Hari ibintu bimwe na bimwe bikomoka ku bimera n'ibitari umwimerere bisabwa kugira ngo bigire uruhare mu gukora ibikoresho bya semiconductor. Byongeye kandi, kubera ko buri gihe ibikorwa bikorerwa mu cyumba gisukuye kandi abantu babigizemo uruhare, ibikoresho bya semiconductoruduce duto twa waferbyanduzwa n'imyanda itandukanye.
Dukurikije inkomoko n'imiterere y'imyanda, ishobora kugabanywamo ibice bine: uduce duto, ibintu by'umwimerere, iyoni z'icyuma na okiside.
1. Uduce duto:
Uduce duto cyane cyane ni polymer, photoresists na etching imyanda.
Udukoko nk'utwo dukunze kwishingikiriza ku mbaraga za molekile kugira ngo twinjire ku buso bwa wafer, bigira ingaruka ku miterere y'ibishushanyo mbonera n'ibipimo by'amashanyarazi by'uburyo bwo gufotora igikoresho.
Udukoko nk'utwo dukurwaho ahanini binyuze mu kugabanya buhoro buhoro aho duhurira n'ubuso bwaagace gatobinyuze mu buryo bw'umubiri cyangwa imiti.
2. Ibintu by’umwimerere:
Inkomoko y'imyanda ikomoka ku binyabuzima ni myinshi cyane, nk'amavuta y'uruhu rw'umuntu, bagiteri, amavuta y'imashini, amavuta akoreshwa mu gusiga, amavuta arwanya ubushyuhe, imiti isukura, n'ibindi.
Udukoko nk'utwo dukunze gukora agahu k’umwimerere ku buso bwa wafer kugira ngo wirinde ko amazi yoza agera ku buso bwa wafer, bigatuma ubuso bwa wafer butakara neza.
Gukuraho imyanda nk'iyo akenshi bikorwa mu ntambwe ya mbere y'igikorwa cyo gusukura, ahanini hakoreshejwe uburyo bwa chimique nka aside sulfure na peroxide ya hydrogen.
3. Iyoni z'icyuma:
Imyanda isanzwe mu byuma irimo icyuma, umuringa, aluminiyumu, chromium, icyuma gikozwe mu cyuma, titanium, sodiyumu, potasiyumu, lithiyumu, nibindi. Inkomoko nyamukuru ni ibikoresho bitandukanye, imiyoboro, imiti ikoreshwa mu byuma, n'umwanda w'icyuma uterwa n'uko ibyuma bihujwe mu gihe cyo gutunganya.
Ubu bwoko bw'umwanda bukunze gukurwaho hakoreshejwe uburyo bwa shimi binyuze mu gukora ibyuma bya ion complexes.
4. Okiside:
Iyo semiconductoruduce duto twa waferBishyizwe mu bidukikije birimo ogisijeni n'amazi, urwego rw'umwimerere rwa ogisijeni ruzaba hejuru. Iyi filime ya ogisijeni izabangamira ibikorwa byinshi mu gukora semiconductor ndetse inagire imyanda imwe n'imwe y'icyuma. Mu bihe bimwe na bimwe, bizatera inenge z'amashanyarazi.
Gukuraho iyi firime ya okiside akenshi birangirana no kwinika muri aside hydrofluoric diluted.
Isuku rusange ikurikiranye
Imyanda iri ku buso bwa semiconductoruduce duto twa waferishobora kugabanywamo ubwoko butatu: molekile, ioni na atome.
Muri byo, imbaraga zo kwinjiza hagati y’imyanda ya molekile n’ubuso bwa wafer ni nke, kandi ubwo bwoko bw’uduce tw’imyanda biroroshye kubikuraho. Ni imyanda igizwe ahanini n’amavuta afite imiterere ya hydrophobic, ishobora gutanga igipfukisho cy’imyanda ya ioni na atome yanduza ubuso bwa wafer za semiconductor, ibyo bikaba bidafasha gukuraho ubwo bwoko bubiri bw’imyanda. Kubwibyo, iyo isukuye wafer za semiconductor hakoreshejwe imiti, imyanda ya molekile igomba kubanza gukurwaho.
