Ko te nuinga o te hanga taputapu haurua-arataki ko ngā taputapu motuhake, ngā ara iahiko whakauru me ā rātou tukanga tākai.
Ka taea te wehewehe i te hanga hiko-haurua ki ngā wāhanga e toru: te hanga rauemi tinana hua, te hanga huapapate hanga me te huihuinga taputapu. I roto i ēnei, ko te parahanga tino kino ko te wāhanga hanga angiangi hua.
Ko te nuinga o ngā parahanga ka wehea ki te wai para, te para hau me te para totoka.
Te tukanga hanga maramara:
Wafer siliconi muri i te hurihanga o waho - te horoi - te waikura - te ātete ōrite - te whakaahua-ipurangi - te whanaketanga - te whakairo - te horapa, te whakatō katote - te whakatakotoranga kohu matū - te oro miihini matū - te whakarewa, me ētahi atu
Wai Para
He nui te wai para e puta mai ana i ia taahiraa tukanga o te hanga haurua-haurua me te whakamātautau takai, ko te nuinga ko te wai para waikawa-pūtake, te wai para kei roto he haukini me te wai para waro.
1. Para wai kei roto te pūhaumāota:
Ko te waikawa hauwaiwai te whakarewa matua e whakamahia ana i roto i ngā tukanga whakapūkara me te whakairo nā ōna āhuatanga whakapūkara me te waikura. Ko te wai para kei roto te hauwaiwai i roto i te tukanga ka ahu mai i te tukanga tohatoha me te tukanga whakakanapa matū i roto i te tukanga hanga maramara. I roto i te tukanga horoi o ngā papa silicon me ngā taputapu e pā ana, he maha ngā wā ka whakamahia te waikawa hauwaiwai. Ka oti ēnei tukanga katoa i roto i ngā tāke whakairo motuhake, i ngā taputapu horoi rānei, kia taea ai te tuku motuhake i te wai para kei roto te hauwaiwai. E ai ki te kukū, ka taea te wehewehe ki te wai para kei roto te hauwaiwai kukū teitei me te wai para kei roto te hauwaiwai kukū iti. I te nuinga o te wā, ka taea e te kukū o te wai para kei roto te hauwaiwai kukū teitei te eke ki te 100-1200 mg/L. Ko te nuinga o ngā kamupene ka hangarua i tēnei wāhanga o te wai para mō ngā tukanga kāore e hiahiatia he kounga wai teitei.
2. Para wai waikawa-pūtake:
Tata ki ngā tukanga katoa o te tukanga hanga ara iahiko whakauru me horoi te maramara. I tēnei wā, ko te waikawa whanariki me te hauwai waikura ngā wai horoi e whakamahia whānuitia ana i roto i te tukanga hanga ara iahiko whakauru. I taua wā anō, ka whakamahia hoki ngā matū waikawa-pūtake pērā i te waikawa hauota, te waikawa hauwaihauora me te wai haukini.
Ko te nuinga o ngā wai para waikawa-pūtake o te tukanga hangahanga i ahu mai i te tukanga horoi i roto i te tukanga hanga maramara. I roto i te tukanga takai, ka tukatukahia te maramara ki te otinga waikawa-pūtake i te wā e whakakikoruatia ana te hiko me te tātari matū. I muri i te maimoatanga, me horoi ki te wai parakore kia puta ai he wai para horoi waikawa-pūtake. Hei tāpiri, ka whakamahia hoki ngā matū waikawa-pūtake pēnei i te hauwai konutai me te waikawa hauwaihauora i roto i te teihana wai parakore hei whakaora i ngā kapia anion me te cation hei whakaputa i te wai para whakaora waikawa-pūtake. Ka puta hoki te wai hiku horoi i te wā e horoi ana i te hau para waikawa-pūtake. I roto i ngā kamupene hanga hiko whakauru, he tino nui te nui o te wai para waikawa-pūtake.
3. Para wai para:
Nā te rerekētanga o ngā tukanga whakaputa, he rerekē rawa te nui o ngā whakarewa waro e whakamahia ana i roto i te umanga haurua-ira. Heoi, hei kaihoroi, kei te whakamahia whānuitia tonutia ngā whakarewa waro i roto i ngā hononga hanga takai. Ka huri ētahi whakarewa hei tukunga waipara waro.
4. Ētahi atu wai para:
Ka whakamahia e te tukanga whakairo o te tukanga whakaputa haurua-ira te nui o te haukini, te wheowhio me te wai parakore hei purenga, ā, ka puta he rerenga waipara kei roto he haukini kukū teitei.
