Mmepụta ngwaọrụ semiconductor gụnyere ngwaọrụ dị iche iche, sekit agbakwunyere na usoro nkwakọ ngwaahịa ha.
Enwere ike kewaa mmepụta semiconductor n'ime usoro atọ: mmepụta ihe ahụ na ngwaahịa, ngwaahịawaferMmepụta na njikọta ngwaọrụ. N'ime ha, mmetọ kachasị njọ bụ ọkwa mmepụta wafer ngwaahịa.
A na-ekewa ihe ndị na-emetọ ihe n'ime mmiri mkpofu, gas mkpofu na ihe mkpofu siri ike.
Usoro mmepụta mgbawa:
Wafer silikọnmgbe a gwerisịrị ihe dị n'èzí - nhicha - oxidation - iguzogide otu - photolithography - mmepe - ịcha - mgbasa, itinye ion - itinye uzuoku kemịkal - imepụta kemịkalụ mekaniki - imepụta metallization, wdg.
Mmiri mkpofu
A na-emepụta nnukwu mmiri mkpofu na usoro ọ bụla nke mmepụta na nnwale nkwakọ ngwaahịa semiconductor, ọkachasị mmiri mkpofu nke isi acid, mmiri mkpofu nke nwere ammonia na mmiri mkpofu organic.
1. Mmiri mkpofu nwere fluorine:
Acid hydrofluoric na-aghọ ihe mgbaze bụ isi eji eme ihe na usoro oxidation na etching n'ihi ihe ndị na-eme ka ọ dị ọcha ma na-emebi emebi. Mmiri mkpofu nwere fluorine na-esi na usoro mgbasa na usoro polishing mechanical na usoro mmepụta chip. N'usoro nhicha nke wafer silicon na ngwa ndị yiri ya, a na-ejikwa hydrochloric acid ọtụtụ oge. A na-emecha usoro ndị a niile na tankị etching raara onwe ya nye ma ọ bụ ngwa nhicha, yabụ enwere ike iwepụ mmiri mkpofu nwere fluorine n'onwe ya. Dịka njupụta ahụ si dị, enwere ike kewaa ya n'ime mmiri mkpofu nwere fluorine dị elu na mmiri mkpofu nwere ammonia dị ala. N'ozuzu, njupụta nke mmiri mkpofu nwere ammonia dị elu nwere ike iru 100-1200 mg/L. Ọtụtụ ụlọ ọrụ na-emegharị akụkụ a nke mmiri mkpofu maka usoro ndị na-achọghị mmiri dị elu.
2. Mmiri mkpofu nke isi ihe dị ka acid:
Ihe fọrọ nke nta ka ọ bụrụ usoro ọ bụla dị na usoro mmepụta sekit agbakwunyere chọrọ ka a hichaa mgbawa ahụ. Ugbu a, sulfuric acid na hydrogen peroxide bụ mmiri nhicha a na-ejikarị eme ihe n'usoro mmepụta sekit agbakwunyere. N'otu oge ahụ, a na-ejikwa ihe ndị na-eme ka acid dị ka nitric acid, hydrochloric acid na mmiri ammonia.
Mmiri mkpofu nke isi acid nke usoro mmepụta ihe na-esikarị na usoro nhicha nke usoro mmepụta chip. N'usoro nkwakọ ngwaahịa, a na-eji mmiri acid-base agwọ chip ahụ n'oge electroplating na nyocha kemịkalụ. Mgbe ọgwụgwọ gasịrị, ọ dị mkpa ka e jiri mmiri dị ọcha saa ya iji mepụta mmiri mkpofu nke isi acid. Na mgbakwunye, a na-ejikwa ihe ndị na-eme ka isi acid dị ka sodium hydroxide na hydrochloric acid na ọdụ mmiri dị ọcha iji mee ka anion na cation resins dịghachi ọhụrụ iji mepụta mmiri mkpofu nke isi acid. A na-emepụtakwa mmiri ọdụ ịsa ahụ n'oge usoro ịsa gas mkpofu nke isi acid. Na ụlọ ọrụ mmepụta sekit agbakwunyere, oke mmiri mkpofu nke isi acid dị oke ukwuu.
3. Mmiri ihe mkpofu sitere n'okike:
N'ihi usoro mmepụta dị iche iche, ọnụọgụ ihe mgbaze organic eji eme ihe na ụlọ ọrụ semiconductor dị nnọọ iche. Agbanyeghị, dịka ihe nhicha, a ka na-ejikarị ihe mgbaze organic eme ihe na njikọ dị iche iche nke nkwakọ ngwaahịa mmepụta. Ụfọdụ ihe mgbaze na-aghọ ihe mgbaze organic.
4. Mmiri mkpofu ndị ọzọ:
Usoro ịcha ihe nke usoro mmepụta semiconductor ga-eji nnukwu ammonia, fluorine na mmiri dị ọcha dị elu mee ihe iji kpochapụ ihe ndị na-emerụ ahụ, si otú a na-emepụta mmiri mkpofu nwere ammonia dị elu.
