄, NH₃) deegaanka. Shaqadeeda ugu muhiimsan waxaa ka mid ah:

● Meelaynta saxda ah: hubi kala fogaanshaha waferka isku midka ah kana fogow faragelinta dahaarka.
● Xakamaynta goobta kulaylka: wanaaji qaybinta heerkulka oo wanaaji isku midnimada filimka.
● Caqabadaha wasakheynta: Waxay ka soocdaa balasmaha godka qalabka si loo yareeyo khatarta wasakhowga birta.

1.2 Qaab-dhismeedka iyo agabka caadiga ah

Xulashada agabka:

● Doonta garaafka (doorashada guud): kulaylka sareeyo, iska caabinta heerkulka sare, kharash yar, laakiin waxay u baahan tahay dahaar si looga hortago daxalka gaaska.
●Doonta Quartz: Nadiifin aadka u sarreeya, kiimiko ahaan u adkaysta, laakiin aad u jajaban oo qaali ah.
●Ceramics (sida Al₂O₃): xidhashada adkaysi u leh, ku haboon wax soo saarka soo noqnoqda sare, laakiin kulaylka liidata.

Tilmaamaha naqshadeynta muhiimka ah:

● Kala dheereynta booska: Isku dhig dhumucda waferka (sida dulqaadka 0.3-1mm).
●Naqshadeynta godka socodka hawada: wanaaji qaybinta gaaska falcelinta oo hoos u dhig saamaynta geesaha.
●Dahaarka dusha sare: SiC-ga caadiga ah, TaC ama DLC (kaarboon-dheeman u eg) daahan si loo kordhiyo nolosha adeegga.

2. Maxay tahay sababta aan fiiro gaar ah u yeelano waxqabadka doonyaha PECVD?

2.1 Afar arrimood oo waaweyn oo si toos ah u saameeya wax-soo-saarka geeddi-socodka

✔ Xakamaynta wasakhowga:
Wasakhda ku jirta jidhka doonta (sida Fe iyo Na) waxay ku rogmataa heerkul sare, taasoo keenaysa godad fiiqan ama daadsan filimka.
Diilinta dahaarka waxay soo bandhigaysaa qaybo waxayna sababi doontaa cillado daahan (tusaale ahaan, qaybo> 0.3μm waxay sababi karaan waxtarka batteriga inuu hoos u dhaco 0.5%).

✔ Labbiska goobta kulaylka:
Kuleylka aan sinnayn ee doonnida garaafka ee PECVD waxay u horseedi doontaa kala duwanaansho dhumucda filimka (tusaale ahaan, shuruudaha la midka ah ee ± 5%, farqiga heerkulka wuxuu u baahan yahay inuu ka yaraado 10 ° C).

✔ Waafaqid Plasma:
Walxaha aan saxda ahayn waxay sababi karaan dareere aan caadi ahayn waxayna dhaawacaan waferka ama korantada qalabka.

✔ Nolosha adeegga iyo qiimaha:
Qolalka doomaha tayadoodu hooseyso waxay u baahan yihiin in si joogta ah loo beddelo (tusaale bishiiba hal mar), kharashyada dayactirka sannadku waa qaali.

3. Sida loo doorto, loo isticmaalo oo loo dayactiro doonta PECVD?

3.1 Habka xulashada saddex-tallaabo

Talaabada 1: Caddee xuduudaha habsocodka

● Heerkulka kala duwan: Graphite + SiC daahan ayaa la dooran karaa ka hooseeya 450 ° C, quartz ama dhoobada ayaa loo baahan yahay in ka sarreeya 600 ° C.
●Nooca gaaska: Marka ay ku jiraan gaasaska wasakhaysan sida Cl2and F-, daahan cufan sare leh waa in la isticmaalaa.
●Cabbirka wafer: 8-inji/12-inch xoogga qaab dhismeedka doonta aad buu u kala duwan yahay wuxuuna u baahan yahay nashqad la beegsaday.