E hiahiatia ana te tukanga whakakikorua hiko i roto i te tukanga tākai haurua-ira. Me horoi te maramara i muri i te whakakikorua hiko, ā, ka puta he wai para horoi whakakikorua hiko i roto i tēnei tukanga. Nā te mea ka whakamahia ētahi konganuku ki te whakakikorua hiko, ka puta he tukunga katote konganuku i roto i te wai para horoi whakakikorua hiko, pērā i te mata, te tine, te kōpae, te konutea, te konumohe, me ētahi atu.
Hau para
Nā te mea he tino nui ngā whakaritenga mō te horoi o te rūma mahi i roto i te tukanga hau haurua-ira, ka whakamahia ngā pā hau hei tango i ngā momo hau para e puta ana i te wā o te tukanga. Nō reira, ko ngā tukunga hau para i roto i te umanga hau haurua-ira e tohuhia ana e te nui o te putanga hau me te iti o te kukū tukunga. Ko ngā tukunga hau para ka puta te nuinga o te wā.
Ka taea te wehewehe i ēnei tukunga hau para ki ngā wāhanga e whā: te hau waikawa, te hau kawakore, te hau para waro me te hau paitini.
1. Hau para waikawa-pūmua:
Ko te hau para waikawa-pūmua te nuinga e ahu mai ana i te horapa,CVD, CMP me ngā tukanga whakairo, e whakamahi ana i te otinga horoi waikawa-pūtake hei horoi i te papa.
I tēnei wā, ko te whakarewa horoi e whakamahia whānuitia ana i roto i te tukanga hanga haurua-haurua ko te ranunga o te hauwai peroxide me te waikawa whanariki.
Ko ngā hau para e puta mai ana i ēnei tukanga ko ngā hau waikawa pērā i te waikawa whanariki, te waikawa hauwaiwai, te waikawa hauwaimāota, te waikawa hauota me te waikawa phosphoric, ā, ko te hau kawakore he haukini te nuinga.
2. Hau para rauropi:
Ko te hau para rauropi e ahu mai ana i ngā tukanga pēnei i te whakaahua-ipurangi, te whanaketanga, te whakairo me te horapa. I roto i ēnei tukanga, ka whakamahia te otinga rauropi (pēnei i te waipiro isopropyl) hei horoi i te mata o te papa, ā, ko te hau para i puta mai i te whakakorikori ko tētahi o ngā pūtake o te hau para rauropi;
I taua wā anō, kei roto i te photoresist (photoresist) e whakamahia ana i roto i te tukanga whakaahua me te whakairo ngā whakarewa waro pūngoi, pērā i te butyl acetate, e pūngoi ana ki te āhuarangi i te wā e tukatukahia ana te wafer, he pūtake anō hoki tēnei o te hau para waro.
3. Hau para paitini:
Ko te nuinga o ngā hau para paitini ka ahu mai i ngā tukanga pēnei i te epitaxy tioata, te whakairo maroke me te CVD. I roto i ēnei tukanga, ka whakamahia he momo hau motuhake parakore teitei hei tukatuka i te wafer, pēnei i te silicon (SiHj), te phosphorus (PH3), te carbon tetrachloride (CFJ), te borane, te boron trioxide, me ētahi atu. Ko ētahi hau motuhake he paitini, he whakamomori, he waikura.
I taua wā anō, i roto i te tukanga whakairo maroke me te horoi i muri i te whakatakotoranga kohu matū i roto i te hanga haurua-ā-ira, e hiahiatia ana he nui o te hau waikura katoa (PFCS), pērā i te NFS, C2F&CR, C3FS, CHF3, SF6, me ētahi atu. He kaha te mimiti o ēnei matū kua whakakīia ki te waikura i roto i te rohe mārama whero-whero, ā, ka noho roa ki te āhuarangi. E kiia ana ko rātou te pūtake matua o te pānga kati kōtuhi o te ao.
4. Te tukanga tākai hau para:
Ki te whakatauritea ki te tukanga hanga hau haurua-ira, he tino māmā noa iho te hau para e puta mai ana i te tukanga takai haurua-ira, ko te nuinga he hau waikawa, he kapia epoxy me te puehu.
Ko te nuinga o te wā ka puta te hau para waikawa i roto i ngā tukanga pēnei i te whakakikorua hiko;
Ka puta te hau para tunu i roto i te tukanga tunu i muri i te whakapiri me te hiri o te hua;
Ka whakaputahia e te mīhini tapatapahi he hau para kei roto ko te puehu silicon iti i te wā e tapahi ana i te papa angiangi.
