Zinthu zina zachilengedwe ndi zopanda chilengedwe zimafunika kuti zigwire ntchito yopanga zinthu zopangidwa ndi organic. Kuphatikiza apo, popeza njirayi nthawi zonse imachitika m'chipinda choyera ndi anthu, zinthu zopangidwa ndi organic ziyenera kuchitidwa ndi anthu.ma waferamaipitsidwa ndi zinthu zosiyanasiyana zodetsa.
Malinga ndi gwero ndi mtundu wa zodetsa, zitha kugawidwa m'magulu anayi: tinthu tating'onoting'ono, zinthu zachilengedwe, ayoni achitsulo ndi ma oxide.
1. Tinthu:
Tinthu tating'onoting'ono timeneti ndi ma polima, ma photoresist ndi zinthu zodetsa.
Zodetsa zotere nthawi zambiri zimadalira mphamvu zapakati pa mamolekyu kuti zilowe pamwamba pa wafer, zomwe zimakhudza mapangidwe a zithunzi za geometric ndi magawo amagetsi a njira yojambulira zithunzi ya chipangizocho.
Zonyansa zotere zimachotsedwa makamaka mwa kuchepetsa pang'onopang'ono malo omwe zimakumana nawo pamwamba pachikwama cha mkatekudzera mu njira zakuthupi kapena za mankhwala.
2. Zinthu zachilengedwe:
Magwero a zinthu zodetsa zachilengedwe ndi osiyanasiyana, monga mafuta a pakhungu la anthu, mabakiteriya, mafuta a makina, mafuta otsukira, photoresist, zosungunulira zotsukira, ndi zina zotero.
Zodetsa zotere nthawi zambiri zimapanga filimu yachilengedwe pamwamba pa wafer kuti madzi oyeretsera asafike pamwamba pa wafer, zomwe zimapangitsa kuti pamwamba pa wafer pasayeretsedwe mokwanira.
Kuchotsa zinthu zodetsa zotere nthawi zambiri kumachitika mu gawo loyamba la njira yoyeretsera, makamaka pogwiritsa ntchito njira zamankhwala monga sulfuric acid ndi hydrogen peroxide.
3. Ma ayoni achitsulo:
Zonyansa zomwe zimapezeka kwambiri pazitsulo ndi monga chitsulo, mkuwa, aluminiyamu, chromium, chitsulo chosungunuka, titaniyamu, sodium, potaziyamu, lithiamu, ndi zina zotero. Magwero akuluakulu ndi ziwiya zosiyanasiyana, mapaipi, mankhwala ophera tizilombo, ndi kuipitsa kwachitsulo komwe kumachitika pamene zitsulo zimalumikizana panthawi yokonza.
Mtundu uwu wa kusayera nthawi zambiri umachotsedwa ndi njira za mankhwala kudzera mu kupanga ma ion complexes achitsulo.
4. Okisidi:
Pamene semiconductorma waferNgati zipezeka pamalo okhala ndi mpweya ndi madzi, gawo lachilengedwe la okosijeni lidzapangidwa pamwamba. Filimu iyi ya okosijeni idzalepheretsa njira zambiri zopangira semiconductor komanso idzakhala ndi zinthu zina zodetsa zitsulo. Pazifukwa zina, zimapanga zolakwika zamagetsi.
Kuchotsa filimu ya oxide iyi nthawi zambiri kumachitika ponyowa mu hydrofluoric acid yosungunuka.
Ndondomeko yonse yoyeretsera
Zonyansa zomwe zimamatira pamwamba pa semiconductorma waferAkhoza kugawidwa m'magulu atatu: molekyulu, ionic ndi atomu.
