Qee cov khoom organic thiab inorganic yuav tsum tau koom nrog hauv kev tsim khoom semiconductor. Tsis tas li ntawd, txij li thaum cov txheej txheem ib txwm ua nyob rau hauv chav huv si nrog tib neeg koom nrog, semiconductorcov ncuav mog qab zibyog inevitably paug los ntawm ntau yam impurities.
Raws li qhov chaw thiab qhov xwm txheej ntawm cov kuab paug, lawv tuaj yeem muab faib ua plaub pawg: cov khoom me me, cov organic matter, cov hlau ions thiab oxides.
1. Cov khoom me me:
Cov khoom me me yog feem ntau yog qee cov polymers, photoresists thiab etching impurities.
Cov pa phem no feem ntau vam khom cov zog intermolecular kom nqus tau rau ntawm qhov chaw ntawm lub wafer, cuam tshuam rau kev tsim cov duab geometric thiab cov kev hloov pauv hluav taws xob ntawm cov txheej txheem photolithography ntawm lub cuab yeej.
Cov kuab paug no feem ntau raug tshem tawm los ntawm kev maj mam txo lawv thaj chaw sib cuag nrog qhov chaw ntawmncuav mog qab ziblos ntawm cov txheej txheem lub cev lossis tshuaj lom neeg.
2. Cov khoom siv organic:
Cov chaw ntawm cov organic impurities yog qhov dav heev, xws li tib neeg daim tawv nqaij roj, cov kab mob, tshuab roj, lub tshuab nqus tsev, photoresist, cov tshuaj ntxuav, thiab lwm yam.
Cov kuab paug no feem ntau tsim cov zaj duab xis organic rau ntawm qhov chaw ntawm wafer kom tiv thaiv cov kua ntxuav kom tsis txhob mus txog ntawm qhov chaw ntawm wafer, ua rau kev ntxuav tsis tiav ntawm qhov chaw wafer.
Kev tshem tawm cov kuab paug no feem ntau yog ua tiav hauv thawj kauj ruam ntawm cov txheej txheem ntxuav, feem ntau yog siv cov txheej txheem tshuaj lom neeg xws li sulfuric acid thiab hydrogen peroxide.
3. Cov hlau ions:
Cov hlau tsis huv uas feem ntau muaj xws li hlau, tooj liab, txhuas, chromium, hlau cam khwb cia, titanium, sodium, potassium, lithium, thiab lwm yam. Cov khoom tseem ceeb yog ntau yam khoom siv, yeeb nkab, tshuaj lom neeg, thiab cov hlau ua qias tuaj thaum cov hlau sib txuas ua ke thaum lub sijhawm ua haujlwm.
Hom kev tsis huv no feem ntau raug tshem tawm los ntawm cov txheej txheem tshuaj lom neeg los ntawm kev tsim cov hlau ion complexes.
4. Oxide:
Thaum lub semiconductorcov ncuav mog qab zibYog tias raug rau ib puag ncig uas muaj oxygen thiab dej, ib txheej oxide ntuj yuav tsim rau ntawm qhov chaw. Cov zaj duab xis oxide no yuav cuam tshuam ntau cov txheej txheem hauv kev tsim khoom semiconductor thiab kuj muaj qee yam hlau tsis huv. Hauv qee qhov xwm txheej, lawv yuav tsim cov teeb meem hluav taws xob.
Qhov kev tshem tawm ntawm cov yeeb yaj kiab oxide no feem ntau ua tiav los ntawm kev tsau rau hauv cov kua qaub hydrofluoric dilute.
Kev ntxuav dav dav
Cov khoom tsis huv uas nqus tau rau ntawm qhov chaw ntawm semiconductorcov ncuav mog qab zibmuaj peev xwm muab faib ua peb hom: molecular, ionic thiab atomic.
