Zvimwe zvinhu zvechisikigo nezvisiri zvechisikigo zvinodiwa kuti zvibatanidzwe mukugadzirwa kwezvikamu zvemitongi. Pamusoro pezvo, sezvo maitiro acho achigara achiitwa muimba yakachena nevanhu, zvikamu zvemitongimawaferzvinosvibiswa netsvina dzakasiyana-siyana.
Zvichienderana nekwakabva uye hunhu hwezvinosvibisa, zvinogona kukamurwa kuita zvikamu zvina: zvidimbu, zvinhu zvakasikwa, maayoni esimbi uye maoxide.
1. Zvidimbu:
Zvidimbu zvinonyanya kuva mapolymer, photoresists uye tsvina inocherwa.
Zvinhu zvakadaro zvinosvibisa zvinowanzoshandisa simba repakati pemamorekuru kuti zvinyungudike pamusoro pewafer, zvichikanganisa kuumbwa kwezvimiro zvejometri uye parameters dzemagetsi dzemaitiro ekugadzira photolithography yemudziyo.
Zvinhu zvakadaro zvinobviswa zvakanyanya nekuderedza zvishoma nezvishoma nzvimbo yazvinosangana nayo pamusoro peganda.chifukidzirokuburikidza nenzira dzemuviri kana dzemakemikari.
2. Zvinhu zvepanyama:
Zvinhu zvinokonzera tsvina yeganda revanhu zvakafara, zvakaita semafuta eganda revanhu, mabhakitiriya, mafuta emuchina, mafuta evacuum grease, photoresist, zvinonyungudutsa zvinochenesa, nezvimwewo.
Zvinhu zvakadaro zvinosvibisa zvinowanzoita firimu reorganic pamusoro pewafer kudzivirira mvura yekuchenesa kuti isasvike pamusoro pewafer, zvichikonzera kucheneswa kwakakwana kwewafer.
Kubviswa kwetsvina yakadaro kunowanzoitwa padanho rekutanga rekuchenesa, kunyanya uchishandisa nzira dzemakemikari dzakadai sesulfuric acid nehydrogen peroxide.
3. Maayoni esimbi:
Kusvibiswa kwesimbi kunowanzo sanganisira simbi, mhangura, aruminiyamu, chromium, simbi yakakandwa, titanium, sodium, potassium, lithium, nezvimwewo. Zvinhu zvikuru zvinobva mumidziyo yakasiyana-siyana, mapaipi, makemikari anokonzera tsvina, uye kusvibiswa kwesimbi kunokonzerwa kana simbi dzakabatana panguva yekugadzirisa.
Rudzi urwu rwekusachena runowanzo bviswa nenzira dzemakemikari kuburikidza nekuumbwa kwema ion complex esimbi.
4. Okisidhi:
Kana semiconductormawaferKana dzasangana nenzvimbo ine okisijeni nemvura, ganda re oxide rechisikigo rinoumbwa pamusoro. Firimu iri re oxide richakanganisa maitiro akawanda mukugadzirwa kwema semiconductor uye rinewo mamwe marara esimbi. Mune mamwe mamiriro ezvinhu, dzichagadzira zvikanganiso zvemagetsi.
Kubviswa kwefirimu re oxide iyi kunowanzoitwa nekunyikwa mu hydrofluoric acid yakasanganiswa.
Kurongeka kwekuchenesa kwakajairika
Kusachena kwakanyungudutswa pamusoro pe semiconductormawaferinogona kukamurwa kuita mhando nhatu: molecular, ionic uye atomic.
Pakati pazvo, simba rekunyungudutsa pakati pezvinhu zvisina kuchena zvemamorekuru nepamusoro pewafer harina kusimba, uye rudzi urwu rwezvinhu zvisina kuchena zviri nyore kubvisa. Zvizhinji zvezvinhu zvisina kuchena zvine mafuta zvine hunhu hwe hydrophobic, izvo zvinogona kupa chifukidziro cheionic neatomic disadvantages zvinosvibisa pamusoro pemawafer e semiconductor, izvo zvisingabatsire kubviswa kwemarudzi maviri aya etsvina. Saka, pakuchenesa mawafer e semiconductor nemakemikari, zvinhu zvisina kuchena zvemamorekuru zvinofanira kutanga zvabviswa.
Saka, maitiro akajairika e semiconductorchifukidziroMaitiro ekuchenesa ndeaya:
Kubvisa mamorekuru muropa, kubvisa maionization, kubvisa maionization mumvura.
Pamusoro pezvo, kuti ubvise oxide layer yechisikigo pamusoro pewafer, danho rekunyorovesa amino acid rakaderedzwa rinofanira kuwedzerwa. Saka, pfungwa yekuchenesa ndeyekutanga kubvisa organic contamination pamusoro; wobva wanyungudutsa oxide layer; pakupedzisira kubvisa zvidimbu uye simbi contamination, uye wobvisa pass pamusoro panguva imwe chete.
