Me whai wāhi ētahi matū waro me ngā matū kore-waro ki te hanga i ngā matū haurua-ira. Hei tāpiri, nā te mea ka whakahaerehia te tukanga i roto i tētahi rūma ma me te whai wāhi mai o te tangata, ka hiahiatia he matū haurua-irangā papakua poke tonu i ngā momo poke.
E ai ki te pūtake me te āhua o ngā poke, e whā ngā wāhanga e taea te wehewehe: ngā matūriki, ngā mea rauropi, ngā katote konganuku me ngā waikura.
1. Ngā matūriki:
Ko ngā matūriki he polymer, he photoresists me ngā poke whakairo.
Ko te tikanga, ka whakawhirinaki ēnei poke ki ngā kaha i waenga i ngā ngota hei mimiti ki te mata o te papa whakarewa, ka pā ki te hanganga o ngā āhua āhuahanga me ngā tawhā hiko o te tukanga whakaahua-ipurangi o te taputapu.
Ko te nuinga o te wā ka tangohia ēnei poke mā te whakaiti haere i tō rātou horahanga pa ki te mata o tepapamā roto i ngā tikanga ā-tinana, ā-matū rānei.
2. Ngā mea rauropi:
He whānuitia ngā pūtake o ngā poke rauropi, pērā i te hinu kiri tangata, te huakita, te hinu mīhini, te hinu korehau, te photoresist, ngā whakarewa horoi, me ētahi atu.
Ko te tikanga, ka hangaia e ēnei poke he kiriata rauropi ki runga i te mata o te wafer hei aukati i te wai horoi kei tae atu ki te mata o te wafer, ka hua ake he horoinga koretake o te mata o te wafer.
Ko te tango i aua poke ka mahia i te taahiraa tuatahi o te tukanga horoi, mā te whakamahi i ngā tikanga matū pēnei i te waikawa whanariki me te hauwai waikura.
3. Ngā iona whakarewa:
Ko ngā poke whakarewa noa ko te rino, te parahi, te konumohe, te chromium, te rino maka, te titanium, te konutai, te pāhare pākawa, te lithium, me ētahi atu. Ko ngā pūtake matua ko ngā taputapu, ngā paipa, ngā matū matū, me te parahanga whakarewa e puta mai ana i te wā e honoa ai ngā konganuku i te wā e tukatukahia ana.
Ko te nuinga o te wā ka tangohia tēnei momo poke mā ngā tikanga matū mā te hanganga o ngā matatini katote konganuku.
4. Waikura:
Ina he semiconductorngā papaKi te pāngia e te hāora me te wai, ka puta he paparanga waikura tūturu ki te mata. Ka ārai tēnei kiriata waikura i ngā tukanga maha i roto i te hanga haurua-ā-ira, ā, kei roto hoki ētahi poke whakarewa. I raro i ētahi āhuatanga, ka puta he hapa hiko.
Ko te tango i tēnei kiriata waikura ka oti mā te rumakina ki te waikawa hauwaiwaihā waimeha.
Te raupapa horoi whānui
Ngā poke e piri ana ki te mata o te haurua-ā-irangā papaka taea te wehewehe kia toru ngā momo: te ngota ngota, te iona me te ngota ngota.
I roto i ēnei, he ngoikore te kaha mimiti i waenga i ngā poke ngota me te mata o te papa, ā, he ngāwari noa te tango i tēnei momo matūriki poke. Ko te nuinga he poke hinuhinu me ngā āhuatanga wai-whakahāwea, ka taea te ārai i ngā poke ionic me te ngota e poke ana i te mata o ngā papa haurua-irahiko, kāore e pai mō te tango i ēnei momo poke e rua. Nō reira, i te wā e horoi matū ana i ngā papa haurua-irahiko, me tango tuatahi ngā poke ngota.
Nō reira, ko te tukanga whānui o te semiconductorpapako te tukanga horoi ko:
Te horoinga wai tango-ngota-tango-ngota-tango-ngota-horoi tango-ngota.
Hei tāpiritanga, hei tango i te paparanga waikura tūturu i runga i te mata o te papa, me tāpiri he taahiraa whakamakuku waikawa amino waimeha. Nō reira, ko te whakaaro o te horoi ko te tango tuatahi i te paru rauropi i runga i te mata; kātahi ka whakarewa i te paparanga waikura; ā, hei whakamutunga, tangohia ngā matūriki me ngā paru whakarewa, ā, ka whakakore i te mata i te wā kotahi.
Ngā tikanga horoi noa
He maha ngā tikanga matū e whakamahia ana mō te horoi i ngā papa whakarewa haurua-ira.
