1. Yini isikebhe se-PECVD?
1.1 Incazelo kanye nemisebenzi ewumongo
Isikebhe se-PECVD (I-Plasma Enhanced Chemical Vapor Deposition) iyithuluzi eliyisisekelo elisetshenziselwa ukuthwala ama-wafers noma ama-substrates enqubweni ye-PECVD. Idinga ukusebenza ngokuzinza kumazinga okushisa aphezulu (300-600°C), i-plasma-activated negesi egqwalayo (efana ne-SiH₄, NH₃) imvelo. Imisebenzi yayo eyinhloko ihlanganisa:
● Ukuma okunembile: qinisekisa isikhala se-wafer efanayo futhi ugweme ukuphazamiseka kokumboza.
● Ukulawulwa kwenkambu eshisayo: thuthukisa ukusabalalisa kwezinga lokushisa futhi uthuthukise ukufana kwefilimu.
● Isithiyo sokunqanda ukunukubezeka: Ihlukanisa i-plasma endaweni yensimbi ukuze kwehliswe ingozi yokungcoliswa kwensimbi.
1.2 Izakhiwo nezinsiza ezijwayelekile
Ukukhetha okubalulekile:
● Isikebhe se-graphite (ukukhetha okujwayelekile): ukuqhutshwa kokushisa okuphezulu, ukumelana nokushisa okuphezulu, izindleko eziphansi, kodwa kudinga ukumbozwa ukuvimbela ukugqwala kwegesi.
●Isikebhe se-quartz: Ukuhlanzeka okuphezulu kakhulu, ukumelana namakhemikhali, kodwa kuyaphuka kakhulu futhi kuyabiza.
●I-Ceramics (efana ne-Al₂O₃): ayigugi, ilungele ukukhiqizwa kwe-high-frequency, kodwa ukungahambi kahle kwe-thermal.
Izici eziyinhloko zedizayini:
● Isikhala sesikhala: Fanisa ugqinsi lwewafa (njengokubekezelelana okungu-0.3-1mm).
●Idizayini yembobo yokugeleza komoya: thuthukisa ukusatshalaliswa kwegesi yokusabela futhi unciphise umphumela onqenqemeni.
●I-Surface coating: I-SiC evamile, i-TaC noma i-DLC (ikhabhoni efana nedayimane) ukuze inwebe impilo yesevisi.
2. Kungani kufanele sinake ukusebenza kwezikebhe ze-PECVD?
2.1 Izinto ezine ezinkulu ezithinta ngqo isivuno senqubo
✔ Ukulawula Ukungcola:
Ukungcola emzimbeni wesikebhe (okufana ne-Fe ne-Na) kuyashintshashintsha emazingeni okushisa aphezulu, kubangele izimbobo noma ukuvuza kwefilimu.
Ukucwecwa kwe-coating kuzokwethula izinhlayiya futhi kubangele ukonakala kokunamathela (isibonelo, izinhlayiya > 0.3μm zingabangela ukusebenza kahle kwebhethri kwehle ngo-0.5%).
✔ Ukufana kwensimu eshisayo:
Ukuqhutshwa kokushisa okungalingani kwesikebhe se-PECVD segraphite kuzoholela ekuhlukeni kobukhulu befilimu (isibonelo, ngaphansi kwemfuneko yokufana engu-±5%, umehluko wezinga lokushisa udinga ukuba ngaphansi kuka-10°C).
✔ Ukuhambisana kwe-Plasma:
Izinto ezingafanele zingabangela ukuchitheka okungavamile futhi kulimaze iwafa noma ama-electrode edivayisi.
✔ Impilo yesevisi nezindleko:
Izakhiwo zezikebhe ezisezingeni eliphansi zidinga ukushintshwa njalo (isb kanye ngenyanga), futhi izindleko zonyaka zokuzilungisa ziyabiza.
3. Ungasikhetha kanjani, usisebenzise futhi usigcine kanjani isikebhe se-PECVD?
3.1 Indlela yokukhetha enezinyathelo ezintathu
Isinyathelo 1: Cacisa amapharamitha enqubo
● Ibanga lokushisa: I-Graphite + SiC coating ingakhethwa ngaphansi kuka-450°C, futhi i-quartz noma i-ceramic iyadingeka ngaphezu kuka-600°C.
●Uhlobo lwegesi: Uma uqukethe amagesi agqwalayo afana ne-Cl2 kanye no-F-, kufanele kusetshenziswe i-high-density coating.
●Usayizi we-wafer: Amandla esakhiwo sesikebhe esingu-8-intshi/12-intshi ahluke kakhulu futhi adinga idizayini eqondisiwe.
