Ukukhiqizwa kwamadivayisi e-semiconductor kuhlanganisa kakhulu amadivayisi ahlukene, amasekethe ahlanganisiwe kanye nezinqubo zawo zokupakisha.
Ukukhiqizwa kwe-semiconductor kungahlukaniswa ngezigaba ezintathu: ukukhiqizwa kwezinto zomzimba womkhiqizo, umkhiqizoi-waferukukhiqiza kanye nokuhlanganiswa kwamadivayisi. Phakathi kwazo, ukungcola okukhulu kakhulu yisigaba sokukhiqiza i-wafer yomkhiqizo.
Izinto ezingcolisayo zihlukaniswe kakhulu ngamanzi angcolile, igesi engcolile kanye nemfucuza eqinile.
Inqubo yokukhiqiza ama-chip:
I-silicon waferngemva kokugaya kwangaphandle - ukuhlanza - i-oxidation - ukumelana okufanayo - i-photolithography - ukuthuthukiswa - ukuqopha - ukusabalala, ukufakwa kwe-ion - ukufakwa komusi wamakhemikhali - ukupholisha ngomshini wamakhemikhali - ukwenziwa kwensimbi, njll.
Amanzi angcolile
Inani elikhulu lamanzi amdaka liyakhiqizwa esigabeni ngasinye senqubo yokukhiqiza nokuhlola ukupakisha kwe-semiconductor, ikakhulukazi amanzi amdaka asekelwe ku-acid, amanzi amdaka aqukethe i-ammonia kanye namanzi amdaka e-organic.
1. Amanzi angcolile aqukethe i-fluorine:
I-Hydrofluoric acid iba yisithako esiyinhloko esisetshenziswa ezinqubweni ze-oxidation kanye ne-etching ngenxa yezakhiwo zayo ze-oxidizing kanye ne-corrosive. Amanzi angcolile aqukethe i-fluorine kule nqubo avela kakhulu enqubweni yokusabalalisa kanye nenqubo yokupholisha yamakhemikhali enqubweni yokukhiqiza ama-chip. Enqubweni yokuhlanza ama-silicon wafers nezitsha ezihlobene, i-hydrochloric acid nayo isetshenziswa izikhathi eziningi. Zonke lezi zinqubo ziqedwa emathangini akhethekile e-etching noma emishinini yokuhlanza, ngakho-ke amanzi angcolile aqukethe i-fluorine angakhishwa ngokuzimela. Ngokusho kokuhlushwa, ingahlukaniswa ibe ngamanzi angcolile aqukethe i-fluorine amaningi kanye namanzi angcolile aqukethe i-ammonia aphansi. Ngokuvamile, ukuhlushwa kwamanzi angcolile aqukethe i-ammonia amaningi kungafinyelela ku-100-1200 mg/L. Izinkampani eziningi ziphinda zisebenzise le ngxenye yamanzi angcolile ngezinqubo ezingadingi ikhwalithi ephezulu yamanzi.
2. Amanzi angcolile ane-asidi:
Cishe yonke inqubo enqubweni yokukhiqiza isekethe ehlanganisiwe idinga ukuthi i-chip ihlanzwe. Njengamanje, i-sulfuric acid kanye ne-hydrogen peroxide yizona ketshezi zokuhlanza ezisetshenziswa kakhulu enqubweni yokukhiqiza isekethe ehlanganisiwe. Ngesikhathi esifanayo, ama-reagent e-acid-base njenge-nitric acid, i-hydrochloric acid kanye namanzi e-ammonia nawo ayasetshenziswa.