Pakati pawo, mphamvu yoyamwa pakati pa zonyansa za mamolekyulu ndi pamwamba pa wafer ndi yofooka, ndipo tinthu tating'onoting'ono totere timakhala tosavuta kuchotsa. Ambiri mwa iwo ndi zonyansa zamafuta zokhala ndi mawonekedwe a hydrophobic, zomwe zingapereke chophimba cha zonyansa za ionic ndi atomiki zomwe zimadetsa pamwamba pa wafer wa semiconductor, zomwe sizingathandize kuchotsa mitundu iwiriyi ya zonyansa. Chifukwa chake, poyeretsa ma wafer a semiconductor pogwiritsa ntchito mankhwala, zonyansa za mamolekyulu ziyenera kuchotsedwa kaye.
Chifukwa chake, njira yonse ya semiconductorchikwama cha mkateNjira yoyeretsera ndi iyi:
Kuchotsa mamolekyulu-kuchotsa ma ionization-kuchotsa ma ionization-kutsuka madzi.
Kuphatikiza apo, kuti muchotse gawo lachilengedwe la oxide pamwamba pa wafer, sitepe yothira amino acid iyenera kuwonjezeredwa. Chifukwa chake, lingaliro loyeretsa ndikuyamba kuchotsa kuipitsidwa kwachilengedwe pamwamba; kenako kusungunula gawo la oxide; potsiriza kuchotsa tinthu tating'onoting'ono ndi kuipitsidwa kwachitsulo, ndikuchotsa pamwamba nthawi yomweyo.
Njira zodziwika bwino zoyeretsera
Njira zamankhwala nthawi zambiri zimagwiritsidwa ntchito poyeretsa ma wafer a semiconductor.
Kuyeretsa mankhwala kumatanthauza njira yogwiritsira ntchito mankhwala osiyanasiyana ndi zinthu zosungunulira zachilengedwe kuti zithetse kapena kusungunula zinyalala ndi madontho a mafuta pamwamba pa wafer kuti zichotse zinyalala, kenako muzimutsuka ndi madzi otentha ndi ozizira oyeretsedwa bwino kuti mupeze malo oyera.
Kuyeretsa mankhwala kungagawidwe m'magulu awiri: kuyeretsa mankhwala onyowa ndi kuyeretsa mankhwala ouma, pakati pawo kuyeretsa mankhwala onyowa ndiko kwakukulu.
Kuyeretsa mankhwala onyowa
1. Kuyeretsa mankhwala onyowa:
Kuyeretsa mankhwala onyowa kumaphatikizapo kumiza madzi m'madzi, kutsuka ndi makina, kutsuka ndi ma ultrasound, kutsuka ndi ma megasonic, kupopera ndi rotary, ndi zina zotero.
2. Kumiza yankho:
Kumiza mu yankho ndi njira yochotsera kuipitsidwa pamwamba mwa kumiza mu wafer mu mankhwala. Ndi njira yomwe imagwiritsidwa ntchito kwambiri poyeretsa mankhwala onyowa. Njira zosiyanasiyana zingagwiritsidwe ntchito kuchotsa mitundu yosiyanasiyana ya zodetsa pamwamba pa wafer.
Kawirikawiri, njira imeneyi singathe kuchotsa zonyansa zonse pamwamba pa wafer, kotero njira zakuthupi monga kutentha, ultrasound, ndi kusakaniza nthawi zambiri zimagwiritsidwa ntchito pomiza.
3. Kutsuka ndi makina:
Kutsuka pogwiritsa ntchito makina nthawi zambiri kumagwiritsidwa ntchito kuchotsa tinthu tating'onoting'ono kapena zotsalira za organic pamwamba pa wafer. Kawirikawiri kungagawidwe m'njira ziwiri:kutsuka ndi kupukuta ndi chotsukira ndi dzanja.
Kutsuka ndi manjaNdi njira yosavuta kwambiri yotsukira. Burashi yachitsulo chosapanga dzimbiri imagwiritsidwa ntchito kugwira mpira woviikidwa mu anhydrous ethanol kapena zinthu zina zosungunulira zachilengedwe ndikupukuta pang'onopang'ono pamwamba pa wafer mbali yomweyo kuti muchotse sera, fumbi, guluu wotsalira kapena tinthu tina tolimba. Njirayi ndi yosavuta kuyambitsa mikwingwirima ndi kuipitsa kwambiri.