Ngā raruraru parahanga taiao
Mō ngā raruraru parahanga taiao i roto i te umanga haurua-ira, ko ngā raruraru matua me whakatau ko:
· Te tukunga nui o ngā poke hau me ngā matū waro pūngāwerewere (VOC) i roto i te tukanga whakaahua-whakaahua;
· Te tukunga o ngā matū kua whakapūkaratia ki te waikura (PFCS) i roto i ngā tukanga whakairo plasma me te whakatakoto kohu matū;
· Te whakapaunga nui o te pūngao me te wai i roto i te mahi whakaputa me te tiakitanga haumaru o ngā kaimahi;
· Te hangarua me te aroturuki i te parahanga o ngā hua taha;
· Ngā raruraru o te whakamahi i ngā matū morearea i roto i ngā tukanga tākai.
Te whakaputanga ma
Ka taea te whakapai ake i te hangarau whakaputa ma o ngā taputapu haurua-arahi mai i ngā āhuatanga o ngā rauemi mata, ngā tukanga me te whakahaere tukanga.
Te whakapai ake i ngā rauemi mata me te pūngao
Tuatahi, me tino whakahaere te parakore o ngā rauemi kia iti ai te whakaurunga mai o ngā poke me ngā matūriki.
Tuarua, me whakahaere ngā whakamātautau pāmahana, te kimi turuturu, te wiri, te ru hiko teitei me ētahi atu whakamātautau ki ngā wāhanga e haere mai ana, ki ngā hua haurua-oti rānei i mua i te whakaurunga ki te hanga.
Hei tāpiritanga, me tino aro turuki te parakore o ngā rauemi āwhina. He maha ngā hangarau ka taea te whakamahi hei whakaputa pūngao ma.
Arotauhia te tukanga whakaputa
E whai ana te umanga haurua-waea ki te whakaiti i tōna pānga ki te taiao mā te whakapai ake i ngā hangarau tukanga.
Hei tauira, i ngā tau 1970, ko ngā whakarewa waro te nuinga o te wā i whakamahia hei horoi i ngā papa i roto i te hangarau horoi ara iahiko whakauru. I ngā tau 1980, i whakamahia ngā otinga waikawa me te kawakore pērā i te waikawa whanariki hei horoi i ngā papa. Tae noa ki ngā tau 1990, i whakawhanakehia te hangarau horoi hāora plasma.
Mō ngā takai, ko te nuinga o ngā kamupene e whakamahi ana i te hangarau whakakikorua hiko, ka pāngia te taiao e te parahanga konganuku taumaha.
Heoi, kāore ngā whare tākai i Shanghai e whakamahi ana i te hangarau whakakikorua hiko, nō reira kāore he pānga o ngā konganuku taumaha ki te taiao. Ka kitea kei te whakaiti haere te umanga haurua-ira i tōna pānga ki te taiao mā te whakapai ake i ngā tukanga me te whakakapinga matū i roto i tana ake tukanga whanaketanga, e whai ana hoki i te ia whanaketanga o te ao o nāianei o te tautoko i te hoahoa tukanga me te hua e ahu mai ana i te taiao.
I tēnei wā, kei te whakahaerehia ētahi atu whakapainga tukanga ā-rohe, tae atu ki:
·Te whakakapinga me te whakaiti i te hau PFCS haukini katoa, pērā i te whakamahi i te hau PFC he iti te pānga kati kōtuhi hei whakakapi i te hau he nui te pānga kati kōtuhi, pērā i te whakapai ake i te rere o te tukanga me te whakaiti i te nui o te hau PFCS e whakamahia ana i roto i te tukanga;
·Te whakapai ake i te horoinga o te angaanga maha ki te horoinga o te angaanga kotahi hei whakaiti i te nui o ngā matū horoi e whakamahia ana i roto i te tukanga horoi.
·Te whakahaere tukanga tino pakari:
a. Te whakatinana i te aunoatanga o te tukanga hangahanga, ka taea ai te whakatutuki i te tukatuka tika me te whakaputa puranga, me te whakaiti i te tere hapa nui o te mahi ā-ringa;
b. Ngā āhuatanga taiao o te tukanga tino ma, tata ki te 5%, iti iho rānei, o te ngaronga hua ka puta mai i te tangata me te taiao. Ko ngā āhuatanga taiao o te tukanga tino ma ko te ma o te hau, te wai tino parakore, te hau kōpeke, te CO2, te N2, te pāmahana, te haumākū, me ētahi atu. Ko te taumata ma o te awheawhe ma ka inehia i te nuinga o te wā mā te maha o ngā matūriki e whakaaetia ana mō ia wae rōrahi o te hau, arā, te kukū o te maha o ngā matūriki;
c. Whakakaha ake i te kimi, me te whiriwhiri i ngā wāhi matua e tika ana mō te kimi i ngā teihana mahi he nui ngā para i te wā o te tukanga whakaputa.
Nau mai haere mai ki te toro mai ki a mātou mō ētahi atu kōrerorero, mai i ngā kiritaki katoa o te ao!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Wā tuku: 13 o Ākuhata 2024