Isivikelo sepuleti esimbozwe nge-CVD TaC

Isivikelo sepuleti elimbozwe nge-CVD TaC Isithombe Esivelele

Incazelo emfushane:

I-VET Energy CVD TaC coated plate susceptor iwumkhiqizo osebenza kahle kakhulu owenzelwe ukunikeza ukusebenza okulinganayo nokuthembekile isikhathi eside. Inokumelana okuhle kakhulu nokushisa kanye nokufana kokushisa, ubumsulwa obuphezulu, ukumelana nokuguguleka, okwenza kube yisisombululo esifanele sezinhlelo zokusebenza zokucubungula i-wafer.

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Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

II-CVD TaC EmbozweI-Plate Susceptor evela ku-vet-china yenzelwe ukusebenza kahle kakhulu kwezinqubo zokufaka umphunga wamakhemikhali (i-CVD). Le susceptor inamandlaUkugqoka kwe-TaC (Tantalum Carbide), enikeza ukuzinza kokushisa okumangalisayo, ukumelana namakhemikhali, kanye nokuqina, okwenza kube yisisombululo esifanele sokukhiqiza ama-semiconductor kanye nezicelo zokushisa okuphezulu.Ukugqoka kwe-CVD TaCiqinisekisa ukumelana okuhle kakhulu nokugqwala kanye nokuguguleka, okuvumela i-susceptor ukuthi igcine ubuqotho bayo nokusebenza kwayo ezindaweni ezinzima.

udokotela wezilwane waseChinaI-CVD TaC EmbozweI-Plate Susceptor ivelele ngekhono layo lokusabalalisa ukushisa ngokulinganayo ngesikhathi sezinqubo ze-CVD, iqinisekisa ukufakwa kwezingqimba okunembile futhi ithuthukise ukusebenza kahle kokwenziwa kwe-semiconductor. I-Ta-C coating inikeza isivikelo esengeziwe ekugqwaleni kwamakhemikhali, yandisa isikhathi sokuphila se-susceptor futhi ithuthukise ukusebenza okuphelele. Ngokuhlanganiswa kobuchwepheshe be-CVD susceptor obuthuthukisiwe kanye ne-TaC chemical coating esezingeni eliphezulu, le susceptor iyisici esibalulekile sezimboni ezidinga ukunemba nokuthembeka ezindaweni ezishisa kakhulu.

Kungakhathaliseki ukuthi isetshenziswa ekukhiqizweni kwama-semiconductor noma ezinye izinhlelo zokusebenza zobuchwepheshe obuphezulu,I-CVD TaC Coated Plate Susceptoriklanyelwe ukuhlangabezana nezidingo zokukhiqiza zesimanje. Isekelwa yidumela likaSemicera lokusungula izinto ezintsha kanye nekhwalithi, lo mkhiqizo unikeza ukusebenza okuphezulu kanye nokuqina okuhlala isikhathi eside, okwenza kube ukukhetha okuthembekile kwezinqubo ze-CVD.

I-TaC coating uhlobo lwe-tantalum carbide (TaC) coating olulungiselelwe ubuchwepheshe bokufaka umusi ngokomzimba, lunezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ubulukhuni bokumboza i-TaC buphezulu, ngokuvamile bungafinyelela ku-2500-3000HV, buyimbozo eqinile enhle kakhulu.

2. Ukumelana nokuguguleka: Isembozo se-TaC simelana kakhulu nokuguguleka, okunganciphisa ngempumelelo ukuguguleka nokulimala kwezingxenye zemishini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle nokushisa okuphezulu: Isembozo se-TaC singagcina nokusebenza kwaso okuhle kakhulu ngaphansi kwezinga lokushisa eliphezulu.

4. Ukuqina okuhle kwamakhemikhali: Ukuhlanganiswa kwe-TaC kunokuqina okuhle kwamakhemikhali futhi kungamelana nokusabela okuningi kwamakhemikhali, njenge-asidi nezisekelo.

碳化钽涂层物理特性物理特性 Izakhiwo zomzimba ze I-TaC ukugqoka
密度/ Ubuningi	14.3 (g/cm³)
比辐射率 / Ukukhishwa okuthile	0.3
热膨胀系数 / Isilinganiso sokunwetshwa kokushisa	6.3 10^-6/K
努氏硬度/ Ubulukhuni (HK)	2000 HK
电阻 / Ukumelana	1 × 10^-5 Ohm*cm
热稳定性 / Ukuzinza kokushisa	<2500℃
石墨尺寸变化 / Izinguquko zosayizi we-Graphite	-10~-20um
涂层厚度 / Ubukhulu bokumboza	≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizweni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, i-semiconductor, amandla amasha, i-metallurgy, njll.

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