Chotsukira chimagwiritsa ntchito makina ozungulira kuti chikweze pamwamba pa wafer ndi burashi yofewa ya ubweya kapena burashi yosakanikirana. Njirayi imachepetsa kwambiri mikwingwirima pa wafer. Chotsukira champhamvu sichidzakanda wafer chifukwa cha kusowa kwa makina okankhira, ndipo chingachotse kuipitsidwa mumng'alu.
4. Kuyeretsa kwa akupanga:
Kuyeretsa kwa Ultrasonic ndi njira yoyeretsera yomwe imagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor. Ubwino wake ndi kuyeretsa bwino, kugwiritsa ntchito kosavuta, komanso kumatha kuyeretsa zida ndi zotengera zovuta.
Njira yoyeretsera iyi imachitika pogwiritsa ntchito mafunde amphamvu a ultrasound (ma frequency a ultrasound omwe amagwiritsidwa ntchito kwambiri ndi 20s40kHz), ndipo zigawo zochepa komanso zokhuthala zidzapangidwa mkati mwa malo osungira madzi. Gawo lochepa lipanga thovu lokhala ngati vacuum cavity. Thovu lokhala ngati cavity likatha, mphamvu yamphamvu yapafupi idzapangidwa pafupi nalo, kuswa ma bond a mankhwala m'mamolekyu kuti asungunuke zonyansa zomwe zili pamwamba pa wafer. Kuyeretsa kwa ultrasound ndikothandiza kwambiri pochotsa zotsalira za flux zosasungunuka kapena zosasungunuka.
5. Kuyeretsa kwakukulu:
Kuyeretsa kwa Megasonic sikuti kumangokhala ndi ubwino woyeretsa pogwiritsa ntchito ultrasound, komanso kumathetsa zofooka zake.
Kuyeretsa kwa Megasonic ndi njira yoyeretsera ma wafer mwa kuphatikiza mphamvu yamphamvu (850kHz) frequency vibration effect ndi mankhwala omwe amayeretsera mankhwala. Pakuyeretsa, mamolekyu a yankho amafulumizitsidwa ndi mafunde a megasonic (liwiro lalikulu la nthawi yomweyo limatha kufika 30cmVs), ndipo mafunde amadzimadzi othamanga kwambiri amakhudza pamwamba pa wafer mosalekeza, kotero kuti zonyansa ndi tinthu tating'onoting'ono tomwe timalumikizidwa pamwamba pa wafer zimachotsedwa mwamphamvu ndikulowa mu yankho loyeretsera. Kuwonjezera ma surfactants a acidic ku yankho loyeretsera, kumbali imodzi, kumatha kukwaniritsa cholinga chochotsa tinthu ndi zinthu zachilengedwe pamwamba pa kupukuta kudzera mu kulowetsedwa kwa ma surfactants; kumbali ina, kudzera mu kuphatikiza ma surfactants ndi malo okhala ndi acidic, kumatha kukwaniritsa cholinga chochotsa kuipitsidwa kwachitsulo pamwamba pa pepala loyeretsera. Njirayi ingathe nthawi imodzi kukhala gawo la kupukuta kwamakina ndi kuyeretsa kwa mankhwala.
Pakadali pano, njira yoyeretsera ya megasonic yakhala njira yothandiza yoyeretsera mapepala opukutira.
6. Njira yopopera yozungulira:
Njira yopopera yozungulira ndi njira yomwe imagwiritsa ntchito njira zamakina kuti izungulire wafer mwachangu kwambiri, ndipo nthawi zonse imapopera madzi (madzi oyera kwambiri kapena madzi ena oyeretsera) pamwamba pa wafer panthawi yozungulira kuti ichotse zodetsa pamwamba pa wafer.
Njirayi imagwiritsa ntchito kuipitsidwa pamwamba pa wafer kuti isungunuke mu madzi opopera (kapena mankhwala omwe amayamwa nawo kuti asungunuke), ndipo imagwiritsa ntchito mphamvu ya centrifugal yozungulira mofulumira kuti madzi okhala ndi zonyansa asiyane ndi pamwamba pa wafer pakapita nthawi.
