Yuav xaiv, siv thiab tswj lub nkoj PECVD li cas?

1. Lub nkoj PECVD yog dab tsi?

1.1 Cov ntsiab lus thiab cov haujlwm tseem ceeb

PECVD nkoj (Plasma Enhanced Chemical Vapor Deposition) yog cov cuab yeej tseem ceeb siv los nqa wafers lossis substrates hauv txheej txheem PECVD. Nws yuav tsum ua haujlwm ruaj khov hauv qhov kub siab (300-600 ° C), plasma-activated thiab corrosive gas (xws li SiH₄, NH₃) ib puag ncig. Nws lub luag haujlwm tseem ceeb suav nrog:

● Precise positioning: xyuas kom meej wafer sib nrug thiab tsis txhob txheej cuam tshuam.
● Thermal field control: optimize temperature distribution and improve film uniformity.
● Anti-pollution barrier: cais cov ntshav los ntawm cov khoom siv kab noj hniav kom txo tau qhov kev pheej hmoo ntawm cov hlau paug.

1.2 Hom qauv thiab cov khoom siv

Kev xaiv khoom siv:

● Graphite nkoj (kev xaiv tseem ceeb): thermal conductivity, kub tsis kam, tsis tshua muaj nqi, tab sis yuav tsum tau txheej los tiv thaiv roj corrosion.
●Quartz nkoj: Ultra-siab purity, tshuaj resistant, tab sis heev nkig thiab kim.
●Ceramics (xws li Al₂O₃): hnav-resistant, haum rau high-frequency ntau lawm, tab sis tsis zoo thermal conductivity.

Cov yam ntxwv tseem ceeb ntawm kev tsim:

● Qhov sib nrug: Match wafer thickness (xws li 0.3-1mm kam rau ua).
●Huab cua ntws qhov tsim: optimize cov tshuaj tiv thaiv roj faib thiab txo cov nyhuv ntug.
●Txheej Txheej: Cov SiC, TaC lossis DLC (pob zeb diamond zoo li cov pa roj carbon) txheej kom ntev kev pab cuam lub neej.

2. Vim li cas peb yuav tsum xyuam xim rau kev ua haujlwm ntawm PECVD nkoj?

2.1 Plaub yam tseem ceeb uas cuam tshuam ncaj qha rau cov txheej txheem yield

✔ Pollution Control:
Cov impurities nyob rau hauv lub nkoj lub cev (xws li Fe thiab Na) volatilize ntawm kub kub, ua rau pinholes los yog to hauv zaj duab xis.
Txheej txheej txheej yuav qhia txog cov khoom thiab ua rau cov txheej txheem tsis xws luag (piv txwv li, cov khoom siv> 0.3μm tuaj yeem ua rau cov roj teeb ua haujlwm poob los ntawm 0.5%).

✔ Thermal field uniformity:
Kev tsis sib xws ntawm lub nkoj PECVD graphite yuav ua rau muaj qhov sib txawv ntawm cov yeeb yaj kiab tuab (piv txwv li, nyob rau hauv qhov kev xav tau sib xws ntawm ± 5%, qhov kub sib txawv yuav tsum tsawg dua 10 ° C).

✔ Plasma compatibility:
Cov khoom siv tsis raug yuav ua rau muaj qhov txawv txav thiab ua rau lub wafer lossis cov khoom siv electrodes puas.

✔ Kev pab lub neej thiab tus nqi:
Lub nkoj tsis zoo yuav tsum tau hloov ntau zaus (xws li ib hlis ib zaug), thiab cov nqi tu txhua xyoo yog kim.

3. Yuav xaiv, siv thiab tswj lub nkoj PECVD li cas?

3.1 Txoj kev xaiv peb-kauj ruam

Kauj Ruam 1: Qhia meej txog cov txheej txheem

● Qhov kub thiab txias: Graphite + SiC txheej tuaj yeem xaiv qis dua 450 ° C, thiab quartz lossis ceramic yuav tsum siab tshaj 600 ° C.
●Gas hom: Thaum muaj cov roj corrosive xws li Cl2and F-, cov txheej txheem siab yuav tsum tau siv.
●Wafer loj: 8-nti / 12-inch nkoj qauv lub zog yog qhov sib txawv thiab xav tau kev tsim qauv.