Amanzi angcolile e-acid-base enqubo yokukhiqiza atholakala kakhulu enkambisweni yokuhlanza enkambisweni yokukhiqiza ama-chip. Enkambisweni yokupakisha, i-chip iphathwa ngesisombululo se-acid-base ngesikhathi sokufaka i-electroplating kanye nokuhlaziywa kwamakhemikhali. Ngemva kokwelashwa, idinga ukugezwa ngamanzi ahlanzekile ukuze ikhiqize amanzi angcolile okugeza asekelwe ku-acid. Ngaphezu kwalokho, ama-reagent e-acid-base njenge-sodium hydroxide kanye ne-hydrochloric acid nawo asetshenziswa esiteshini samanzi ahlanzekile ukuze kuphinde kukhiqizwe ama-anion nama-cation resins ukuze kukhiqizwe amanzi angcolile okuvuseleleka kwe-acid-base. Amanzi omsila wokuwasha nawo akhiqizwa ngesikhathi senqubo yokuwasha igesi yemfucuza ye-acid-base. Ezinkampanini zokukhiqiza isekethe ezihlanganisiwe, inani lamanzi angcolile esisekelo se-acid likhulu kakhulu.
3. Amanzi angcolile emvelo:
Ngenxa yezinqubo ezahlukene zokukhiqiza, inani lezinyibilikisi eziphilayo ezisetshenziswa embonini ye-semiconductor lihlukile kakhulu. Kodwa-ke, njengezithako zokuhlanza, izinyibilikisi eziphilayo zisasetshenziswa kabanzi ekuxhumaneni okuhlukahlukene kokupakisha kokukhiqiza. Ezinye izinyibilikisi ziba ukukhishwa kwamanzi angcolile emvelo.
4. Amanye amanzi angcolile:
Inqubo yokuqopha yenqubo yokukhiqiza i-semiconductor izosebenzisa inani elikhulu le-ammonia, i-fluorine kanye namanzi ahlanzekile kakhulu ukuhlanza ukungcola, ngaleyo ndlela ikhiqize ukukhishwa kwamanzi amdaka aqukethe i-ammonia eningi.
Inqubo yokufaka i-electroplating iyadingeka enqubweni yokufaka i-semiconductor. I-chip idinga ukuhlanzwa ngemva kokufaka i-electroplating, futhi amanzi angcolile okuhlanza i-electroplating azokhiqizwa kule nqubo. Njengoba ezinye izinsimbi zisetshenziswa ekufakeni i-electroplating, kuzoba nokukhishwa kwama-ion ensimbi emanzini angcolile okuhlanza i-electroplating, njenge-lead, i-tin, i-disc, i-zinc, i-aluminium, njll.
Igesi engcolile
Njengoba inqubo ye-semiconductor inezidingo eziphakeme kakhulu zokuhlanzeka kwegumbi lokuhlinza, amafeni avame ukusetshenziselwa ukukhipha izinhlobo ezahlukene zamagesi angcolile aguquguquka phakathi nenqubo. Ngakho-ke, ukukhishwa kwegesi engcolile embonini ye-semiconductor kubonakala ngomthamo omkhulu wokukhipha kanye nokugcwala okuphansi kokukhishwa. Ukukhishwa kwegesi engcolile nakho kuguquguquka kakhulu.
Lokhu kukhishwa kwegesi engcolile kungahlukaniswa kakhulu ngezigaba ezine: igesi ene-asidi, igesi ene-alkaline, igesi engcolile yemvelo kanye negesi enobuthi.
1. Igesi engcolile eyisisekelo se-asidi:
Igesi engcolile eyisisekelo se-asidi ivela kakhulu ekusakazweni,I-CVD, i-CMP kanye nezinqubo zokuqopha, ezisebenzisa isisombululo sokuhlanza esisekelwe ku-acid ukuhlanza i-wafer.
Njengamanje, isinyibilikisi sokuhlanza esisetshenziswa kakhulu enkambisweni yokukhiqiza i-semiconductor yingxube ye-hydrogen peroxide ne-sulfuric acid.
Igesi engcolile ekhiqizwa kulezi zinqubo ihlanganisa amagesi ane-asidi njenge-sulfuric acid, i-hydrofluoric acid, i-hydrochloric acid, i-nitric acid kanye ne-phosphoric acid, kanti igesi ye-alkaline ngokuyinhloko i-ammonia.
