Yuav xaiv, siv thiab tswj lub nkoj PECVD li cas?

1. Lub nkoj PECVD yog dab tsi?

1.1 Lub ntsiab lus thiab cov haujlwm tseem ceeb

PECVD nkoj (Plasma Enhanced Chemical Vapor Deposition) yog ib lub cuab yeej tseem ceeb uas siv los nqa cov wafers lossis cov substrates hauv cov txheej txheem PECVD. Nws yuav tsum ua haujlwm ruaj khov hauv qhov kub siab (300-600 ° C), plasma-activated thiab corrosive gas (xws li SiH₄, NH₃) ib puag ncig. Nws cov haujlwm tseem ceeb suav nrog:

● Kev tso qhov chaw kom meej: xyuas kom meej tias qhov sib nrug ntawm cov wafer sib npaug thiab tsis txhob cuam tshuam rau txheej txheej.
● Kev tswj cua sov: ua kom qhov kub thiab txias zoo dua thiab txhim kho qhov sib npaug ntawm zaj duab xis.
● Tiv thaiv kev ua qias tuaj: Cais cov plasma tawm ntawm qhov chaw ntawm cov khoom siv kom txo qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm cov hlau.

1.2 Cov qauv thiab cov ntaub ntawv ib txwm muaj

Kev xaiv khoom siv:

● Lub nkoj graphite (kev xaiv tseem ceeb): kev ua kom muaj cua sov siab, tiv taus kub siab, tus nqi qis, tab sis yuav tsum tau muaj txheej txheej kom tiv thaiv kev xeb ntawm cov roj.
●Lub nkoj Quartz: Ultra-high purity, tshuaj resistant, tab sis heev brittle thiab kim.
●Cov khoom siv ua los ntawm av nplaum (xws li Al₂O₃): tsis yooj yim hnav, tsim nyog rau kev tsim khoom ntau zaus, tab sis kev ua haujlwm thermal tsis zoo.

Cov yam ntxwv tseem ceeb ntawm kev tsim qauv:

● Qhov sib nrug ntawm qhov: Sib phim qhov tuab ntawm cov wafer (xws li 0.3-1 hli kam rau siab).
●Tsim qhov cua ntws: ua kom zoo dua qhov kev faib tawm roj thiab txo cov nyhuv ntug.
●Txheej saum npoo: Txheej SiC, TaC lossis DLC (pob zeb diamond-zoo li carbon) kom ntev lub neej kev pabcuam.

2. Vim li cas peb thiaj yuav tsum tau ua tib zoo saib xyuas kev ua haujlwm ntawm cov nkoj PECVD?

2.1 Plaub yam tseem ceeb uas cuam tshuam ncaj qha rau cov txheej txheem ua haujlwm

✔ Kev Tswj Xyuas Kev Ua Phem:
Cov khoom tsis huv hauv lub cev nkoj (xws li Fe thiab Na) yaj thaum kub siab, ua rau muaj qhov lossis xau hauv zaj duab xis.
Kev tev tawv ntawm cov txheej yuav ua rau muaj cov khoom me me thiab ua rau muaj qhov tsis zoo ntawm cov txheej (piv txwv li, cov khoom me me > 0.3μm tuaj yeem ua rau lub roj teeb ua haujlwm poob qis 0.5%).

✔ Kev sib npaug ntawm thaj chaw thermal:
Kev ua kom sov tsis sib xws ntawm lub nkoj PECVD graphite yuav ua rau muaj qhov sib txawv ntawm cov zaj duab xis tuab (piv txwv li, nyob rau hauv qhov yuav tsum tau sib xws ntawm ± 5%, qhov sib txawv ntawm qhov kub yuav tsum tsawg dua 10 ° C).

✔ Kev sib raug zoo ntawm cov ntshav:
Cov ntaub ntawv tsis zoo yuav ua rau muaj kev tso tawm tsis zoo thiab ua rau lub wafer lossis cov electrodes ntawm lub cuab yeej puas tsuaj.

✔ Lub neej ua haujlwm thiab tus nqi:
Cov nkoj tsis zoo yuav tsum tau hloov pauv ntau zaus (piv txwv li ib hlis ib zaug), thiab cov nqi kho txhua xyoo kim heev.

3. Yuav xaiv, siv thiab tswj lub nkoj PECVD li cas?

3.1 Txoj kev xaiv peb kauj ruam

Kauj Ruam 1: Piav qhia cov txheej txheem

● Qhov kub thiab txias: Koj xaiv tau cov txheej graphite + SiC hauv qab 450°C, thiab xav tau quartz lossis ceramic saum 600°C.
●Hom roj: Thaum muaj cov roj corrosive xws li Cl2 thiab F-, yuav tsum siv cov txheej txheem siab.
●Qhov loj ntawm Wafer: 8-nti/12-nti lub zog ntawm lub nkoj sib txawv heev thiab xav tau kev tsim qauv tshwj xeeb.

