ʻO ka mea hoʻopaʻa papa i uhi ʻia ʻo CVD TaC

ʻO kaUhi ʻia ʻo CVD TaCUa hana ʻia ka Plate Susceptor mai vet-china no ka hana kiʻekiʻe i nā kaʻina hana hoʻokaʻawale vapor kemikala (CVD). Loaʻa i kēia susceptor kahi paʻaUhi ʻana o TaC (Tantalum Carbide), e hāʻawi ana i ke kūpaʻa wela kūikawā, ke kūpaʻa kemika, a me ke kūpaʻa, e lilo ia i hopena kūpono no ka hana semiconductor a me nā noi wela kiʻekiʻe. ʻO kaKa uhi ʻana o CVD TaChōʻoia i ke kūpaʻa maikaʻi loa i ka oxidation a me ke komo ʻana, e ʻae ana i ka susceptor e mālama i kona kūpaʻa a me ka hana i nā ʻano ʻino.

kauka holoholona-KinaUhi ʻia ʻo CVD TaCKū ka Plate Susceptor no kona hiki ke hoʻolaha like i ka wela i ka wā o nā kaʻina hana CVD, e hōʻoia ana i ka waiho ʻana o ka papa pololei a me ka hoʻonui ʻana i ka pono o ka hana semiconductor. Hāʻawi ka uhi Ta-C i ka pale hou aku e kūʻē i ka pala kemika, e hoʻolōʻihi ana i ke ola o ka susceptor a hoʻomaikaʻi i ka hana holoʻokoʻa. Me ka hui pū ʻana o ka ʻenehana susceptor CVD holomua a me nā uhi kemika TaC kiʻekiʻe, ʻo kēia susceptor kahi ʻāpana koʻikoʻi no nā ʻoihana e pono ai ka pololei a me ka hilinaʻi i nā wahi wela kiʻekiʻe.

Inā hoʻohana ʻia i ka hana ʻana o nā semiconductors a i ʻole nā ​​​​noi ʻenehana kiʻekiʻe ʻē aʻe, ʻo kaʻO ka mea hoʻopaʻa papa i uhi ʻia ʻo CVD TaCua hoʻolālā ʻia e hoʻokō i nā koi o ka hana ʻana o kēia au. Me ke kākoʻo ʻia e ka inoa o Semicera no ka hana hou a me ka maikaʻi, hāʻawi kēia huahana i ka hana kiʻekiʻe loa a me ka lōʻihi o ka lōʻihi, e lilo ia i koho hilinaʻi no nā kaʻina hana CVD.