Nzira yekusarudza, kushandisa nekuchengetedza chikepe chePECVD?

1. Chii chinonzi PECVD chikepe?

1.1 Tsanangudzo uye akakosha mabasa

PECVD chikepe (Plasma Enhanced Chemical Vapor Deposition) chishandiso chepakati chinoshandiswa kutakura mawafer kana ma substrates muchirongwa chePECVD. Inoda kushanda zvakatsiga mukupisa kwepamusoro (300-600 ° C), plasma-activated uye gasi rinoparadza (seSiH₄, NH₃) nharaunda. Mabasa ayo makuru anosanganisira:

● Kunyatsomira zvakanaka: chengetedza yunifomu yewafer spacing uye dzivisa kukanganisa kwekuputira.
● Thermal field control: optimize tembiricha kugovera uye kuvandudza firimu kufanana.
● Anti-pollution barriers: Inoparadzanisa plasma kubva mugomba remidziyo kuderedza njodzi yekusvibiswa kwesimbi.

1.2 Yakajairika zvimiro uye zvinhu

Kusarudzwa kwezvinhu:

● Graphite boat (mainstream choice): high thermal conductivity, high temperature resistance, mutengo wakaderera, asi inoda kuvhara kudzivirira gasi corrosion.
●Quartz chikepe: Ultra-yakakwirira kuchena, inodzivirira kemikari, asi yakanyanya brittle uye inodhura.
●Ceramics (yakadai seAl₂O₃): isingapfekeki, inokodzera kugadzirwa kwepamusoro-soro, asi kusina kunaka kwekushisa.

Zvinhu zvakakosha zvekugadzira:

● Slot spacing: Match wafer ukobvu (senge 0.3-1mm kushivirira).
●Mhepo inoyerera gomba dhizaini: gadzirisa kuita gasi kugovera uye kuderedza kumucheto mhedzisiro.
●Kupfeka kwepamusoro: Yakajairwa SiC, TaC kana DLC (dhaimondi-yakafanana kabhoni) yekuwedzera hupenyu hwesevhisi.

2. Sei tichifanira kutarisisa kuita kwemabhoti ePECVD?

2.1 Zvinhu zvina zvikuru zvinokanganisa goho rekuita

✔ Kudzora Kusvibisa:
Zvisina kuchena mumutumbi wechikepe (zvakadai seFe naNa) zvinoputika pakupisa kwakanyanya, zvichikonzera mapini kana kubuda mufirimu.
Coating peeling ichaunza zvidimbu uye kukonzera kukanganisa kwekupfekedza (semuenzaniso, zvimedu> 0.3μm zvinogona kuita kuti bhatiri ridonhe ne0.5%).

✔ Thermal munda kufanana:
Kupisa kusina kuenzana kwechikepe chePECVD graphite kuchaita kuti pave nekusiyana kwehuwandu hwefirimu (somuenzaniso, pasi pezvinodiwa zvakafanana zve ± 5%, kusiyana kwekushisa kunoda kuva pasi pe10 ° C).

✔ kuenderana kwePlasma:
Zvinhu zvisina kufanira zvinogona kukonzera kubuda zvisina tsarukano uye kukuvadza wafer kana maelectrode emudziyo.

✔ Hupenyu hwebasa uye mutengo:
Zvikepe zvemhando yakaderera zvinoda kutsiviwa nguva nenguva (semuenzaniso kamwe chete pamwedzi), uye mari yekuchengeta pagore inodhura.

3. Ungasarudza sei, kushandisa nekuchengetedza chikepe chePECVD?

3.1 Matanho matatu ekusarudza nzira

Danho 1: Rondedzera maitiro parameters

● Kupisa kwekushisa: Graphite + SiC coating inogona kusarudzwa pasi pe450 ° C, uye quartz kana ceramic inodiwa pamusoro pe600 ° C.
●Rudzi rwegasi: Kana uine magasi anoparadza akadai seCl2 uye F-, kukwirira-kuvharisa kunofanirwa kushandiswa.
●Wafer size: 8-inch/12-inch chikepe chimiro chesimba chakasiyana zvakanyanya uye chinoda dhizaini yakanangwa.