Ko te horoi matū e pā ana ki te tukanga whakamahi i ngā momo matū me ngā whakarewa waro hei tauhohe, hei whakarewa rānei i ngā poke me ngā paru hinu i runga i te mata o te papa parakore hei tango i ngā poke, kātahi ka horoia ki te nui o te wai wera me te wai matao kua whakakorea te ion kia puta ai he mata ma.
Ka taea te wehewehe i te horoi matū ki te horoi matū mākū me te horoi matū maroke, ā, ko te horoi matū mākū tonu te mea matua.
Te horoi matū mākū
1. Te horoi matū mākū:
Ko te horoi matū mākū te nuinga o te wā ko te rumaki i te wai, te horoi ā-mīhini, te horoi ultrasonic, te horoi megasonic, te rehu hurihuri, me ētahi atu.
2. Te rumakitanga o te otinga:
Ko te rumaki wairewa he tikanga hei tango i te paru o te mata mā te rumaki i te papa i roto i te wairewa matū. Koinei te tikanga e whakamahia whānuitia ana mō te horoi matū mākū. Ka taea te whakamahi i ngā wairewa rerekē hei tango i ngā momo paru rerekē i runga i te mata o te papa.
I te nuinga o te wā, kāore e taea e tēnei tikanga te tango katoa i ngā poke i runga i te mata o te anga, nō reira ka whakamahia ngā mahi ā-tinana pēnei i te whakamahana, te ultrasound, me te whakaoho i te wā e rukuhia ana.
3. Te horoi ā-ringa:
He maha ngā wā ka whakamahia te horoi ā-ringa hei tango i ngā matūriki, i ngā toenga rauropi rānei i runga i te mata o te papa. E rua ngā tikanga e taea te wehewehe:te horoi ā-ringa me te horoi mā te horoi.
Te horoi ā-ringaKo te tikanga horoi māmā rawa atu tēnei. Ka whakamahia he paraihe kowiri tira hei pupuri i tētahi pōro kua rumakina ki te etanoru waikore, ki ētahi atu whakarewa rauropi rānei, ā, ka mirimiri mārire i te mata o te papa i te ahunga kotahi hei tango i te kiriata ware pi, te puehu, te kāpia toenga, ētahi atu matūriki totoka rānei. He ngāwari ki te whakararuraru me te whakapoke kino i tēnei tikanga.
Ka whakamahia e te paraihe horoi te hurihanga ā-ringa hei miri i te mata o te paraihe ki te paraihe huruhuru ngohengohe, ki te paraihe whakaranu rānei. Mā tēnei tikanga ka tino whakaitihia ngā karawarawa i runga i te paraihe. E kore te paraihe horoi pēhanga teitei e karawarawa i te paraihe nā te kore o te waku ā-ringa, ā, ka taea te tango i te paru i roto i te awaawa.
4. Horoi ā-orooro:
He tikanga horoi whānuitia te horoinga ultrasonic i roto i te umanga semiconductor. Ko ōna painga he pai te pānga horoi, he māmā te whakahaere, ā, ka taea hoki te horoi i ngā taputapu me ngā ipu uaua.
Kei raro i te mana o ngā ngaru ultrasonic kaha tēnei tikanga horoi (ko te auau ultrasonic e whakamahia whānuitia ana ko te 20s40kHz), ā, ka puta he wāhanga mārō, he wāhanga matotoru hoki i roto i te wai. Ka puta he mirumiru āputa tata korehau i te wāhanga mārō. Ina ngaro te mirumiru āputa, ka puta he pēhanga ā-rohe kaha i te taha, ka motuhia ngā hononga matū i roto i ngā ngota hei whakarewa i ngā poke i runga i te mata o te papa. Ko te horoi ultrasonic te mea tino whai hua mō te tango i ngā toenga rere kore e rewa, kore rānei e rewa.
5. Horoitanga Megasonic:
Ehara i te mea ko ngā painga anake o te horoinga ultrasonic te horoinga megasonic, engari ka wikitoria hoki i ōna ngoikoretanga.
Ko te horoinga megasonic he tikanga horoi i ngā papa mā te whakakotahi i te pānga wiri auau teitei-pūngao (850kHz) me te tauhohenga matū o ngā matū horoi. I te wā e horoi ana, ka whakaterea ngā ngota wairewa e te ngaru megasonic (ka taea e te tere tere rawa te eke ki te 30cmVs), ā, ka pā tonu te ngaru wai tere-teitei ki te mata o te papa, kia tangohia ai ngā poke me ngā matūriki angiangi e piri ana ki te mata o te papa, ka uru ki te wai horoi. Mā te tāpiri i ngā matūriki waikawa ki te wai horoi, i tetahi taha, ka taea te tango i ngā matūriki me ngā mea rauropi i runga i te mata whakakanapa mā te mimiti o ngā matū horoi; i tetahi atu taha, mā te whakauru i ngā matū horoi me te taiao waikawa, ka taea te tango i te poke whakarewa i runga i te mata o te pepa whakakanapa. Ka taea e tēnei tikanga te mahi i te horoinga miihini me te horoi matū i te wā kotahi.
