Nzira yekusarudza, kushandisa uye kuchengetedza chikepe chePECVD?

1. Chii chinonzi chikepe chePECVD?

1.1 Tsanangudzo uye mabasa makuru

Chikepe chePECVD (Plasma Enhanced Chemical Vapor Deposition) chishandiso chikuru chinoshandiswa kutakura mawafer kana substrates muPECVD. Chinofanira kushanda zvakadzikama munzvimbo ine tembiricha yepamusoro (300-600°C), gasi rinogadzirwa neplasma uye rinoparadza (senge SiH₄, NH₃). Mabasa aro makuru anosanganisira:

● Nzvimbo chaiyo: iva nechokwadi chekuti wafer iri pakati penzvimbo dzakafanana uye usapindirana nejira.
● Kudzora nzvimbo yekupisa: gadzirisa kupararira kwekupisa uye kuvandudza kufanana kwefirimu.
● Chinodzivirira kusvibiswa: Chinobvisa plasma kubva mugomba remidziyo kuderedza njodzi yekusvibiswa kwesimbi.

1.2 Zvivakwa nezvinhu zvakajairika

Sarudzo yezvinhu:

● Chikepe cheGraphite (sarudzo huru): kutenderera kwekupisa kwakanyanya, kuramba kupisa kwakanyanya, mutengo wakaderera, asi chinoda kuputirwa kudzivirira ngura yegesi.
●Chikepe cheQuartz: Chakachena zvakanyanya, hachina makemikari, asi hachina kusimba uye chinodhura.
●Zvidimbu zvesimbi (zvakaita seAl₂O₃): hazvipfeki, zvakakodzera kugadzirwa nemagetsi akawanda, asi hazvina kunaka pakufambisa mafuta.

Zvinhu zvikuru zvekugadzira:

● Nzvimbo yenzvimbo: Yakaenzana nehukobvu hwewafer (senge 0.3-1mm tolerance).
●Dhizaini yegomba rekuyerera kwemhepo: gadzirisa kugoverwa kwegasi rekuita uye deredza mhedzisiro yemucheto.
●Kuputira pamusoro: Kuputira kwakajairika kweSiC, TaC kana DLC (yakafanana nedhaimani) kuti iwedzere hupenyu hwebasa.

2. Sei tichifanira kutarisisa mashandiro ezvikepe zvePECVD?

2.1 Zvinhu zvina zvikuru zvinokanganisa zvakananga goho remaitiro

✔ Kudzora Kusvibiswa:
Kusachena mumuviri wechikepe (senge Fe neNa) kunoshanduka kana tembiricha yakakwira, zvichikonzera maburi kana kubuda kwemvura mufirimu.
Kubvisa mapeya kuchaunza zvidimbu uye kukonzera zvikanganiso zvemapeya (semuenzaniso, zvidimbu zvinopfuura 0.3μm zvinogona kukonzera kuti kushanda zvakanaka kwebhatiri kudzikire ne0.5%).

✔ Kufanana kwemunda wekupisa:
Kupisa kusina kuenzana kwechikepe chePECVD graphite kuchaita kuti pave nekusiyana kweukobvu hwefirimu (semuenzaniso, pasi pezvinodiwa zvakafanana zve ±5%, musiyano wekupisa unofanirwa kunge uri pasi pe10°C).

✔ Kuenderana kwePlasma:
Zvinhu zvisina kunaka zvinogona kukonzera kubuda kwemvura zvisina kunaka uye kukuvadza maelektrodhi ewafer kana echishandiso.

✔ Nguva yebasa uye mutengo:
Matumbu echikepe asina kunaka anofanira kuchinjwa nguva nenguva (semuenzaniso kamwe chete pamwedzi), uye mari yekugadzirisa yegore negore inodhura.

3. Ungasarudza sei, kushandisa uye kuchengetedza chikepe chePECVD?

3.1 Nzira yekusarudza ine matanho matatu

Danho 1: Kujekesa maitiro ekugadzirisa

● Kupisa: Graphite + SiC coating inogona kusarudzwa pasi pe450°C, uye quartz kana ceramic inodiwa pamusoro pe600°C.
●Rudzi rwegasi: Kana paine magasi anoparadza akadai seCl2 neF-, kufukidza kwakasimba kunofanira kushandiswa.
●Saizi yewafer: Simba rekuvaka chikepe rine 8-inch/12-inch rakasiyana zvakanyanya uye rinoda dhizaini yakanangwa.