Ntawm lawv, lub zog adsorption ntawm cov khoom tsis huv molecular thiab qhov chaw ntawm lub wafer tsis muaj zog, thiab cov khoom tsis huv no yooj yim tshem tawm. Lawv feem ntau yog cov roj tsis huv nrog cov yam ntxwv hydrophobic, uas tuaj yeem muab cov ntaub thaiv rau cov khoom tsis huv ionic thiab atomic uas ua rau qhov chaw ntawm semiconductor wafers qias neeg, uas tsis zoo rau kev tshem tawm ob hom khoom tsis huv no. Yog li ntawd, thaum ntxuav cov semiconductor wafers, cov khoom tsis huv molecular yuav tsum tau tshem tawm ua ntej.
Yog li ntawd, cov txheej txheem dav dav ntawm semiconductorncuav mog qab zibCov txheej txheem ntxuav yog:
De-molecularization-deionization-de-atomization-deionized dej yaug.
Ntxiv rau, txhawm rau tshem tawm cov txheej oxide ntuj ntawm qhov chaw ntawm lub wafer, yuav tsum ntxiv cov kauj ruam dilute amino acid soaking. Yog li ntawd, lub tswv yim ntawm kev ntxuav yog ua ntej tshem tawm cov organic contamination ntawm qhov chaw; tom qab ntawd yaj cov txheej oxide; thaum kawg tshem tawm cov khoom me me thiab cov hlau contamination, thiab passivate qhov chaw tib lub sijhawm.
Cov txheej txheem ntxuav feem ntau
Cov txheej txheem tshuaj lom neeg feem ntau siv los ntxuav cov semiconductor wafers.
Kev ntxuav tshuaj lom neeg yog hais txog cov txheej txheem ntawm kev siv ntau yam tshuaj reagents thiab cov organic solvents los teb lossis yaj cov impurities thiab cov roj stains ntawm qhov chaw ntawm wafer kom desorb impurities, thiab tom qab ntawd yaug nrog ntau cov dej kub thiab txias deionized siab kom tau txais qhov chaw huv.
Kev ntxuav tshuaj muaj peev xwm muab faib ua kev ntxuav tshuaj ntub thiab kev ntxuav tshuaj qhuav, ntawm cov kev ntxuav tshuaj ntub tseem yog qhov tseem ceeb.
Kev ntxuav tshuaj ntub dej
1. Kev ntxuav nrog tshuaj ntub dej:
Kev ntxuav tshuaj ntub feem ntau suav nrog kev muab cov tshuaj rau hauv, kev txhuam tshuab, kev ntxuav ultrasonic, kev ntxuav megasonic, kev txau tshuaj rotary, thiab lwm yam.
2. Kev muab cov tshuaj nchuav rau hauv:
Kev muab cov tshuaj nchuav rau hauv yog ib txoj kev tshem tawm cov pa phem ntawm qhov chaw los ntawm kev muab lub wafer nchuav rau hauv cov tshuaj lom neeg. Nws yog txoj kev siv ntau tshaj plaws hauv kev ntxuav cov tshuaj ntub dej. Cov tshuaj sib txawv tuaj yeem siv los tshem tawm ntau hom pa phem ntawm qhov chaw ntawm lub wafer.
Feem ntau, txoj kev no tsis tuaj yeem tshem tawm cov khoom tsis huv ntawm qhov chaw ntawm lub wafer, yog li kev ntsuas lub cev xws li cua sov, ultrasound, thiab kev nplawm feem ntau siv thaum immersing.
3. Kev txhuam tshuab:
Kev txhuam tshuab feem ntau yog siv los tshem tawm cov khoom me me lossis cov organic residues ntawm qhov chaw ntawm lub wafer. Nws feem ntau tuaj yeem muab faib ua ob txoj hauv kev:kev ntxuav tes thiab kev ntxuav los ntawm lub wiper.
Kev ntxuav tesyog txoj kev txhuam yooj yim tshaj plaws. Siv txhuam hlau tsis xeb los tuav lub pob uas ntub dej anhydrous ethanol lossis lwm cov kuab tshuaj organic thiab maj mam txhuam qhov chaw ntawm lub wafer tib yam kom tshem tawm cov quav ciab, hmoov av, cov kua nplaum seem lossis lwm yam khoom khov. Txoj kev no yooj yim ua rau khawb thiab muaj kuab paug loj.