Nhanho yechipiri: Ongorora maitiro ekuita

Makiyi Metrics :

●Kushata kwepamusoro (Ra): ≤0.8μm (panzvimbo yekubata inoda kuva ≤0.4μm)
●Coating bond simba: ≥15MPa (ASTM C633 standard)
●High tembiricha deformation (600 ℃) : ≤0.1mm/m (24 maawa bvunzo)

Danho rechitatu: Simbisa kuenderana

● Equipment inofananidzwa: Simbisa ukuru hwemashandisirwo nemamodheru makuru akadai seAMAT Centura, centrotherm PECVD, nezvimwe.
● Muedzo wekugadzira bvunzo: Inokurudzirwa kuita diki batch bvunzo ye50-100 zvimedu kuti uone kufanana kwejasi (kutsauka kwakajairwa kwefirimu ukobvu <3%).

3.2 Maitiro Akanakisa Ekushandisa uye Kuchengeta

Operation Specifications:

✔Pre-kuchenesa maitiro:

● Isati yatanga kushandiswa, Xinzhou inoda kubhombwa neAr plasma kwemaminitsi makumi matatu kuti ibvise tsvina inenge yaiswa pamusoro.

●Mushure mechikamu chega chega chegadziriro, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) inoshandiswa kuchenesa kubvisa zvisaririra zveorganic.

✔ Kurodha taboos:

●Kuwedzeredza kunorambidzwa (semuenzaniso huwandu hwehuwandu hwakagadzirirwa kuva zvidimbu makumi mashanu, asi mutoro chaiwo unofanirwa kuva ≤ 45 zvidimbu kuchengetedza nzvimbo yekuwedzera).

●Mupendero wewafer unofanirwa kunge uri ≥2mm kubva kumagumo echikepe tangi kudzivirira plasma kumucheto kwemhedzisiro.

✔ Mazano Ekuwedzera Upenyu

● Coating kugadzirisa: Kana pamusoro roughness Ra＞1.2μm, SiC coating anogona re-deposit neCVD (mutengo iri 40% yakaderera pane kutsiva).

✔ Kugara uchiyedzwa:

● Mwedzi wega wega: Tarisa kuvhara kutendeseka uchishandisa white light interferometry.
●Quarterly: Ongorora iyo crystallization degree yechikepe kuburikidza neXRD (quartz wafer boat ine crystal phase> 5% inoda kutsiviwa).

4. Ndezvipi zvinetso zvinowanzoitika?

Q1: Unogona herePECVD chikepekushandiswa muLPCVD maitiro?

A: Hazvikurudzirwi! LPCVD ine tembiricha yepamusoro (kazhinji 800-1100°C) uye inoda kushingirira kukwira kwegasi. Zvinoda kushandiswa kwezvinhu zvinodzivirira kushanduka kwekushisa (zvakadai se isostatic graphite), uye slot design inoda kufunga nezvekuwedzera kwekushisa kwemuripo.
Q2: Nzira yekuziva sei kana mutumbi wechikepe wakundikana?

A: Rega kushandisa nekukurumidza kana zvinotevera zviratidzo zvikaitika:
Makatsemuka kana kupeuka penzura zvinoonekwa nemeso.
Kutsauka kwakajairwa kwewafer coating kufanana kwave > 5% yemabheji matatu akateedzana.
Iyo vacuum degree yekamuri yekuita yakadonha neinopfuura 10%.

Q3: Graphite chikepe vs. quartz chikepe, ungasarudza sei?

Mhedziso : Mabhoti eGraphite anosarudzwa pakugadzirwa kwehuwandu, nepo mabhoti equartz achitariswa sekutsvaga kwesainzi / maitiro akasarudzika.

Mhedziso:

Kunyangwe iyoPECVD chikepehaisi iyo huru midziyo, ndeye "akanyarara muchengeti" wekugadzikana kwemaitiro. Kubva pakusarudzwa kusvika pakugadzirisa, zvese zvese zvinogona kuve nzvimbo yakakosha yekuvandudza goho. Ndinovimba gwara iri richakubatsira iwe kupinda mukati mehute yehunyanzvi uye kuwana iyo yakakwana mhinduro yekudzikisa mutengo uye kuvandudza kushanda!