A chọrọ usoro electroplating n'ime usoro nkwakọ ngwaahịa semiconductor. A ga-ehicha chip ahụ mgbe emechara electroplating, a ga-emepụtakwa mmiri mkpofu a na-ehicha electroplating n'ime usoro a. Ebe ọ bụ na a na-eji ụfọdụ ọla eme electroplating, a ga-enwe mwepụta ion ígwè na mmiri mkpofu a na-ehicha electroplating, dịka lead, tin, diski, zinc, aluminum, wdg.
Gas mkpofu
Ebe ọ bụ na usoro semiconductor nwere nnukwu ihe achọrọ maka ịdị ọcha nke ụlọ ọrụ ịwa ahụ, a na-ejikarị fan ewepụta ụdị gas mkpofu dị iche iche na-agbaze n'oge usoro ahụ. Ya mere, a na-eji nnukwu olu ikuku na obere mkpokọta ikuku emepụta ihe mara mwepụ gas mkpofu. A na-ejikwa ikuku mkpofu gas eme ihe nke ukwuu.
Enwere ike kewaa mwepụta gas ndị a n'ime ụdị anọ: gas acidic, gas alkaline, gas mkpofu organic na gas na-egbu egbu.
1. Gas mkpofu nke isi ihe dị n'ime acid:
Mkpofu ikuku nke isi ihe na-esi na acid apụta na-abụkarị site na mgbasa ozi,CVD, CMP na usoro ịkpụcha ihe, nke na-eji ngwọta nhicha acid-base hichaa wafer ahụ.
Ugbu a, ihe mgbaze nhicha a na-ejikarị eme ihe n'usoro mmepụta semiconductor bụ ngwakọta nke hydrogen peroxide na sulfuric acid.
Gas mkpofu a na-emepụta n'ime usoro ndị a gụnyere gas acidic dị ka sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid na phosphoric acid, ebe gas alkaline bụ ammonia.
2. Gas mkpofu organic:
Gas mkpofu organic na-esikarị na usoro dịka photolithography, mmepe, ịchacha na mgbasa. N'ime usoro ndị a, a na-eji ihe ngwọta organic (dịka isopropyl alcohol) ehicha elu wafer ahụ, gas mkpofu nke volatilization na-emepụta bụkwa otu n'ime isi iyi nke gas mkpofu organic;
N'otu oge ahụ, onye na-ahụ maka fotoresis (photoresist) nke e ji eme fotolithography na etching nwere ihe mgbaze organic na-agbanwe agbanwe, dị ka butyl acetate, nke na-agbanwe n'ime ikuku n'oge usoro nhazi wafer, nke bụ isi iyi ọzọ nke gas mkpofu organic.
3. Gas mkpofu na-egbu egbu:
Gas mkpofu na-egbu egbu na-esikarị na usoro dịka kristal epitaxy, akọrọ etching na CVD. N'ime usoro ndị a, a na-eji ọtụtụ gas pụrụ iche dị ọcha nke ukwuu eme ihe iji hazie wafer ahụ, dịka silicon (SiHj), phosphorus (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, wdg. Ụfọdụ gas pụrụ iche na-egbu egbu, na-eme ka mmadụ ghara iku ume ma na-emebi emebi.
N'otu oge ahụ, n'ime usoro nkụ na nhicha mgbe e tinyere uzuoku kemịkalụ na mmepụta semiconductor, a chọrọ nnukwu gas oxide (PFCS) zuru oke, dịka NFS, C2F&CR, C3FS, CHF3, SF6, wdg. Ihe ndị a na-eme ka perfluorin dị nro nwere ike ịmịkọrọ ike na mpaghara ọkụ infrared ma na-anọ n'ikuku ruo ogologo oge. A na-ewere ha dị ka isi iyi nke mmetụta griinhaus zuru ụwa ọnụ.
4. Usoro nkwakọ ngwaahịa gas mkpofu:
Ma e jiri ya tụnyere usoro mmepụta semiconductor, gas mkpofu nke usoro nkwakọ ngwaahịa semiconductor na-emepụta dị mfe, ọkachasị gas acidic, epoxy resin na uzuzu.
A na-emepụta gas mkpofu acidic karịsịa na usoro dịka electroplating;
A na-emepụta gas mkpofu achịcha n'oge a na-eme achịcha mgbe ejiri ihe e ji eme achịcha ma mechie ya;
Igwe a na-eji mbepụ ihe na-emepụta gas mkpofu nke nwere ájá silikọn n'oge a na-eji mbepụ ihe.
Nsogbu mmetọ gburugburu ebe obibi
Maka nsogbu mmetọ gburugburu ebe obibi na ụlọ ọrụ semiconductor, nsogbu ndị bụ isi a ga-edozi bụ:
· Mwepụ buru ibu nke ihe ndị na-emetọ ikuku na ihe ndị na-emepụta ihe ndị na-agbanwe agbanwe (VOCs) na usoro fotolithography;
· Mwepụ nke ihe ndị a na-emepụta site na perfluorinated (PFCS) na usoro mwepụta nke uzuoku na plasma;
· Ojiji dị ukwuu nke ike na mmiri n'ime mmepụta na nchekwa nke ndị ọrụ;
· Imegharị ihe na nlekota mmetọ nke ihe ndị sitere na ngwaahịa;
· Nsogbu nke iji kemịkalụ dị ize ndụ na usoro nkwakọ ngwaahịa.