Danho rechipiri: Ongorora zviyero zvekushanda

Zviyero Zvikuru:

●Kuomarara kwenzvimbo (Ra): ≤0.8μm (nzvimbo inofanira kunge iri ≤0.4μm)
●Simba rechisungo chekuputira: ≥15MPa (ASTM C633 standard)
●Kuchinja-chinja kwekushisa kwakanyanya (600℃): ≤0.1mm/m (bvunzo yemaawa makumi maviri nemana)

Danho rechitatu: Simbisa kuti zvinoenderana here

● Kufananidza michina: Simbisa saizi yeinterface uchishandisa mamodheru akajairika akadai seAMAT Centura, centrotherm PECVD, nezvimwewo.
● Kuedzwa kwekugadzirwa kwekuyedzwa: Zvinokurudzirwa kuita bvunzo diki yezvikamu 50-100 kuti uone kufanana kwependi (kusiyana kwakajairwa kweukobvu hwefirimu <3%).

3.2 Maitiro Akanakisisa Ekushandisa Nekuchengetedza

Magadzirirwo Ekushanda:

✔Maitiro ekuchenesa usati watanga:

● Usati washandisa kekutanga, Xinzhou inofanira kupiswa neAr plasma kwemaminitsi makumi matatu kuti ibvise tsvina yakanyungudutswa pamusoro.

●Mushure mechikamu chimwe nechimwe chebasa, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) inoshandiswa kuchenesa kubvisa zvasara zve organic.

✔ Kurodha zvinhu zvisingabvumirwe:

●Kutakura zvinhu zvakawandisa hakubvumirwi (semuenzaniso, huwandu hwezvinhu hwakagadzirirwa kuva zvidimbu makumi mashanu, asi mutoro chaiwo unofanira kuva ≤ zvidimbu makumi mana nemashanu kuti uchengete nzvimbo yekuwedzera).

●Mupendero wewafer unofanira kunge uri ≥2mm kubva kumagumo etangi rechikepe kudzivirira migumisiro yemupendero weplasma.

✔ Mazano Ekuwedzera Upenyu

● Kugadzirisa machira: Kana ganda repamusoro rava Ra ＞1.2μm, SiC machira anogona kuiswazve neCVD (mutengo wacho wakaderera ne40% pane wekutsiva).

✔ Kuongororwa nguva dzose:

● Mwedzi Nemwedzi: Tarisa kusimba kwejira uchishandisa interferometry yechiedza chichena.
●Kota Nemwedzi: Ongorora mwero wekucheneswa kwechikepe kuburikidza neXRD (chikepe chewafer chequartz chine crystal phase > 5% chinofanira kutsiviwa).

4. Matambudziko api anowanzoonekwa?

Mubvunzo 1: KoChikepe chePECVDingashandiswa mukuita kweLPCVD?

A: Hazvikurudzirwi! LPCVD ine tembiricha yakakwira (kazhinji 800-1100°C) uye inoda kutsungirira kumanikidzwa kwakakwira kwegasi. Inoda kushandiswa kwezvinhu zvinoramba zvakanyanya kushanduka kwetembiricha (senge isostatic graphite), uye dhizaini yeslot inofanira kufunga nezvekubhadhara kuwedzera kwekupisa.
Mubvunzo wechipiri: Ungaziva sei kana chikepe chakundikana?

A: Rega kushandisa nekukasika kana zviratidzo zvinotevera zvikaitika:
Matsemuka kana kukweshwa kweganda kunoonekwa nemaziso asina kana kupfeka.
Kuchinja-chinja kwemhando yewafer coating kwave kuri >5% pamabatch matatu akatevedzana.
Dhigirii re vacuum rekamuri rekugadzirisa rakadonha neanopfuura 10%.

Mubvunzo wechitatu: Chikepe cheGraphite vs. chikepe chequartz, ungasarudza sei?

Mhedziso: Magwa eGraphite anofarirwa pakugadzirwa kwezvinhu zvakawanda, nepo magwa equartz achifarirwa pakutsvaga kwesainzi/maitiro akakosha.

Mhedziso:

Kunyangwe zvazvoChikepe chePECVDHaisi iyo michina mikuru, asi ndiyo "muchengeti akanyarara" wekuti zvinhu zvigadzikane. Kubva pakusarudza kusvika pakugadzirisa, zvese zvinogona kuva chinhu chikuru chekuvandudza goho. Ndinovimba gwara iri richakubatsira kupinda mumhute yehunyanzvi uye kuwana mhinduro yakakwana yekuderedza mitengo uye kuvandudza mashandiro!