CVD TaC yakafukidzwa neplate susceptor

CVD TaC coated plate susceptor Mufananidzo Wakaratidzwa

Tsananguro pfupi:

VET Energy CVD TaC coated plate susceptor chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye kuramba kukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

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IyoCVD TaC YakafukidzwaPlate Susceptor inobva kuvet-china yakagadzirwa kuti ishande zvakanaka mu chemical vapor deposition (CVD). Iyi susceptor ine simba guru.Kuputira TaC (Tantalum Carbide), ichipa kugadzikana kwakanyanya pakupisa, kuramba makemikari, uye kugara kwenguva refu, zvichiita kuti ive mhinduro yakanaka yekugadzira semiconductor uye mashandisirwo ekupisa kwakanyanya.Kuputira kweCVD TaCinoita kuti chinhu ichi chisanyanya kuoxidation uye chisaparare, zvichiita kuti chisapararire uye chishande zvakanaka munzvimbo dzakaoma.

chiremba wemhuka yeChinaCVD TaC YakafukidzwaPlate Susceptor inoonekwa nekugona kwayo kugovera kupisa zvakaenzana panguva yeCVD process, ichivimbisa kuiswa kwelayer kwakarurama uye ichivandudza kushanda zvakanaka kwekugadzirwa kwe semiconductor. Ta-C coating inopa dziviriro yakawedzerwa kubva mukuora kwemakemikari, inowedzera hupenyu hwe susceptor uye inovandudza mashandiro ese. Nekusanganiswa kwetekinoroji yepamusoro yeCVD susceptor uye TaC chemical coatings yepamusoro, iyi susceptor chinhu chakakosha kumaindasitiri anoda kunyatsorongeka uye kuvimbika munzvimbo dzinopisa zvakanyanya.

Ingave ichishandiswa mukugadzira ma semiconductors kana mamwe mashandisirwo etekinoroji yepamusoro, iyoCVD TaC Coated Plate SusceptorYakagadzirirwa kusangana nezvinodiwa zvekugadzirwa kwemazuva ano. Ichitsigirwa nemukurumbira weSemicera wekuvandudza uye mhando, chigadzirwa ichi chinopa mashandiro akanaka uye kugara kwenguva refu, zvichiita kuti ive sarudzo yakavimbika kune maitiro eCVD.

Kuputira TaC imhando yekuvhara tantalum carbide (TaC) yakagadzirwa nehunyanzvi hwekugadzira vapor deposition, ine hunhu hunotevera:

1. Kuomarara kwakanyanya: Kuomarara kwekufukidza kweTaC kwakakwira, kazhinji kunogona kusvika 2500-3000HV, ipurasitiki yakasimba kwazvo.

2. Kudzivirira kupfeka: Kuvhara kweTaC hakukuvadzi kupfeka, izvo zvinogona kuderedza kupera nekukuvadzwa kwezvikamu zvemakanika panguva yekushandiswa.

3. Kudzivirira kupisa kwakanyanya: Kuputira kweTaC kunogonawo kuchengetedza kushanda kwayo kwakanaka pasi pemamiriro ekunze ekupisa kwakanyanya.

4. Kugadzikana kwakanaka kwemakemikari: Kuputira kweTaC kune kugadzikana kwakanaka kwemakemikari uye kunogona kuramba maitiro akawanda emakemikari, akadai seasidhi nemabhesi.

碳化钽涂层物理特性物理特性 Hunhu hwemuviri hwe TaC kuputira
密度/ Kuwanda kwehuwandu	14.3 (g/cm³)
比辐射率 / Kuburitsa zvinhu zvakananga	0.3
热膨胀系数 / Kuwanda kwekuwedzera kwekupisa	6.3 10^-6/K
努氏硬度/ Kuoma (HK)	2000 HK
电阻 / Kuramba	1 × 10^-5 Ohm*cm
热稳定性 / Kugadzikana kwekupisa	<2500℃
石墨尺寸变化 / Kuchinja kwehukuru hweGraphite	-10~-20am
涂层厚度 / Ukobvu hwekuputira	≥20um kukosha kwakajairika (35um±10um)

Ningbo VET Energy Technology Co., Ltd ibhizinesi repamusoro-soro rinotarisa pakugadzira nekutengesa zvinhu zvepamusoro-soro, zvinhu netekinoroji inofukidza graphite, silicon carbide, ceramics, kugadziriswa kwepamusoro nezvimwewo. Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

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