Tus so siv lub tshuab tig los txhuam qhov saum npoo ntawm lub wafer nrog txhuam mos mos lossis txhuam sib xyaw. Txoj kev no txo qhov khawb ntawm lub wafer. Lub tshuab so siab yuav tsis khawb lub wafer vim tsis muaj kev sib txhuam, thiab tuaj yeem tshem tawm cov kuab paug hauv qhov zawj.
4. Kev ntxuav ultrasonic:
Kev ntxuav ultrasonic yog ib txoj kev ntxuav uas siv dav hauv kev lag luam semiconductor. Nws cov txiaj ntsig yog kev ntxuav zoo, kev ua haujlwm yooj yim, thiab tseem tuaj yeem ntxuav cov khoom siv nyuaj thiab cov thawv.
Txoj kev ntxuav no yog nyob rau hauv qhov kev ua ntawm cov nthwv dej ultrasonic muaj zog (feem ntau siv ultrasonic zaus yog 20s40kHz), thiab cov khoom me me thiab ntom yuav tsim tawm hauv cov kua nruab nrab. Cov khoom me me yuav tsim cov npuas qhov chaw yuav luag nqus tsev. Thaum cov npuas qhov chaw ploj mus, lub zog hauv zos yuav tsim nyob ze nws, rhuav tshem cov tshuaj sib txuas hauv cov molecules kom yaj cov khoom tsis huv ntawm qhov chaw wafer. Kev ntxuav ultrasonic yog qhov zoo tshaj plaws rau kev tshem tawm cov khoom seem tsis yaj lossis tsis yaj.
5. Kev ntxuav Megasonic:
Kev ntxuav Megasonic tsis yog tsuas yog muaj qhov zoo ntawm kev ntxuav ultrasonic, tab sis kuj kov yeej nws qhov tsis zoo.
Kev ntxuav Megasonic yog ib txoj kev ntxuav cov wafers los ntawm kev sib xyaw ua ke ntawm lub zog siab (850kHz) zaus co nrog cov tshuaj lom neeg ntawm cov tshuaj ntxuav. Thaum lub sijhawm ntxuav, cov tshuaj molecules raug nrawm los ntawm nthwv dej megasonic (qhov ceev tshaj plaws tam sim ntawd tuaj yeem ncav cuag 30cmVs), thiab nthwv dej ceev ceev cuam tshuam rau ntawm qhov chaw ntawm wafer, yog li cov pa phem thiab cov khoom me me uas txuas rau ntawm qhov chaw ntawm wafer raug yuam kom tshem tawm thiab nkag mus rau hauv cov tshuaj ntxuav. Ntxiv cov surfactants acidic rau hauv cov tshuaj ntxuav, ntawm ib sab, tuaj yeem ua tiav lub hom phiaj ntawm kev tshem tawm cov khoom me me thiab cov organic teeb meem ntawm qhov chaw polishing los ntawm kev nqus ntawm surfactants; ntawm qhov tod tes, los ntawm kev koom ua ke ntawm surfactants thiab acidic ib puag ncig, nws tuaj yeem ua tiav lub hom phiaj ntawm kev tshem tawm cov hlau ua qias tuaj ntawm qhov chaw ntawm daim ntawv polishing. Txoj kev no tuaj yeem ua lub luag haujlwm ntawm kev so tshuab thiab kev ntxuav tshuaj tib lub sijhawm.
Tam sim no, txoj kev ntxuav megasonic tau dhau los ua ib txoj hauv kev zoo rau kev ntxuav cov ntawv polishing.
6. Txoj kev tsuag tsuag:
Txoj kev tsuag tshuaj yog ib txoj kev uas siv cov txheej txheem kho tshuab los tig lub wafer ntawm qhov ceev ceev, thiab txau cov kua (dej ntshiab siab lossis lwm yam kua ntxuav) rau ntawm qhov chaw ntawm wafer thaum lub sijhawm tig kom tshem tawm cov khoom tsis huv ntawm qhov chaw ntawm wafer.
Txoj kev no siv cov kuab paug rau ntawm qhov chaw ntawm lub wafer kom yaj rau hauv cov kua txau (lossis tshuaj lom neeg ua rau nws yaj), thiab siv cov nyhuv centrifugal ntawm kev tig ceev ceev kom ua rau cov kua uas muaj cov khoom tsis huv sib cais ntawm qhov chaw ntawm lub wafer raws sijhawm.
