I-CVD TaC egqunywe ngepleyiti encamathelayo

I-CVD TaC coated plate susceptor Umfanekiso obonisiweyo

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I-VET Energy CVD TaC coated plate susceptor yimveliso esebenza kakuhle kakhulu eyenzelwe ukubonelela ngokusebenza okuzinzileyo nokuthembekileyo ixesha elide. Inokumelana okuhle kakhulu nobushushu kunye nokufana kobushushu, ubunyulu obuphezulu, ukumelana nokukhukuliseka, nto leyo eyenza ukuba ibe sisisombululo esifanelekileyo sokusetyenziswa kwe-wafer.

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II-CVD TaC egqunywe nge-coatingI-Plate Susceptor evela kwi-vet-china yenzelwe ukusebenza okuphezulu kwiinkqubo ze-chemical vapor deposition (CVD). Le susceptor inomgangatho oqinileyoUgqubuthelo lweTaC (Tantalum Carbide), enika uzinzo olubalaseleyo kubushushu, ukumelana neekhemikhali, kunye nokuqina, nto leyo eyenza ukuba ibe sisisombululo esifanelekileyo sokwenza ii-semiconductor kunye nokusetyenziswa kobushushu obuphezulu.Ugqubuthelo lwe-CVD TaCiqinisekisa ukumelana okuhle kakhulu ne-oxidation kunye nokuguguleka, ivumela i-susceptor ukuba igcine ukuthembeka kwayo kunye nokusebenza kwayo kwiindawo ezinzima.

oogqirha bezilwanyana baseTshayinaI-CVD TaC egqunywe nge-coatingI-Plate Susceptor ibalasele ngokukwazi kwayo ukusasaza ubushushu ngokulinganayo ngexesha leenkqubo ze-CVD, iqinisekisa ukufakwa ngokuchanekileyo komaleko kunye nokuphucula ukusebenza kakuhle kokwenziwa kwe-semiconductor. I-Ta-C coating inika ukhuseleko olongezelelweyo kwi-chemical corrosion, yandisa ubomi be-susceptor kwaye iphucula ukusebenza ngokubanzi. Ngokudibanisa ubuchwepheshe be-CVD susceptor obuphambili kunye ne-TaC chemical coatings esemgangathweni ophezulu, le susceptor yinxalenye ebalulekileyo kumashishini afuna ukuchaneka kunye nokuthembeka kwiindawo ezinobushushu obuphezulu.

Nokuba isetyenziswa kwimveliso yee-semiconductors okanye ezinye iinkqubo zobuchwepheshe obuphezulu,I-CVD TaC Coated Plate SusceptorYenzelwe ukuhlangabezana neemfuno zemveliso yanamhlanje. Ixhaswa ludumo lweSemicera ngokuvelisa izinto ezintsha nomgangatho, le mveliso inika ukusebenza okuphezulu kunye nokuqina okuhlala ixesha elide, nto leyo eyenza ukuba ibe lukhetho oluthembekileyo kwiinkqubo zeCVD.

I-TaC coating luhlobo lwe-tantalum carbide (TaC) coating olulungiselelwe ngetekhnoloji yokubeka umphunga ngokwasemzimbeni, luneempawu ezilandelayo:

1. Ubunzima obuphezulu: Ubunzima bokugquma nge-TaC buphezulu, buhlala bufikelela kwi-2500-3000HV, lugquma oluqinileyo oluhle kakhulu.

2. Ukumelana nokuguguleka: I-TaC coating ayiguguleki kakhulu, nto leyo enokunciphisa ngempumelelo ukuguguleka kunye nokonakala kweendawo zoomatshini ngexesha lokusetyenziswa.

3. Ukumelana okuhle nobushushu obuphezulu: I-TaC coating inokugcina ukusebenza kwayo okuhle kakhulu phantsi kobushushu obuphezulu.

4. Uzinzo oluhle lweekhemikhali: I-TaC coating inozinzo oluhle lweekhemikhali kwaye inokumelana neempendulo ezininzi zeekhemikhali, ezifana nee-asidi kunye neziseko.

碳化钽涂层物理特性物理特性 Iimpawu ezibonakalayo ze I-TaC ugqubuthelo
密度/ Ubuninzi	14.3 (g/cm³)
ILogo Simahla Akukho mlinganiselo Ipapashwe ngu- 比辐射率 / Ukukhupha okuthe ngqo	0.3
热膨胀系数 / I-coefficient yokwandiswa kobushushu	6.3 10^-6/K
努氏硬度/ Ubunzima (HK)	2000 HK
电阻 / Ukuchasana	1 × 10^-5 Ohm*cm
热稳定性 / Uzinzo lobushushu	<2500℃
石墨尺寸变化 / Utshintsho kubungakanani beGraphite	-10~-20um
涂层厚度 / Ubukhulu bokwaleka	≥20um ixabiso eliqhelekileyo (35um ± 10um)

I-Ningbo VET Energy Technology Co., Ltd lishishini lobuchwepheshe obuphezulu eligxile kwimveliso kunye nokuthengiswa kwezixhobo eziphambili, izixhobo kunye nobuchwepheshe obugubungela i-graphite, i-silicon carbide, iiseramikhi, unyango lomphezulu njalo njalo. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.njl.

Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.

Wamkelekile ngobubele ukuba undwendwele umzi-mveliso wethu, makhe sixoxe ngakumbi!