Nigute ushobora guhitamo, gukoresha no kubungabunga ubwato bwa PECVD?

1. Ubwato bwa PECVD ni iki?

1.1 Ibisobanuro n'imikorere yibanze

Ubwato bwa PECVD (Plasma Enhanced Chemical Vapor Deposition) nigikoresho cyibanze gikoreshwa mu gutwara wafer cyangwa substrate mugikorwa cya PECVD. Irakeneye gukora neza mubushyuhe bwo hejuru (300-600 ° C), plasma ikora na gaze yangiza (nka SiH₄, NH₃). Ibikorwa byayo byingenzi birimo:

Acing Ahantu heza: reba umwanya wa wafer umwe kandi wirinde kwivanga.
Control Igenzura ryubushyuhe: guhuza ubushyuhe no gukwirakwiza firime.
Inzitizi yo kurwanya umwanda: Gutandukanya plasma mu cyuho cy’ibikoresho kugirango bigabanye ibyago byo kwanduza ibyuma.

1.2 Imiterere n'ibikoresho bisanzwe

Guhitamo ibikoresho:

Boat Ubwato bwa Graphite (guhitamo inzira nyamukuru): ubushyuhe bwinshi bwumuriro, kurwanya ubushyuhe bwinshi, kugiciro gito, ariko bisaba gutwikira kugirango wirinde kwangirika.
●Ubwato bwa Quartz: Ultra-hejuru cyane, irwanya imiti, ariko yoroheje cyane kandi ihenze.
●Ububumbyi (nka Al₂O₃): butihanganira kwambara, bukwiranye n’umusaruro mwinshi, ariko ubushyuhe buke bwumuriro.

Ibintu by'ingenzi bishushanya:

Acing Umwanya muto: Huza uburebure bwa wafer (nko kwihanganira 0.3-1mm).
●Igishushanyo mbonera cyo mu kirere: koroshya gukwirakwiza gaze no kugabanya ingaruka.
●Ubuso bwubuso: Ubusanzwe SiC, TaC cyangwa DLC (karubone isa na karubone) kugirango yongere ubuzima bwa serivisi.

2. Kuki tugomba kwitondera imikorere yubwato bwa PECVD?

2.1 Ibintu bine byingenzi bigira ingaruka ku musaruro wibikorwa

Control Kurwanya umwanda:
Umwanda mumubiri wubwato (nka Fe na Na) uhindagurika mubushyuhe bwinshi, bigatera pinholes cyangwa kumeneka muri firime.
Gukuramo ibishishwa bizana ibice kandi bitera inenge (urugero, ibice> 0.3μm birashobora gutuma imikorere ya bateri igabanukaho 0.5%).

Uburinganire bwumuriro:
Gutwara ubushyuhe butaringaniye bwubwato bwa grafitike ya PECVD bizatuma habaho itandukaniro mubyimbye bya firime (urugero, munsi yuburinganire bwa 5%, itandukaniro ryubushyuhe rigomba kuba munsi ya 10 ° C).

Compla Guhuza plasma:
Ibikoresho bidakwiye birashobora gutera gusohora bidasanzwe no kwangiza wafer cyangwa ibikoresho bya electrode.

Life Ubuzima bwa serivisi nigiciro:
Ubwato buke bwo mu bwato bugomba gusimburwa kenshi (urugero rimwe mu kwezi), kandi amafaranga yo kubungabunga buri mwaka ahenze.

3. Nigute ushobora guhitamo, gukoresha no kubungabunga ubwato bwa PECVD?

3.1 Uburyo bwo guhitamo intambwe eshatu

Intambwe ya 1: Sobanura ibipimo byimikorere

Range Urwego rw'ubushyuhe: Igicapo cya Graphite + SiC gishobora gutoranywa munsi ya 450 ° C, kandi quartz cyangwa ceramic irakenewe hejuru ya 600 ° C.
●Ubwoko bwa gazi: Iyo irimo imyuka yangirika nka Cl2 na F-, hagomba gukoreshwa igicucu kinini.
●Ingano ya Wafer: 8-inim / 12-yuburebure bwubwato imbaraga ziratandukanye cyane kandi bisaba igishushanyo mbonera.