Kauj Ruam 2: Ntsuas cov ntsuas kev ua tau zoo

Cov Metric tseem ceeb:

●Deg roughness (Ra): ≤0.8μm (qhov kev sib cuag yuav tsum yog ≤0.4μm)
●Txheej daim ntawv cog lus zog: ≥15MPa (ASTM C633 tus qauv)
●Kub deformation (600 ℃): ≤0.1mm / m (24 teev)

Kauj Ruam 3: Tshawb xyuas kev sib raug zoo

● Cov khoom sib txuam: Paub meej qhov loj ntawm qhov interface nrog cov qauv tseem ceeb xws li AMAT Centura, centrotherm PECVD, thiab lwm yam.
● Kev sim ntau lawm: Nws raug nquahu kom ua qhov kev sim me me ntawm 50-100 daim los xyuas qhov sib xws ntawm cov txheej txheem (tus qauv sib txawv ntawm cov yeeb yaj kiab thickness <3%).

3.2 Kev coj ua zoo tshaj plaws rau kev siv thiab tu

Kev ua haujlwm Specifications:

✔Cov txheej txheem ua ntej ntxuav:

● Ua ntej thawj zaug siv, Xinzhou yuav tsum tau foob pob nrog Ar plasma rau 30 feeb kom tshem tawm impurities adsorbed ntawm qhov chaw.

●Tom qab txhua pawg txheej txheem, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) yog siv los ntxuav kom tshem tawm cov organic seem.

✔ Loading taboos:

●Kev txwv tsis pub tshaj (piv txwv li lub peev xwm siab tshaj plaws yog tsim los ua 50 daim, tab sis qhov tseeb load yuav tsum yog ≤ 45 daim kom tseg qhov chaw rau kev nthuav dav).

●Lub ntug ntawm lub wafer yuav tsum yog ≥2mm deb ntawm qhov kawg ntawm lub nkoj lub nkoj kom tiv thaiv plasma ntug teebmeem.

✔ Cov lus qhia rau Extending Life

● Kev kho txheej txheej: Thaum lub npoo roughness Ra＞1.2μm, SiC txheej tuaj yeem rov ua dua los ntawm CVD (tus nqi yog 40% qis dua hloov).

✔ Kev kuaj tsis tu ncua:

● Txhua hli: Tshawb xyuas cov txheej txheem kev ncaj ncees siv lub teeb dawb interferometry.
●Peb lub hlis twg: Ntsuam xyuas cov qib crystallization ntawm lub nkoj los ntawm XRD (quartz wafer nkoj nrog crystal theem> 5% yuav tsum tau hloov).

4. Cov teeb meem tshwm sim yog dab tsi?

Q1: tuaj yeem ua tauPECVD nkojsiv rau hauv cov txheej txheem LPCVD?

A: Tsis pom zoo! LPCVD muaj qhov kub thiab txias (feem ntau yog 800-1100 ° C) thiab yuav tsum tiv taus roj siab dua. Nws yuav tsum tau siv cov ntaub ntawv uas tiv taus qhov kub thiab txias (xws li isostatic graphite), thiab cov qauv tsim yuav tsum xav txog thermal expansion nyiaj.
Q2: Yuav ua li cas txiav txim siab seb lub nkoj lub nkoj puas ua tsis tiav?

A: Tsis txhob siv tam sim yog tias cov tsos mob hauv qab no tshwm sim:
Cov kab nrib pleb lossis txheej tev tawm yog pom ntawm qhov muag liab qab.
Tus qauv sib txawv ntawm wafer txheej uniformity tau> 5% rau peb pawg sib law liag.
Lub tshuab nqus tsev kawm ntawv ntawm cov txheej txheem chamber poob los ntawm ntau tshaj 10%.

Q3: Graphite nkoj vs. quartz nkoj, yuav xaiv li cas?

Xaus: Cov nkoj graphite yog nyiam rau cov xwm txheej ntau lawm, thaum lub nkoj quartz raug txiav txim siab rau kev tshawb fawb / txheej txheem tshwj xeeb.

Xaus:

Txawm tias covPECVD nkojtsis yog cov cuab yeej tseem ceeb, nws yog "tus neeg saib xyuas ntsiag to" ntawm cov txheej txheem kev ruaj ntseg. Los ntawm kev xaiv mus rau kev saib xyuas, txhua qhov nthuav dav yuav dhau los ua qhov tseem ceeb ntawm kev txhim kho cov txiaj ntsig. Kuv vam tias phau ntawv qhia no yuav pab koj nkag mus rau cov huab cua thiab nrhiav kev daws teeb meem zoo rau kev txo nqi thiab txhim kho kev ua haujlwm!