Nzira dzakajairika dzekuchenesa
Nzira dzemakemikari dzinowanzo shandiswa pakuchenesa mawafer e semiconductor.
Kuchenesa nemakemikari zvinoreva nzira yekushandisa mishonga yakasiyana-siyana yemakemikari uye zvinonyungudutsa organic kuti zviite kana kunyungudutsa tsvina uye mavara emafuta pamusoro pewafer kuti zvibvise tsvina, wozosuka nemvura yakawanda yakachena inopisa uye inotonhora yakacheneswa kuti pave nechinhu chakachena.
Kuchenesa makemikari kunogona kukamurwa kuita kuchenesa makemikari akanyorova uye kuchenesa makemikari akaoma, pakati pazvo kuchenesa makemikari akanyorova kuchiri kukuru.
Kuchenesa makemikari akanyorova
1. Kuchenesa makemikari nenzira yemvura:
Kuchenesa makemikari akanyorova kunosanganisira kunyudza mumvura, kukwesha nemaoko, kuchenesa ne ultrasound, kuchenesa ne megasonic, kupfapfaidza ne rotary, nezvimwewo.
2. Kunyudzwa kwemvura mumhinduro:
Kunyudza musanganiswa inzira yekubvisa kusvibiswa pamusoro pechiso nekunyudza wafer mumushonga wemakemikari. Ndiyo nzira inonyanya kushandiswa pakuchenesa makemikari akanyorova. Mhinduro dzakasiyana dzinogona kushandiswa kubvisa mhando dzakasiyana dzetsvina pamusoro pewafer.
Kazhinji, nzira iyi haigone kubvisa tsvina iri pamusoro pewafer zvachose, saka zviyero zvemuviri zvakaita sekudziya, ultrasound, uye kusanganisa zvinowanzo shandiswa panguva yekunyudza.
3. Kukwesha nekushandisa michina:
Kukwesha nekushandisa michina kunowanzo shandiswa kubvisa zvidimbu kana zvasara zve organic pamusoro pewafer. Kazhinji zvinogona kukamurwa kuita nzira mbiri:kukwesha nemaoko nekupukuta nemudziyo wekuchenesa.
Kukwesha nemaokondiyo nzira iri nyore yekukwesha. Bhurasho resimbi risingatsvi rinoshandiswa kubata bhora rakanyikwa muanhydrous ethanol kana zvimwe zvinonyungudutsa zve organic uye kukwesha zvinyoro nyoro pamusoro pewafer nenzira imwe chete kubvisa wax film, guruva, residual glue kana zvimwe zvinhu zvakaoma. Nzira iyi iri nyore kukonzera mavanga uye kusvibiswa kwakanyanya.
Chinopukuta chinoshandisa kutenderera kwemuchina kukwesha pamusoro pewafer nebhurashi remvere dzakapfava kana bhurashi rakasanganiswa. Nzira iyi inoderedza zvikuru mavanga ari pawafer. Chinopukuta chine simba guru hachikwenye wafer nekuda kwekushaya kukweshana kwemuchina, uye chinogona kubvisa kusvibiswa kuri mugomba.
4. Kuchenesa kweUltrasonic:
Kuchenesa kweUltrasonic inzira yekuchenesa inoshandiswa zvakanyanya muindasitiri yesemiconductor. Zvakanakira zvayo kuchenesa kwakanaka, kushanda kuri nyore, uye inogonawo kuchenesa midziyo yakaoma nemakontena.
Nzira iyi yekuchenesa inoshandiswa nemafungu akasimba e ultrasonic (frequency ye ultrasonic inowanzoshandiswa ndeye 20s40kHz), uye zvikamu zvishoma uye zvakakora zvichagadzirwa mukati memvura. Chikamu chiduku chichagadzira bubble rinoita se vacuum cavity. Kana bubble re cavity ranyangarika, kumanikidzwa kwakasimba kwenzvimbo kuchagadzirwa pedyo naro, kuchipwanya makemikari ari mumamorekuru kuti kunyungudise tsvina iri pamusoro pe wafer. Kuchenesa kwe ultrasonic kunoshanda zvakanyanya pakubvisa masara e flux asinganyungudike kana asinganyungudike.
5. Kuchenesa kweMegasonic:
Kuchenesa kweMegasonic hakungobatsiri chete pakuchenesa kwe ultrasonic, asiwo kunokunda zvikanganiso zvayo.