Bityo rero, inzira rusange ya semiconductoragace gatoUburyo bwo gusukura ni ubu:
Gukuraho molekile-gukuraho ionizasiyo-gukuraho atomization-gusukura amazi yakuwemo ioni.
Byongeye kandi, kugira ngo ukureho urwego rw'umwimerere rwa okiside ku buso bwa wafer, hakenewe kongerwamo intambwe yo kuvoma aside amine. Kubwibyo, igitekerezo cyo gusukura ni ukubanza gukuraho umwanda w'ibinyabuzima ku buso; hanyuma ugashonga urwego rwa okiside; amaherezo ugakuraho uduce duto n'ubwandu bw'icyuma, hanyuma ugakuraho ubuso icyarimwe.
Uburyo busanzwe bwo gusukura
Uburyo bwa chimique bukunze gukoreshwa mu gusukura wafer za semiconductor.
Gusukura imiti bivuga uburyo bwo gukoresha imiti itandukanye igabanya ubushyuhe n'ibintu bihumanya ikirere kugira ngo bihure cyangwa bishongeshe imyanda n'ibizinga by'amavuta ku buso bwa wafer kugira ngo bikuremo imyanda, hanyuma woge n'amazi menshi ashyushye n'akonje yakuwemo iyoni kugira ngo ubone ubuso busukuye.
Gusukura imiti bishobora kugabanywamo isuku y’imiti ikoreshwa mu gutose no gusukura imiti yumye, muri byo isuku y’imiti ikoreshwa mu gutose ikaba ari yo ikomeje kuba ingenzi.
Gusukura imiti ikoreshwa mu mazi
1. Gusukura hakoreshejwe imiti ikoreshwa mu gukaraba:
Gusukura imiti ikoreshwa mu gukaraba hakoreshejwe amazi bikubiyemo cyane cyane kwibiza mu mazi, gukaraba hakoreshejwe ikoranabuhanga, gusukura hakoreshejwe ikoranabuhanga, gusukura mu buryo bwa megasonic, gutera imiti mu buryo bwa rotary, nibindi.
2. Kwinjiza mu gisubizo:
Gushyiramo umuti mu mazi ni uburyo bwo gukuraho ubwandu ku buso bw'umugati ukoresheje umuti wa "wafer". Ni bwo buryo bukoreshwa cyane mu gusukura imiti ivanze n'amazi. Uburyo butandukanye bushobora gukoreshwa mu gukuraho ubwoko butandukanye bw'imyanda ku buso bw'umugati.
Ubusanzwe, ubu buryo ntibushobora gukuraho burundu imyanda iri ku buso bwa wafer, bityo ingamba zikoreshwa mu buryo bw'umubiri nko gushyushya, gukoresha ultrasound, no gukangura akenshi zikoreshwa mu gihe cyo kwibiza.
3. Gusukura hakoreshejwe ikoranabuhanga:
Gusukura hakoreshejwe ikoranabuhanga bikunze gukoreshwa mu gukuraho uduce duto cyangwa ibisigazwa by’ibinyabuzima ku buso bwa wafer. Muri rusange bishobora kugabanywamo uburyo bubiri:gukaraba no gukaraba n'intoki hakoreshejwe imashini ihanagura.
Gusukura n'intokini bwo buryo bworoshye bwo gukaraba. Uburoso bw'icyuma kitagira umugese bukoreshwa mu gufata umupira winjijwe muri ethanol cyangwa ibindi bintu bihumanya ikirere hanyuma ugasiga buhoro buhoro ubuso bw'agace k'umugati mu cyerekezo kimwe kugira ngo ukureho agace k'isukari, umukungugu, kole isigaye cyangwa ibindi bice bikomeye. Ubu buryo bworoshye gutera iminkanyari n'umwanda ukomeye.