Isinyathelo sesi-2: Linganisa amamethrikhi okusebenza
Amamethrikhi angukhiye :
●Ubulukhuni bobuso (Ra) : ≤0.8μm (indawo yokuxhumana idinga ukuba ≤0.4μm)
●Amandla ebhondi yokuhlanganisa : ≥15MPa (okujwayelekile kwe-ASTM C633)
●Ukuguqulwa kwezinga lokushisa eliphezulu (600℃) : ≤0.1mm/m (ukuhlolwa kwamahora angu-24)
Isinyathelo sesi-3: Qinisekisa ukuhambisana
● Ukufanisa okokusebenza: Qinisekisa usayizi wesixhumi esibonakalayo ngamamodeli ajwayelekile afana ne-AMAT Centura, i-centrotherm PECVD, njll.
● Ukuhlolwa kokukhiqiza kwesilingo: Kutuswa ukuba kwenziwe ukuhlolwa kweqoqo elincane lezicucu ezingu-50-100 ukuze kuqinisekiswe ukufana kwento enamathelayo (ukuchezuka okujwayelekile kokuqina kwefilimu <3%).
3.2 Izindlela Ezinhle Zokusebenzisa Nokunakekela
Imininingwane Yokusebenza:
✔Inqubo yokuhlanza ngaphambilini:
● Ngaphambi kokusetshenziswa kokuqala, i-Xinzhou idinga ukushaywa nge-Ar plasma imizuzu engu-30 ukuze isuse ukungcola okukhangisiwe phezulu.
●Ngemva kweqoqo ngalinye lenqubo, i-SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) isetshenziselwa ukuhlanza ukususa izinsalela zezinto eziphilayo.
✔ Ilayisha ama-tabo:
●Ukulayisha ngokweqile akuvunyelwe (isb. umthamo omkhulu uklanyelwe ukuthi ube yizicucu ezingu-50, kodwa umthwalo wangempela kufanele ube yizicucu ezingu-≤ ezingu-45 ukuze ugcine isikhala sokunwetshwa).
●Unqenqema lwewafa kufanele lube kude ngo-≥2mm kusukela ekugcineni kwethangi lesikebhe ukuvimbela imiphumela yomkhawulo we-plasma.
✔ Amathiphu Okwandisa Impilo
● Ukulungiswa kwe-coating: Uma ubulukhuni obuphezulu obungu-Ra＞1.2μm, ukufakwa kwe-SiC kungaphinda kufakwe i-CVD (izindleko zingaphansi ngo-40% kunokushintsha).
✔ Ukuhlola okuvamile:
● Nyanga zonke: Hlola ubuqotho bengubo usebenzisa i-interferometry yokukhanya okumhlophe.
●Ngekota: Hlaziya izinga lokucwebezela kwesikebhe nge-XRD (isikebhe esiyisinkwa esine-quartz esinesigaba sekristalu> 5% sidinga ukushintshwa).
4. Yiziphi izinkinga ezivamile?
Q1: Ingabe iIsikebhe se-PECVDzingasetshenziswa kunqubo ye-LPCVD?
A: Akunconyiwe! I-LPCVD inezinga lokushisa eliphezulu (imvamisa engu-800-1100°C) futhi idinga ukumelana nomfutho wegesi ophakeme. Kudinga ukusetshenziswa kwezinto ezikwazi ukumelana nezinga lokushisa (njenge-isostatic graphite), futhi umklamo we-slot udinga ukucabangela isinxephezelo sokunwetshwa kwe-thermal.
Q2: Unganquma kanjani ukuthi umzimba wesikebhe wehlulekile?
A: Yeka ukusebenzisa ngokushesha uma kuvela izimpawu ezilandelayo:
Imifantu noma ukuxebuka kwe-coating kubonakala ngeso lenyama.
Ukuchezuka okujwayelekile kokufana kwe-wafer coating kube ngu->5% kumaqoqo amathathu alandelanayo.
Izinga le-vacuum yegumbi lenqubo lehle ngaphezu kuka-10%.
Q3: Isikebhe se-graphite ngokumelene nesikebhe se-quartz, ungakhetha kanjani?
Isiphetho : Izikebhe ze-graphite zincanyelwa ezimweni zokukhiqiza ngobuningi, kuyilapho izikebhe ze-quartz zicatshangelwa ucwaningo lwesayensi/izinqubo ezikhethekile.
Isiphetho:
Nakuba i-Isikebhe se-PECVDakuyona into eyinhloko, "umnakekeli othule" wokuzinza kwenqubo. Ukusuka ekukhethweni kuye ekulungiseni, yonke imininingwane ingase ibe iphuzu elibalulekile lokuthuthukisa isivuno. Ngethemba ukuthi lo mhlahlandlela uzokusiza ukuthi ungene enkungu yezobuchwepheshe futhi uthole isixazululo esifanelekile sokunciphisa izindleko kanye nokwenza ngcono ukusebenza kahle!
Isikhathi sokuthumela: Mar-06-2025