Kuchenesa kweMegasonic inzira yekuchenesa mawafer nekubatanidza simba guru (850kHz) frequency vibration effect pamwe nemakemikari ekuchenesa emakemikari. Munguva yekuchenesa, mamorekuru emhinduro anokurumidziswa nemegasonic wave (kumhanya kwakanyanya panguva imwe chete kunogona kusvika 30cmVs), uye mafungu emvura anomhanya nekukurumidza anoramba achikanganisa pamusoro pewafer, kuitira kuti tsvina nezvidimbu zvidiki zvakasungirirwa pamusoro pewafer zvibviswe zvine simba uye zvipinde mumushonga wekuchenesa. Kuwedzera acidic surfactants kumushonga wekuchenesa, kune rumwe rutivi, kunogona kuzadzisa chinangwa chekubvisa zvidimbu nezvinhu zvakasikwa pamusoro pepolishing kuburikidza nekunyungudutsa masurfactants; kune rumwe rutivi, kuburikidza nekubatanidzwa kwemasurfactants nenzvimbo ine acidic, zvinogona kuzadzisa chinangwa chekubvisa kusvibiswa kwesimbi pamusoro pepolish sheet. Nzira iyi inogona panguva imwe chete kuita basa rekupukuta nekuchenesa nemakemikari.
Parizvino, nzira yekuchenesa megasonic yave nzira inoshanda yekuchenesa machira ekupukuta.
6. Nzira yekupfapfaidza yakatenderera:
Nzira yekupfapfaidza inotenderera inzira inoshandisa nzira dzemuchina kutenderedza wafer nekumhanya kwakanyanya, uye inogara ichipfapfaidza mvura (mvura yakachena kwazvo kana imwe mvura yekuchenesa) pamusoro pewafer panguva yekutenderera kubvisa tsvina pamusoro pewafer.
Nzira iyi inoshandisa kusvibiswa kuri pamusoro pewafer kuti inyungudike mumvura yakapfapfaidzwa (kana kuti inosangana nayo nemakemikari kuti inyungudike), uye inoshandisa simba re centrifugal rekutenderera nekukurumidza kuti mvura ine tsvina iparadzane nepamusoro pewafer nenguva.
Nzira yekupfapfaidza inotenderera ine zvakanakira zvekuchenesa makemikari, kuchenesa fluid mechanics, uye kukwesha zvine simba guru. Panguva imwe chete, nzira iyi inogonawo kubatanidzwa nekuomesa. Mushure menguva yekuchenesa mvura isina ion, mvura inopfapfaidzwa inomiswa uye gasi rekupfapfaidza rinoshandiswa. Panguva imwe chete, kumhanya kwekutenderera kunogona kuwedzerwa kuwedzera simba re centrifugal kuti rikurumidze kunyorovesa pamusoro pewafer.
7.Kuchenesa makemikari asina kuomeswa
Kuchenesa netsvina zvinoreva tekinoroji yekuchenesa isingashandise mhinduro.
Matekinoroji ekuchenesa anoshandiswa pari zvino anosanganisira: tekinoroji yekuchenesa plasma, tekinoroji yekuchenesa gasi, tekinoroji yekuchenesa beam, nezvimwewo.
Zvakanakira zvekuchenesa ne dry cleaner zviri nyore uye hazvina kusvibiswa kwezvakatipoteredza, asi mutengo wacho wakakwira uye kushandiswa kwacho hakuna kukura parizvino.
1. Tekinoroji yekuchenesa plasma:
Kuchenesa plasma kunowanzo shandiswa mukubvisa photoresist. Okisijeni shoma inopinzwa muplasma reaction system. Pasi pesimba remagetsi rakasimba, okisijeni inoburitsa plasma, iyo inokurumidza kuomesa photoresist kuita gasi rinoputika uye inoburitswa.
Iyi tekinoroji yekuchenesa ine zvakanakira zvekushanda zviri nyore, kushanda zvakanaka, kuchena pamusoro, kusakwenya, uye inobatsira pakuona kuti chigadzirwa chakanaka mukubvisa gum. Uyezve, haishandise acids, alkalis uye organic solvents, uye hapana matambudziko akadai sekurasa marara uye kusvibiswa kwezvakatipoteredza. Saka, iri kukosheswa nevanhu zvakanyanya. Zvisinei, haigone kubvisa kabhoni nedzimwe tsvina dzesimbi kana simbi oxide dzisingakanganise.
2. Tekinoroji yekuchenesa gasi:
Kuchenesa gasi padanho remvura zvinoreva nzira yekuchenesa inoshandisa gasi padanho remvura rakaenzana nechinhu chinoenderana nacho mukuita kwemvura kuti ibatane nechinhu chakasvibiswa pamusoro pewafer kuti ibudise chinangwa chekubvisa tsvina.
Semuenzaniso, mukuita kweCMOS, kuchenesa wafer kunoshandisa kudyidzana kuripo pakati pegasi HF newater vapor kubvisa maoxides. Kazhinji, maitiro eHF ane mvura anofanira kuperekedzwa nemaitiro ekubvisa tunhu, nepo kushandiswa kwetekinoroji yekuchenesa gasi HF hakudi maitiro anotevera ekubvisa tunhu.
Zvakanakira zvikuru zvichienzaniswa nemaitiro emvura eHF ishoma kushandiswa kwemakemikari eHF uye kushanda zvakanaka kwekuchenesa.
Gamuchirai vatengi vanobva kumativi ese epasi kuti vatishanyire kuti tikurukure zvakawanda!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nguva yekutumira: Nyamavhuvhu-13-2024