2. Igesi engcolile yemvelo:
Igesi engcolile yezinto eziphilayo ivela kakhulu ezinqubweni ezifana ne-photolithography, ukuthuthukiswa, ukuqoshwa kanye nokusabalalisa. Kulezi zinqubo, isixazululo sezinto eziphilayo (njenge-isopropyl alcohol) sisetshenziselwa ukuhlanza ubuso be-wafer, kanti igesi engcolile ekhiqizwa yi-volatilization ingenye yemithombo yegesi engcolile yezinto eziphilayo;
Ngesikhathi esifanayo, i-photoresist (i-photoresist) esetshenziswa enkambisweni ye-photolithography kanye ne-etching iqukethe izinyibilikisi eziphilayo eziguquguqukayo, njenge-butyl acetate, eguquguqukayo emkhathini ngesikhathi senqubo yokucubungula i-wafer, okungomunye umthombo wegesi engcolile yezinto eziphilayo.
3. Igesi engcolile enobuthi:
Igesi engcolile enobuthi ivela kakhulu ezinqubweni ezifana ne-crystal epitaxy, i-dry etching kanye ne-CVD. Kulezi zinqubo, kusetshenziswa izinhlobo ezahlukene zamagesi akhethekile ahlanzekile kakhulu ukucubungula i-wafer, njenge-silicon (SiHj), i-phosphorus (PH3), i-carbon tetrachloride (CFJ), i-borane, i-boron trioxide, njll. Amanye amagesi akhethekile anobuthi, ayakhipha umoya futhi ayabola.
Ngesikhathi esifanayo, enkambisweni yokomisa nokuhlanza ngemva kokufakwa komhwamuko wamakhemikhali ekukhiqizweni kwe-semiconductor, kudingeka inani elikhulu legesi egcwele i-oxide (PFCS), njenge-NFS, C2F&CR, C3FS, CHF3, SF6, njll. Lawa ma-compound afakwe i-perfluorine anomuncwa oqinile esifundeni sokukhanya kwe-infrared futhi ahlala emkhathini isikhathi eside. Ngokuvamile abhekwa njengomthombo oyinhloko womphumela wokushisa komhlaba wonke.
4. Inqubo yokupakisha igesi engcolile:
Uma kuqhathaniswa nenqubo yokukhiqiza i-semiconductor, igesi engcolile ekhiqizwa yinqubo yokupakisha i-semiconductor ilula kakhulu, ikakhulukazi igesi ene-acidic, i-epoxy resin kanye nothuli.
Igesi engcolile ene-asidi ikhiqizwa kakhulu ezinqubweni ezifana nokufaka i-electroplating;
Igesi yokubhaka ikhiqizwa enkambisweni yokubhaka ngemva kokunamathisela nokuvala umkhiqizo;
Umshini wokusika ukhiqiza igesi engcolile equkethe uthuli lwe-silicon oluncane ngesikhathi senqubo yokusika i-wafer.
Izinkinga zokungcoliswa kwemvelo
Ngezinkinga zokungcoliswa kwemvelo embonini ye-semiconductor, izinkinga eziyinhloko okudingeka zixazululwe yilezi:
· Ukukhishwa okukhulu kokungcola komoya kanye nama-volatile organic compounds (ama-VOC) enqubweni ye-photolithography;
· Ukukhishwa kwamakhemikhali afakwe i-perfluorinated (PFCS) ezinqubweni zokuqopha i-plasma kanye nokufakwa komphunga wamakhemikhali;
· Ukusetshenziswa kwamandla namanzi ngezinga elikhulu ekukhiqizeni nasekuvikeleni abasebenzi ngokuphepha;
· Ukuqapha ukuphinda kusetshenziswe kanye nokungcola kwemikhiqizo engaphansi kwayo;
· Izinkinga zokusebenzisa amakhemikhali ayingozi ezinqubweni zokupakisha.
Ukukhiqizwa okuhlanzekile
Ubuchwepheshe bokukhiqiza okuhlanzekile kwedivayisi ye-semiconductor bungathuthukiswa kusukela ezintweni zokusetshenziswa, izinqubo kanye nokulawulwa kwezinqubo.
Ukuthuthukisa izinto zokusetshenziswa kanye namandla
Okokuqala, ubumsulwa bezinto kufanele bulawulwe ngokuqinile ukuze kuncishiswe ukungeniswa kokungcola nezinhlayiya.