Mmepụta dị ọcha
Enwere ike imeziwanye teknụzụ mmepụta dị ọcha nke ngwaọrụ Semiconductor site na akụkụ nke ihe eji arụ ọrụ, usoro na njikwa usoro.
Imeziwanye ihe eji emepụta ihe na ike
Nke mbụ, a ga-achịkwa ịdị ọcha nke ihe ndị dị na ya nke ọma iji belata ntinye nke ihe ndị na-adịghị ọcha na ihe ndị na-adịghị mma.
Nke abụọ, a ga-eme ọtụtụ okpomọkụ, nchọpụta mmiri ozuzo, ịma jijiji, ujo eletriki dị elu na ule ndị ọzọ na ihe ndị na-abata ma ọ bụ ngwaahịa ndị emechara tupu e tinye ha n'ọrụ.
Tinyere nke ahụ, a ga-achịkwa ịdị ọcha nke ihe enyemaka nke ọma. E nwere ọtụtụ teknụzụ enwere ike iji mee ka ike dị ọcha.
Mee ka usoro mmepụta ka mma
Ụlọ ọrụ semiconductor n'onwe ya na-agba mbọ ibelata mmetụta ya na gburugburu ebe obibi site na mmezi teknụzụ usoro.
Dịka ọmụmaatụ, n'afọ 1970, a na-ejikarị ihe ndị na-agbaze ihe ndị sitere n'okike ehicha wafers na teknụzụ nhicha sekit agbakwunyere. N'afọ 1980, e ji ihe ngwọta acid na alkali dị ka sulfuric acid hichaa wafers. Ruo afọ 1990, e mepụtara teknụzụ nhicha oxygen plasma.
Maka nkwakọ ngwaahịa, ọtụtụ ụlọ ọrụ na-eji teknụzụ electroplating ugbu a, nke ga-akpata mmetọ ígwè dị arọ na gburugburu ebe obibi.
Agbanyeghị, ụlọ ọrụ nkwakọ ngwaahịa na Shanghai anaghịzi eji teknụzụ electroplating eme ihe, yabụ enweghị mmetụta nke ọla dị arọ na gburugburu ebe obibi. A pụrụ ịchọpụta na ụlọ ọrụ semiconductor na-ebelata mmetụta ya na gburugburu ebe obibi site na mmezi usoro na nnọchi kemịkalụ na usoro mmepe nke ha, nke na-esokwa usoro mmepe ụwa ugbu a nke ịkwado usoro na imepụta ngwaahịa dabere na gburugburu ebe obibi.
Ugbu a, a na-eme mmezi usoro mpaghara ndị ọzọ, gụnyere:
·Ịgbanwe na ibelata gas PFCS niile nke ammonium, dịka iji gas PFCs nwere obere mmetụta griinhaus iji dochie gas na nnukwu mmetụta griinhaus, dịka imeziwanye usoro na ibelata ọnụọgụ gas PFCS eji eme ihe n'usoro ahụ;
· Imeziwanye nhicha ọtụtụ wafer ka ọ bụrụ nhicha otu wafer iji belata ọnụọgụ kemịkalụ eji eme ihe n'usoro nhicha.
· Njikwa usoro siri ike:
a. Ghọta akpaaka nke usoro mmepụta ihe, nke nwere ike ime nhazi na mmepụta ogbe ziri ezi, ma belata oke njehie nke ọrụ aka;
b. Usoro dị ọcha nke ukwuu, ihe dị ka 5% ma ọ bụ ihe na-erughị nke mfu mkpụrụ na-akpata site na ndị mmadụ na gburugburu ebe obibi. Usoro dị ọcha nke ukwuu Ihe ndị metụtara gburugburu ebe obibi gụnyere ịdị ọcha ikuku, mmiri dị ọcha nke ukwuu, ikuku a na-akpọchi akpọchi, CO2, N2, okpomọkụ, iru mmiri, wdg. A na-atụkarị ọkwa ịdị ọcha nke ebe a na-arụ ọrụ dị ọcha site na ọnụọgụ kachasị nke ihe ndị a na-ekwe ka ọ bụrụ otu olu nke ikuku, ya bụ, mkpokọta ọnụọgụ nke ihe ndị a na-etinye;
c. Mee ka nchọpụta sie ike, ma họrọ isi ihe kwesịrị ekwesị maka nchọpụta n'ebe ọrụ ebe enwere nnukwu ihe mkpofu n'oge usoro mmepụta.
Nabata ndị ahịa ọ bụla si n'akụkụ ụwa niile ka ha bịa leta anyị maka mkparịta ụka ọzọ!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Oge ozi: Ọgọst-13-2024