LubCVD TaC txheejLub Phaj Susceptor los ntawm vet-china yog tsim los rau kev ua haujlwm siab hauv cov txheej txheem tshuaj lom neeg vapor deposition (CVD). Lub susceptor no muaj lub zogTxheej txheej TaC (Tantalum Carbide), muab kev ruaj khov thermal zoo heev, tiv taus tshuaj lom neeg, thiab ua kom ruaj khov, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau kev tsim khoom semiconductor thiab kev siv kub siab.CVD TaC txheejua kom muaj kev tiv thaiv zoo rau oxidation thiab hnav, uas tso cai rau tus neeg raug mob kom tswj tau nws txoj kev ncaj ncees thiab kev ua haujlwm hauv qhov chaw nyuaj.
kws kho tsiaj-suav tebCVD TaC txheejPlate Susceptor sawv tawm rau nws lub peev xwm los faib cov cua sov sib npaug thaum lub sijhawm CVD, ua kom ntseeg tau tias cov txheej txheem tso tawm raug thiab txhim kho kev ua haujlwm ntawm semiconductor. Lub txheej Ta-C muab kev tiv thaiv ntxiv tiv thaiv kev xeb tshuaj lom neeg, txuas ntxiv lub neej ntawm susceptor thiab txhim kho kev ua tau zoo tag nrho. Nrog kev sib xyaw ua ke ntawm cov thev naus laus zis CVD susceptor siab heev thiab cov txheej txheem tshuaj lom neeg TaC zoo, lub susceptor no yog ib qho tseem ceeb rau kev lag luam uas xav tau kev ua haujlwm raug thiab kev ntseeg siab hauv qhov chaw kub siab.
Txawm siv rau hauv kev tsim cov semiconductors lossis lwm yam kev siv high-tech, covCVD TaC Coated Phaj Susceptoryog tsim los ua kom tau raws li qhov xav tau ntawm kev tsim khoom niaj hnub. Txhawb nqa los ntawm Semicera lub koob npe nrov rau kev tsim kho tshiab thiab zoo, cov khoom no muaj kev ua tau zoo tshaj plaws thiab kev ruaj khov ntev, ua rau nws yog qhov kev xaiv ntseeg siab rau CVD cov txheej txheem.
TaC txheej yog ib hom tantalum carbide (TaC) txheej uas npaj los ntawm kev siv tshuab ua kom lub cev vapor deposition, nws muaj cov yam ntxwv hauv qab no:
1. Kev nyuaj siab: TaC txheej hardness siab, feem ntau tuaj yeem ncav cuag 2500-3000HV, yog ib qho txheej tawv zoo heev.
2. Kev hnav tsis kam: TaC txheej yog qhov hnav tsis kam heev, uas tuaj yeem txo qhov hnav thiab kev puas tsuaj ntawm cov khoom siv kho tshuab thaum siv.
3. Kev tiv taus kub zoo: TaC txheej kuj tseem tuaj yeem tswj tau nws cov kev ua tau zoo heev nyob rau hauv qhov chaw kub siab.
4. Kev ruaj khov tshuaj zoo: TaC txheej muaj kev ruaj khov tshuaj zoo thiab tuaj yeem tiv taus ntau yam tshuaj lom neeg, xws li cov kua qaub thiab cov hauv paus.
| 碳化钽涂层物理特性物理特性 Cov khoom siv lub cev ntawm TaC txheej | |
| 密度/ Qhov Ceev | 14.3 (g/cm³) |
| 比辐射率 / Kev ua haujlwm tshwj xeeb | 0.3 |
| 热膨胀系数 / Cov coefficient ntawm kev nthuav dav ntawm thermal | 6.3 10-6/K |
| 努氏硬度/ Qhov nyuaj (HK) | 2000 HK |
| 电阻 / Kev Tiv Thaiv | 1 × 10-5 Ohm*cm |
| 热稳定性 / Kev ruaj khov ntawm cua sov | <2500 ℃ |
| 石墨尺寸变化 / Kev hloov pauv loj ntawm graphite | -10~-20um |
| 涂层厚度 / Txheej tuab | ≥20um tus nqi ib txwm muaj (35um ± 10um) |
Ningbo VET Energy Technology Co., Ltd yog ib lub tuam txhab ua lag luam siab heev uas tsom mus rau kev tsim khoom thiab muag cov khoom siv siab heev, cov ntaub ntawv thiab thev naus laus zis suav nrog graphite, silicon carbide, ceramics, kev kho qhov chaw thiab lwm yam. Cov khoom lag luam tau siv dav hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.
Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!
