TeKua pania ki te CVD TaCHe mea hanga te Plate Susceptor mai i vet-china mō te mahi teitei i roto i ngā tukanga whakapūtanga matū (CVD). He pakari te āhua o tēnei susceptor.Paninga TaC (Tantalum Carbide), e tuku ana i te pumau wera tino pai, te ātete matū, me te roa, e waiho ana hei otinga tino pai mō te hanga semiconductor me ngā tono pāmahana teitei. Ko tePaninga CVD TaCka whakarite i te ātete tino pai ki te waikura me te kakahu, kia taea ai e te susceptor te pupuri i tōna āhua me tana mahi i roto i ngā taiao uaua.
kararehe HainaKua pania ki te CVD TaCHe mea motuhake te Plate Susceptor mō tōna kaha ki te tohatoha i te wera i roto i ngā tukanga CVD, e whakarite ana i te whakatakotoranga paparanga tika me te whakarei ake i te whai huatanga o te hanga semiconductor. Ka whakaratohia e te paninga Ta-C he parenga atu ki te waikura matū, ka roa ake te roa o te oranga o te susceptor me te whakapai ake i te mahi whānui. Mā te whakakotahitanga o te hangarau susceptor CVD matatau me ngā paninga matū TaC kounga teitei, he wāhanga matua tēnei susceptor mō ngā ahumahi e hiahia ana ki te tika me te pono i roto i ngā taiao pāmahana teitei.
Ahakoa e whakamahia ana i roto i te hanga o ngā semiconductors, i ētahi atu tono hangarau teitei rānei, ko teĀrai Pereti Paninga CVD TaCKua hangaia kia tutuki ai ngā hiahia o te hanga hou. Nā te rongonui o Semicera mō te auahatanga me te kounga, ka tukuna e tēnei hua he mahi tino pai me te roa o te mau, ka waiho hei whiringa pono mō ngā tukanga CVD.
Ko te paninga TaC he momo paninga tantalum carbide (TaC) i hangaia mā te hangarau whakatakotoranga kohu ā-tinana, ā, ko ōna āhuatanga e whai ake nei:
1. Te pakeketanga teitei: He teitei te pakeketanga o te paninga TaC, ka taea te tae ki te 2500-3000HV, he paninga pakeke tino pai.
2. Ātete kakahu: He tino ātete kakahu te paninga TaC, ka taea te whakaiti i te kakahu me te kino o ngā wāhanga miihini i te wā e whakamahia ana.
3. He ātete pai ki te pāmahana teitei: Ka taea hoki e te paninga TaC te pupuri i tana mahi tino pai i raro i te taiao pāmahana teitei.
4. He pai te pumau matū: He pai te pumau matū o te paninga TaC, ā, ka taea te ātete ki ngā tauhohenga matū maha, pērā i ngā waikawa me ngā kawakore.
| 碳化钽涂层物理特性物理特性 Ngā āhuatanga ā-tinana o TaC paninga | |
| 密度/ Kiato | 14.3 (karamu/cm³) |
| 比辐射率 / Te tukunga motuhake | 0.3 |
| 热膨胀系数 / Tauwehenga whānui wera | 6.3 10-6/K |
| 努氏硬度/ Te pakeketanga (HK) | 2000 HK |
| 电阻 / Ātete | 1×10-5 Ōm*cm |
| 热稳定性 / Te pumau o te wera | <2500℃ |
| 石墨尺寸变化 / Ngā panonitanga rahi o te karāpiti | -10~-20um |
| 涂层厚度 / Te matotoru o te paninga | ≥20um uara noa (35um±10um) |
He umanga hangarau matatau a Ningbo VET Energy Technology Co., Ltd e arotahi ana ki te whakaputa me te hoko i ngā rauemi matatau, tae atu ki te karāpeti, te karāpeti silicon, te uku, te maimoatanga mata me ērā atu mea. E whakamahia whānuitia ana ēnei hua i roto i te photovoltaic, te semiconductor, te pūngao hou, te whakarewa, me ērā atu.
Nō ngā umanga rangahau ā-rohe matua tā mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake māu.
Nau mai haere mai ki tō mātou wheketere, kia kōrero anō tātou!