Igihanagura gikoresha uburyo bwo gusimbuza ubuso bwa wafer ukoresheje uburoso bworoshye bw'ubwoya cyangwa uburoso buvanze. Ubu buryo bugabanya cyane imivundo kuri wafer. Igihanagura gikoresha umuvuduko mwinshi ntikizana wafer bitewe n'uko nta gusimbuza kwa mashini, kandi gishobora gukuraho umwanda mu mwobo.
4. Gusukura hakoreshejwe ikoranabuhanga rya Ultrasonic:
Gusukura hakoreshejwe ikoranabuhanga rya Ultrasonic ni uburyo bwo gusukura bukoreshwa cyane mu nganda za semiconductor. Ibyiza byabwo ni ugusukura neza, gukora byoroshye, ndetse no gusukura ibikoresho bigoye n'ibikoresho.
Ubu buryo bwo gusukura bukorwa n'imiraba ikomeye ya ultrasound (umuvuduko ukunze gukoreshwa wa ultrasound ni 20s40kHz), kandi ibice bike kandi byuzuye bizakorwa mu buryo bw'amazi. Igice gito kizatanga impumuro isa n'iy'umwuka. Iyo impumuro y'umwuka ibuze, hazavuka umuvuduko ukomeye hafi yayo, ugaca imigozi ya shimi mu ngirabuzimafatizo kugira ngo imyanda iri ku buso bwa wafer ishonge. Gusukura icyuma cya ultrasonic ni ingirakamaro cyane mu gukuraho ibisigazwa by'amazi bidashonga cyangwa bidashonga.
5. Gusukura cyane:
Gusukura cyane ntibigira gusa ibyiza byo gusukura hakoreshejwe ikoranabuhanga, ahubwo binakuraho inenge zabyo.
Gusukura Megasonic ni uburyo bwo gusukura wafers binyuze mu guhuza ingufu nyinshi (850kHz) hamwe n'uburyo imiti isukura. Mu gihe cyo gusukura, molekile z'umuti zihuta bitewe n'umuraba wa megasonic (umuvuduko ntarengwa w'ako kanya ushobora kugera kuri 30cmVs), kandi umuraba w'amazi wihuta cyane ukomeza kugira ingaruka ku buso bwa wafer, ku buryo imyanda n'uduce duto dufatanye n'ubuso bwa wafer bikurwaho ku ngufu bikinjira mu muti wo gusukura. Kongeramo aside surfactants mu muti wo gusukura, ku ruhande rumwe, bishobora kugera ku ntego yo gukuraho uduce n'ibintu by'umwimerere ku buso bwo gusukura binyuze mu kwinjiza surfactants; ku rundi ruhande, binyuze mu guhuza surfactants n'ibidukikije bihumanye, bishobora kugera ku ntego yo gukuraho ubwandu bw'icyuma ku buso bwo gusukura. Ubu buryo bushobora kugira uruhare mu guhanagura no gusukura imiti.
Kuri ubu, uburyo bwo gusukura bwa megasonic bwabaye uburyo bwiza bwo gusukura impapuro zo gusiga irangi.
6. Uburyo bwo gutera umuti uzenguruka:
Uburyo bwo gutera umuti uzunguruka ni uburyo bukoresha uburyo bwa mekanike kugira ngo buzunguruke umugati ku muvuduko mwinshi, kandi bugatera amazi (amazi asukuye cyane cyangwa andi mazi asukura) ku buso bwa wafer mu gihe cyo kuzunguruka kugira ngo ukureho imyanda ku buso bwa wafer.
Ubu buryo bukoresha umwanda uri ku buso bwa wafer kugira ngo ushonge mu mazi yasutswe (cyangwa ukagira icyo uhindura ku buryo bw'imiti kugira ngo ushonge), kandi bukoresha ingaruka zo kuzenguruka vuba cyane kugira ngo amazi arimo imyanda atandukanywe n'ubuso bwa wafer mu gihe.