I tēnei wā, kua noho te tikanga horoi megasonic hei tikanga whai hua mō te horoi i ngā pepa whakakanapa.
6. Tikanga rehu hurihuri:
Ko te tikanga rehu hurihuri he tikanga e whakamahi ana i ngā tikanga ā-ringa hei huri i te papa i te tere teitei, ā, ka rehu tonu i te wai (wai whakakore ioniti tino parakore, wai horoi rānei) ki runga i te mata o te papa i te wā e huri ana hei tango i ngā poke i runga i te mata o te papa.
Ka whakamahia e tēnei tikanga te paru i runga i te mata o te papa parapara hei whakarewa i roto i te wai i rehuhia (ka tauhohe matū rānei ki a ia hei whakarewa), ā, ka whakamahia te pānga porowhita o te hurihanga tere-teitei hei wehe i ngā poke kei roto i te wai mai i te mata o te papa parapara i roto i te wā.
He pai ngā painga o te tikanga rehu hurihuri, arā, te horoi matū, te horoi wai, me te horoi pēhanga teitei. I taua wā anō, ka taea hoki te whakakotahi i tēnei tikanga me te tukanga whakamaroke. I muri i te wā horoinga rehu wai whakakore iona, ka mutu te rehu wai, ā, ka whakamahia he hau rehu. I taua wā anō, ka taea te whakanui ake i te tere hurihuri hei whakanui ake i te kaha porowhita kia tere ai te maroke o te mata o te papa.
7.Horoi matū maroke
Ko te horoi maroke e pā ana ki te hangarau horoi kāore e whakamahi i ngā otinga.
Ko ngā hangarau horoi maroke e whakamahia ana i tēnei wā ko: te hangarau horoi plasma, te hangarau horoi hau, te hangarau horoi kurupae, me ētahi atu.
Ko ngā painga o te horoi maroke ko te māmā o te tukanga me te kore e poke i te taiao, engari he nui te utu, ā, kāore i te whānui te whānuitanga o te whakamahinga i tēnei wā.
1. Hangarau horoi plasma:
He maha ngā wā ka whakamahia te horoi plasma i roto i te tukanga tango i te photoresist. Ka tāpirihia he iti noa te hāora ki roto i te pūnaha tauhohenga plasma. I raro i te mahi a te papa hiko kaha, ka whakaputa te hāora i te plasma, ka tere te waikura o te photoresist ki te āhua hau pūngāwerewere, ā, ka tangohia.
He ngāwari te whakamahi i tēnei hangarau horoi, he tino whai hua, he ma te mata, kāore he karawarawa, ā, he pai hoki mō te kounga o te hua i roto i te tukanga tango kapia. Heoi anō, kāore e whakamahia he waikawa, he kawakore me he whakarewa waro, ā, kāore he raruraru pēnei i te tuku para me te parahanga taiao. Nō reira, kei te piki haere te maioha o te tangata ki tēnei hangarau. Heoi anō, kāore e taea te tango i te waro me ētahi atu paru konganuku kore-pūngoi, waikura konganuku rānei.
2. Hangarau horoi hau:
Ko te horoi hau e pā ana ki tētahi tikanga horoi e whakamahi ana i te hau ōrite o te matū e rite ana i roto i te tukanga wai hei taunekeneke me te matū poke i runga i te mata o te papa parakore hei whakatutuki i te kaupapa o te tango i ngā poke.
Hei tauira, i roto i te tukanga CMOS, ka whakamahia e te horoinga wafer te taunekeneke i waenga i te hau HF me te mamaoa wai hei tango i ngā waikura. I te nuinga o te wā, me haere tahi te tukanga HF kei roto te wai me te tukanga tango matūriki, engari kāore e hiahiatia he tukanga tango matūriki i muri mai mō te whakamahinga o te hangarau horoi hau HF.
Ko ngā painga nui ki te whakataurite ki te tukanga wai HF ko te iti o te whakamahinga matū HF me te pai ake o te horoi.
Nau mai haere mai ki te toro mai ki a mātou mō ētahi atu kōrerorero, mai i ngā kiritaki katoa o te ao!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Wā tuku: 13 o Ākuhata 2024