Txoj kev siv tshuaj tsuag rotary muaj qhov zoo ntawm kev ntxuav tshuaj, kev ntxuav cov kua dej, thiab kev txhuam siab. Tib lub sijhawm, txoj kev no kuj tseem tuaj yeem ua ke nrog cov txheej txheem ziab. Tom qab lub sijhawm ntxuav dej deionized, cov tshuaj tsuag dej raug nres thiab siv cov roj tsuag. Tib lub sijhawm, qhov ceev ntawm kev sib hloov tuaj yeem nce ntxiv kom nce lub zog centrifugal kom sai sai ua rau cov dej noo ntawm qhov chaw ntawm lub wafer.
7.Kev ntxuav tshuaj qhuav
Kev ntxuav qhuav yog hais txog kev siv tshuab ntxuav uas tsis siv cov tshuaj.
Cov thev naus laus zis ntxuav qhuav uas siv tam sim no suav nrog: thev naus laus zis ntxuav plasma, thev naus laus zis ntxuav theem roj, thev naus laus zis ntxuav beam, thiab lwm yam.
Qhov zoo ntawm kev ntxuav qhuav yog cov txheej txheem yooj yim thiab tsis muaj kuab paug rau ib puag ncig, tab sis tus nqi siab thiab qhov ntau thiab tsawg ntawm kev siv tsis loj rau lub sijhawm no.
1. Kev siv tshuab ntxuav ntshav:
Kev ntxuav plasma feem ntau siv rau hauv cov txheej txheem tshem tawm photoresist. Me ntsis ntawm cov pa oxygen raug qhia rau hauv cov tshuaj tiv thaiv plasma. Nyob rau hauv qhov kev ua ntawm lub zog hluav taws xob muaj zog, cov pa oxygen tsim cov plasma, uas sai sai oxidizes lub photoresist mus rau hauv lub xeev roj volatile thiab raug rho tawm.
Cov thev naus laus zis ntxuav no muaj qhov zoo ntawm kev siv yooj yim, ua haujlwm tau zoo, nto huv, tsis muaj khawb, thiab ua kom cov khoom zoo hauv cov txheej txheem degumming. Ntxiv mus, nws tsis siv cov kua qaub, alkalis thiab cov kuab tshuaj organic, thiab tsis muaj teeb meem xws li pov tseg thiab kev ua qias tuaj rau ib puag ncig. Yog li ntawd, nws tau txais txiaj ntsig ntau ntxiv los ntawm tib neeg. Txawm li cas los xij, nws tsis tuaj yeem tshem tawm cov pa roj carbon thiab lwm yam hlau tsis hloov pauv lossis hlau oxide impurities.
2. Kev siv tshuab ntxuav roj:
Kev ntxuav theem roj yog hais txog txoj kev ntxuav uas siv cov roj sib npaug ntawm cov tshuaj sib xws hauv cov txheej txheem kua los cuam tshuam nrog cov tshuaj lom neeg ntawm qhov chaw ntawm wafer kom ua tiav lub hom phiaj ntawm kev tshem tawm cov khoom tsis huv.
Piv txwv li, hauv cov txheej txheem CMOS, kev ntxuav wafer siv kev sib cuam tshuam ntawm cov pa roj HF thiab cov pa dej kom tshem tawm cov oxides. Feem ntau, cov txheej txheem HF uas muaj dej yuav tsum muaj cov txheej txheem tshem tawm cov khoom me me, thaum siv cov thev naus laus zis ntxuav HF theem roj tsis tas yuav muaj cov txheej txheem tshem tawm cov khoom me me tom qab.
Cov txiaj ntsig tseem ceeb tshaj plaws piv rau cov txheej txheem HF dej yog kev siv tshuaj HF me dua thiab kev ntxuav tau zoo dua.
Txais tos cov neeg siv khoom los ntawm thoob plaws lub ntiaj teb tuaj xyuas peb rau kev sib tham ntxiv!
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Lub sijhawm tshaj tawm: Lub Yim Hli-13-2024