Tallaabada 2: Qiimee cabbirada waxqabadka

Qiyaasaha Muhiimka ah:

●Dusha sare ee qallafsanaanta (Ra): ≤0.8μm (korka xiriirka wuxuu u baahan yahay ≤0.4μm)
●Xoogga dahaarka: ≥15MPa (ASTM C633 heerka)
●Qallafsanaanta heerkulka sare (600 ℃): ≤0.1mm/m (tijaabo 24 saacadood ah)

Talaabada 3: Hubi waafaqid

● Qalab isku dhigma: Ku xaqiiji cabbirka is-dhexgalka moodooyinka caadiga ah sida AMAT Centura, centrotherm PECVD, iwm.
● Tijaabada wax soo saarka tijaabada: Waxaa lagu talinayaa in la sameeyo tijaabo yar oo 50-100 xabbo ah si loo xaqiijiyo isku mid ahaanshaha dahaarka (is beddelka heerka dhumucda filimka <3%).

3.2 Hababka ugu Wanaagsan ee Isticmaalka iyo Dayactirka

Tilmaamaha Hawlgalka:

✔Habka nadiifinta ka hor:

● Kahor isticmaalka koowaad, Xinzhou wuxuu u baahan yahay in lagu garaaco Ar plasma 30 daqiiqo si looga saaro wasakhda dusha sare leh.

●Dufc kasta oo habsocodka ka dib, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) waxa loo isticmaalaa nadiifinta si looga saaro haraaga dabiiciga ah.

✔ Soodejinaya waxyaabaha mamnuuca ah:

●Culayska xad-dhaafka ah waa mamnuuc (tusaale, awoodda ugu badan waxaa loogu talagalay inay noqoto 50 xabbo, laakiin culayska dhabta ahi waa inuu noqdaa ≤ 45 xabbo si boos loogu ballaadhinayo).

●Cidhifka maraqa waa in uu ≥2mm ka fog yahay dhamaadka haanta doonta si looga hortago waxyeelada cidhifka balaasmaha.

✔ Talooyinka Kordhinta Nolosha

● Dayactirka dahaarka: Marka dusha sare ee qallafsanaanta Ra：1.2μm, daahan SiC waxaa dib u dhigi kara CVD (qiimuhu 40% ayuu ka hooseeyaa beddelka).

✔ Baaritaan joogto ah:

● Bil kasta: Hubi daacadnimada dahaarka adoo isticmaalaya interferometry cad.
●Quarterly: Falanqee darajada crystallization ee doonta iyada oo loo marayo XRD (doonta wafer quartz leh wejiga crystal> 5% ayaa loo baahan yahay in la beddelo).

4. Waa maxay dhibaatooyinka caadiga ah?

Q1: KaraaDoonta PECVDma loo isticmaali karaa habka LPCVD?

J: Laguma talinayo! LPCVD waxay leedahay heerkul sare (badanaa 800-1100°C) wuxuuna u baahan yahay inuu u adkaysto cadaadiska gaaska sare. Waxay u baahan tahay isticmaalka walxaha si aad ah ugu adkeysanaya isbeddelada heerkulka (sida graphite isostatic), iyo naqshadeynta booska waxay u baahan tahay inay tixgeliso magdhowga ballaarinta kulaylka.
S2: Sidee lagu ogaan karaa in maydka doonidu uu fashilmay?

J: Jooji isticmaalka isla markiiba haddii calaamadaha soo socdaa ay dhacaan:
Dildilaaca ama diirka dahaarka ayaa u muuqda isha qaawan.
Isbeddelka caadiga ah ee lebbiska dahaarka waferku wuxuu ahaa>5% saddex qaybood oo isku xiga.
Heerka faakuumka ee qolka habsocodka ayaa hoos u dhacay in ka badan 10%.

Q3: Doonta Graphite vs. Quartz Doon, sidee loo doortaa?

Gabagabo : Doomaha garaafka ayaa loo door bidaa xaaladaha wax soo saarka guud, halka doomaha quartz loo tixgeliyo cilmi baarista/habsocodka gaarka ah.

Gabagabo:

Inkastoo ayDoonta PECVDmaaha qalabka ugu muhiimsan, waa "ilaaliyaha aamusan" ee xasiloonida habka. Laga soo bilaabo xulashada ilaa dayactirka, faahfaahin kasta waxay noqon kartaa barta horumarka muhiimka ah ee horumarinta wax soo saarka. Waxaan rajeynayaa in hagahan uu kaa caawin doono inaad dhex gasho ceeryaanta farsamada oo aad u heshid xalka ugu fiican ee dhimista kharashka iyo hagaajinta hufnaanta!