Njira yopopera yozungulira ili ndi ubwino woyeretsa mankhwala, kutsuka makina amadzimadzi, komanso kutsuka ndi mphamvu yamagetsi. Nthawi yomweyo, njira iyi ikhozanso kuphatikizidwa ndi njira yowumitsa. Pambuyo pa nthawi yoyeretsa yopopera madzi yochotsedwa ma ioni, kupopera madzi kumayimitsidwa ndipo mpweya wopopera umagwiritsidwa ntchito. Nthawi yomweyo, liwiro lozungulira likhoza kuwonjezeredwa kuti liwonjezere mphamvu ya centrifugal kuti ichotse madzi mwachangu pamwamba pa wafer.
7.Kuyeretsa mankhwala ouma
Kuyeretsa kouma kumatanthauza ukadaulo woyeretsa womwe sugwiritsa ntchito njira zothetsera mavuto.
Ukadaulo woyeretsa wouma womwe ukugwiritsidwa ntchito pano ndi uwu: ukadaulo woyeretsa wa plasma, ukadaulo woyeretsa gawo la gasi, ukadaulo woyeretsa beam, ndi zina zotero.
Ubwino wa kuyeretsa kouma ndi njira yosavuta komanso yopanda kuipitsa chilengedwe, koma mtengo wake ndi wokwera ndipo kugwiritsa ntchito kwake si kwakukulu pakadali pano.
1. Ukadaulo woyeretsa plasma:
Kuyeretsa plasma nthawi zambiri kumagwiritsidwa ntchito pochotsa photoresist. Mpweya wochepa umalowetsedwa mu plasma reaction system. Pogwiritsa ntchito mphamvu yamagetsi, mpweya umapanga plasma, yomwe imapangitsa photoresist kukhala mpweya wosasunthika ndipo imachotsedwa.
Ukadaulo woyeretsa uwu uli ndi ubwino wosavuta kugwiritsa ntchito, kugwira ntchito bwino kwambiri, kuyeretsa pamwamba, kusakanda, ndipo umathandiza kuonetsetsa kuti zinthu zili bwino pochotsa gum. Komanso, sigwiritsa ntchito ma acid, alkali ndi zinthu zosungunulira zachilengedwe, ndipo palibe mavuto monga kutaya zinyalala ndi kuipitsa chilengedwe. Chifukwa chake, anthu akuiona kuti ndi yofunika kwambiri. Komabe, singathe kuchotsa kaboni ndi zinthu zina zodetsa zitsulo kapena chitsulo.
2. Ukadaulo woyeretsa gawo la gasi:
Kuyeretsa gawo la mpweya kumatanthauza njira yoyeretsera yomwe imagwiritsa ntchito gawo la mpweya lofanana ndi chinthu chofananacho mu njira yamadzimadzi kuti igwirizane ndi chinthu chodetsedwa pamwamba pa wafer kuti ikwaniritse cholinga chochotsa zonyansa.
Mwachitsanzo, mu ndondomeko ya CMOS, kuyeretsa kwa wafer kumagwiritsa ntchito kuyanjana pakati pa HF ya gasi ndi nthunzi ya madzi kuchotsa ma oxide. Nthawi zambiri, njira ya HF yokhala ndi madzi iyenera kutsagana ndi njira yochotsera tinthu, pomwe kugwiritsa ntchito ukadaulo woyeretsa HF ya gasi sikufuna njira yotsatira yochotsera tinthu.
Ubwino wofunika kwambiri poyerekeza ndi njira yamadzi ya HF ndi kugwiritsa ntchito mankhwala ochepa a HF komanso kugwiritsa ntchito bwino kwambiri njira zoyeretsera.
Takulandirani makasitomala ochokera padziko lonse lapansi kuti adzatichezere kuti tikambirane zambiri!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
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Nthawi yotumizira: Ogasiti-13-2024