Kauj Ruam 2: Soj ntsuam cov ntsuas kev ua tau zoo

Cov Ntsuas Tseem Ceeb:

●Qhov roughness ntawm qhov chaw (Ra): ≤0.8μm (qhov chaw sib cuag yuav tsum yog ≤0.4μm)
●Lub zog sib txuas ntawm txheej: ≥15MPa (ASTM C633 tus qauv)
●Kev hloov pauv kub siab (600 ℃): ≤0.1mm / m (24 teev sim)

Kauj Ruam 3: Xyuas kom meej tias qhov sib xws

● Kev sib phim cov khoom siv: Paub meej tias qhov loj ntawm qhov interface nrog cov qauv tseem ceeb xws li AMAT Centura, centrotherm PECVD, thiab lwm yam.
● Kev sim ntau lawm: Nws raug pom zoo kom ua qhov kev sim me me ntawm 50-100 daim los xyuas seb qhov txheej puas sib xws (tus qauv sib txawv ntawm cov tuab zaj duab xis <3%).

3.2 Cov Kev Xyaum Zoo Tshaj Plaws rau Kev Siv thiab Kev Txij Nkawm

Cov Lus Qhia Txog Kev Ua Haujlwm:

✔Cov txheej txheem ua ntej ntxuav:

● Ua ntej siv thawj zaug, Xinzhou yuav tsum tau muab Ar plasma rau 30 feeb kom tshem tawm cov khoom tsis huv uas nyob saum npoo.

●Tom qab txhua pawg txheej txheem, SC1 (NH₄OH:H₂O₂:H₂O=1:1:5) yog siv rau kev ntxuav kom tshem tawm cov organic residues.

✔ Cov kev txwv tsis pub thauj khoom:

●Txwv tsis pub thauj khoom ntau dhau (piv txwv li, qhov muaj peev xwm ntau tshaj plaws yog tsim los kom yog 50 daim, tab sis qhov thauj khoom tiag tiag yuav tsum yog ≤ 45 daim kom khaws qhov chaw rau kev nthuav dav).

●Ntug ntawm lub wafer yuav tsum yog ≥2mm deb ntawm qhov kawg ntawm lub nkoj tank kom tiv thaiv cov teebmeem ntawm ntug plasma.

✔ Cov Lus Qhia rau Kev Ua Neej Ntev

● Kho cov txheej: Thaum qhov roughness ntawm qhov chaw Ra> 1.2μm, SiC txheej tuaj yeem rov tso dua los ntawm CVD (tus nqi qis dua 40% piv rau kev hloov pauv).

✔ Kev kuaj xyuas tsis tu ncua:

● Txhua Hli: Siv lub teeb dawb interferometry los xyuas kom meej tias cov txheej txheej ruaj khov.
●Txhua Peb Lub Hlis: Tshawb xyuas qhov degree crystallization ntawm lub nkoj los ntawm XRD (lub nkoj quartz wafer nrog theem siv lead ua> 5% yuav tsum tau hloov).

4. Cov teeb meem uas feem ntau tshwm sim yog dab tsi?

Q1: Puas yognkoj PECVDsiv rau hauv cov txheej txheem LPCVD?

A: Tsis pom zoo! LPCVD muaj qhov kub siab dua (feem ntau yog 800-1100 ° C) thiab yuav tsum tau tiv taus qhov siab ntawm cov roj. Nws yuav tsum tau siv cov ntaub ntawv uas tiv taus kev hloov pauv kub (xws li isostatic graphite), thiab qhov tsim qhov yuav tsum xav txog kev them nyiaj thermal expansion.
Q2: Yuav ua li cas thiaj paub tseeb tias lub cev nkoj puas ua tsis tiav?

A: Tsum siv tam sim ntawd yog tias cov tsos mob hauv qab no tshwm sim:
Cov kab nrib pleb lossis txheej txheej tev tawm pom tau rau ntawm qhov muag liab qab.
Qhov kev hloov pauv tus qauv ntawm kev sib npaug ntawm wafer txheej tau yog > 5% rau peb pawg sib law liag.
Qhov degree nqus tsev ntawm lub chamber txheej txheem poob qis ntau dua 10%.

Q3: Graphite nkoj vs. quartz nkoj, yuav ua li cas xaiv?

Xaus Lus: Cov nkoj graphite yog qhov zoo dua rau cov xwm txheej tsim khoom loj, thaum cov nkoj quartz raug txiav txim siab rau kev tshawb fawb / cov txheej txheem tshwj xeeb.

Xaus lus:

Txawm hais tias qhovnkoj PECVDTsis yog cov khoom siv tseem ceeb, nws yog "tus saib xyuas ntsiag to" ntawm kev ruaj khov ntawm cov txheej txheem. Txij li kev xaiv mus rau kev saib xyuas, txhua yam me me yuav dhau los ua qhov tseem ceeb rau kev txhim kho cov txiaj ntsig. Kuv vam tias phau ntawv qhia no yuav pab koj nkag mus rau hauv qhov teeb meem kev siv tshuab thiab nrhiav kev daws teeb meem zoo tshaj plaws rau kev txo nqi thiab kev txhim kho kev ua haujlwm zoo!