Uburyo bwo gusukura amazi hakoreshejwe ikoranabuhanga rizunguruka bufite ibyiza byo gusukura imiti, gusukura ibyuma bisukuye, no gusukura hakoreshejwe umuvuduko mwinshi. Muri icyo gihe, ubu buryo bushobora kandi guhuzwa no kumisha. Nyuma y'igihe cyo gusukura amazi hakoreshejwe ikoranabuhanga risukuye, gusukura amazi birahagarara hanyuma hagakoreshwa umwuka usukuye. Muri icyo gihe, umuvuduko wo kuzunguruka ushobora kongerwa kugira ngo hongerwe imbaraga za centrifugal kugira ngo amazi yumuke vuba ku buso bwa wafer.
7.Gusukura imiti yumye
Gusukura byumye bivuga ikoranabuhanga ryo gusukura ridakoresha ibisubizo.
Ikoranabuhanga ryo gusukura lisansi rikoreshwa ubu ririmo: ikoranabuhanga ryo gusukura plasma, ikoranabuhanga ryo gusukura gaze, ikoranabuhanga ryo gusukura imirasire, n'ibindi.
Ibyiza byo gusukura byumye ni uko byoroshye gukora kandi nta kwanduza ibidukikije bihumanya, ariko igiciro ni kinini kandi uburyo bwo kubikoresha si bwinshi muri iki gihe.
1. Ikoranabuhanga ryo gusukura plasma:
Gusukura plasma bikunze gukoreshwa mu gukuraho icyuma gikingira umwuka. Ogisijeni nke yinjizwa muri sisitemu yo gusubiza plasma. Mu gihe cy'amashanyarazi akomeye, ogisijeni ikora plasma, ituma icyuma gikingira umwuka kiyihindura umwuka uhindagurika vuba, hanyuma kikavanwamo.
Ubu buryo bwo gusukura bufite ibyiza byo koroshya ikoreshwa, gukora neza cyane, gusukura ubuso, nta gushwanyagurika, kandi bufasha mu kwemeza ko ibicuruzwa bifite ubuziranenge mu gikorwa cyo gukuramo ifu. Byongeye kandi, ntibukoresha aside, alkali n'ibintu bishongesha ibinyabuzima, kandi nta bibazo nko kujugunya imyanda no kwangiza ibidukikije. Kubwibyo, abantu barushaho kuyiha agaciro. Ariko, ntishobora gukuraho karubone n'indi myanda idahindagurika mu byuma cyangwa okiside y'icyuma.
2. Ikoranabuhanga ryo gusukura gazi mu gice cyayo:
Gusukura gazi ku gice cyo hasi bivuga uburyo bwo gusukura bukoresha gazi ingana n'ikintu gihuye nacyo mu buryo bw'amazi kugira ngo buhuze n'ikintu cyanduye kiri ku buso bwa wafer kugira ngo bugere ku ntego yo gukuraho imyanda.
Urugero, muri gahunda ya CMOS, gusukura wafer hakoreshejwe uburyo bwo gukuraho okiside mu gice cya gaze n'umwuka w'amazi. Ubusanzwe, gahunda ya HF irimo amazi igomba guherekezwa n'uburyo bwo gukuraho uduce duto, mu gihe gukoresha ikoranabuhanga ryo gusukura HF mu gice cya gaze bidasaba uburyo bwo gukuraho uduce duto nyuma yaho.
Ibyiza by'ingenzi ugereranyije n'uburyo bwo gukoresha HF mu mazi ni uko ikoreshwa ry'imiti ya HF rito cyane kandi rikarushaho gukora neza.
Murakaza neza abakiriya bose baturutse impande zose z'isi baza kudusura kugira ngo tuganireho byinshi!
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Igihe cyo kohereza: Kanama-13-2024