Intambwe ya 2: Suzuma ibipimo ngenderwaho

Ibipimo by'ingenzi:

●Ubuso bwubuso (Ra): ≤0.8 mm (ubuso bwitumanaho bugomba kuba ≤0.4μm)
●Ingufu zububiko: ≥15MPa （ASTM C633 isanzwe)
●Ubushyuhe bwo hejuru (600 ℃): ≤0.1mm / m (ikizamini cyamasaha 24)

Intambwe ya 3: Kugenzura guhuza

Guhuza ibikoresho: Emeza ingano yimbere hamwe na moderi nyamukuru nka AMAT Centura, centrotherm PECVD, nibindi.
Test Ikizamini cyo gukora igeragezwa: Birasabwa gukora ikizamini gito cyibice 50-100 kugirango hamenyekane uburinganire bwacyo (gutandukana bisanzwe mubyimbye bya firime <3%).

3.2 Imyitozo myiza yo gukoresha no gufata neza

Ibisobanuro bya Operation:

✔Uburyo bwo kubanza gukora isuku:

● Mbere yo gukoreshwa bwa mbere, Xinzhou igomba guterwa na Ar plasma muminota 30 kugirango ikureho umwanda wamamajwe hejuru.

●Nyuma ya buri cyiciro cyibikorwa, SC1 (NH₄OH: H₂O₂: H₂O = 1: 1: 5) ikoreshwa mugusukura kugirango ikureho ibisigazwa kama.

Kuremera kirazira:

●Kurenza urugero birabujijwe (urugero: ubushobozi ntarengwa bwagenewe kuba ibice 50, ariko umutwaro nyirizina ugomba kuba ≤ 45 kugirango ubike umwanya wo kwaguka).

●Inkombe ya wafer igomba kuba ≥2mm uvuye kumpera yubwato kugirango wirinde ingaruka za plasma.

. Inama zo kwagura ubuzima

Repair Gusana ibifuniko: Iyo hejuru yubuso Ra ＞ 1,2 mm, igipande cya SiC gishobora kongera kubikwa na CVD (igiciro kiri munsi ya 40% ugereranije no gusimburwa).

Testing Kwipimisha bisanzwe:

● Ukwezi: Reba uburinganire bwuzuye ukoresheje urumuri rwera interferometrie.
●Igihembwe: Gisesengura urwego rwo korohereza ubwato binyuze muri XRD (ubwato bwa quartz wafer hamwe na kristu ya kristu> 5% bigomba gusimburwa).

4. Ni ibihe bibazo bisanzwe?

Q1: BirashobokaUbwato bwa PECVDgukoreshwa muburyo bwa LPCVD?

Igisubizo: Ntabwo byemewe! LPCVD ifite ubushyuhe buri hejuru (mubisanzwe 800-1100 ° C) kandi ikeneye kwihanganira umuvuduko mwinshi wa gaze. Irasaba gukoresha ibikoresho birwanya ihindagurika ryubushyuhe (nka grafitike ya isostatike), kandi igishushanyo mbonera kigomba gutekereza ku ndishyi zo kwagura ubushyuhe.
Q2: Nigute ushobora kumenya niba umubiri wubwato watsinzwe?

Igisubizo: Hagarika gukoresha ako kanya niba ibimenyetso bikurikira bibaye:
Kuvunika cyangwa gutwikisha ibishishwa bigaragara mumaso.
Gutandukana bisanzwe bya wafer coating yabaye> 5% mubice bitatu bikurikiranye.
Impamyabumenyi ya vacuum yicyumba yagabanutseho hejuru ya 10%.

Q3: Ubwato bwa Graphite na quartz ubwato, uburyo bwo guhitamo？

Umwanzuro: Ubwato bwa Graphite bukundwa mubikorwa byinshi, mugihe ubwato bwa quartz bufatwa kubushakashatsi bwa siyansi / inzira zidasanzwe.

Umwanzuro:

NubwoUbwato bwa PECVDntabwo aribikoresho nyamukuru, ni "umurinzi ucecetse" wo gutuza inzira. Kuva guhitamo kugeza kubungabunga, buri kantu kose karashobora kuba intambwe yingenzi yo gutera imbere. Nizere ko iki gitabo kizagufasha gucengera mu gihu cya tekiniki no kubona igisubizo cyiza cyo kugabanya ibiciro no kunoza imikorere!