Okwesibili, amazinga okushisa ahlukahlukene, ukutholwa kokuvuza, ukudlidliza, ukushaqeka kukagesi okunamandla aphezulu kanye nokunye ukuhlolwa kufanele kwenziwe ezingxenyeni ezingenayo noma emikhiqizweni eqediwe kancane ngaphambi kokuba ikhiqizwe.
Ngaphezu kwalokho, ubumsulwa bezinto ezisizayo kufanele bulawulwe ngokuqinile. Kunezindlela eziningi zobuchwepheshe ezingasetshenziswa ekukhiqizeni amandla ngendlela ehlanzekile.
Lungiselela inqubo yokukhiqiza
Imboni ye-semiconductor ngokwayo ilwela ukunciphisa umthelela wayo emvelweni ngokuthuthukisa ubuchwepheshe bezinqubo.
Isibonelo, ngawo-1970, izinyibilikisi eziphilayo zazisetshenziswa kakhulu ukuhlanza ama-wafer kubuchwepheshe bokuhlanza obuhlanganisiwe besifunda. Ngawo-1980, izixazululo ze-asidi ne-alkali ezifana ne-sulfuric acid zazisetshenziswa ukuhlanza ama-wafer. Kuze kube ngawo-1990, ubuchwepheshe bokuhlanza umoya-mpilo we-plasma bathuthukiswa.
Ngokuphathelene nokupakisha, izinkampani eziningi okwamanje zisebenzisa ubuchwepheshe be-electroplating, obuzobangela ukungcola kwensimbi esindayo emvelweni.
Kodwa-ke, izimboni zokupakisha eShanghai azisasebenzisi ubuchwepheshe be-electroplating, ngakho-ke akukho mthelela wezinsimbi ezisindayo emvelweni. Kungatholakala ukuthi imboni ye-semiconductor inciphisa kancane kancane umthelela wayo emvelweni ngokuthuthukisa izinqubo kanye nokushintshaniswa kwamakhemikhali enqubweni yayo yokuthuthukiswa, okulandela futhi umkhuba wamanje wokuthuthukiswa komhlaba wonke wokukhuthaza inqubo kanye nomklamo womkhiqizo ngokusekelwe emvelweni.
Njengamanje, kwenziwa ukuthuthukiswa kwenqubo yendawo okwengeziwe, okuhlanganisa:
·Ukufakwa esikhundleni kanye nokunciphisa igesi ye-all-ammonium PFCS, njengokusebenzisa igesi ye-PFCs enomphumela ophansi wokushisa ukuze ithathe indawo yegesi enomphumela ophezulu wokushisa, njengokuthuthukisa ukugeleza kwenqubo kanye nokunciphisa inani legesi ye-PFCS esetshenziswa kule nqubo;
·Ukuthuthukisa ukuhlanzwa kwama-wafer amaningi kuya ekuhlanzweni kwama-wafer owodwa ukuze kuncishiswe inani lama-agent okuhlanza amakhemikhali asetshenziswa enkambisweni yokuhlanza.
·Ukulawulwa kwenqubo okuqinile:
a. Ukuqonda ukuzenzekela kwenqubo yokukhiqiza, okungafeza ukucutshungulwa okunembile kanye nokukhiqizwa kweqembu, futhi kunciphise izinga eliphezulu lamaphutha okusebenza ngesandla;
b. Izici zemvelo zenqubo ehlanzekile kakhulu, cishe u-5% noma ngaphansi kokulahlekelwa kwesivuno kubangelwa abantu kanye nemvelo. Izici zemvelo zenqubo ehlanzekile kakhulu zifaka phakathi ukuhlanzeka komoya, amanzi ahlanzekile kakhulu, umoya ocindezelwe, i-CO2, i-N2, izinga lokushisa, umswakama, njll. Izinga lokuhlanzeka kwe-workshop ehlanzekile livame ukulinganiswa ngenani elikhulu lezinhlayiya ezivunyelwe ngeyunithi ngayinye yomoya, okungukuthi, ukuhlushwa kwenani lezinhlayiya;
c. Qinisa ukutholwa, bese ukhetha amaphuzu abalulekile afanele okutholwa ezindaweni zokusebenza ezinenqwaba yemfucuza ngesikhathi senqubo yokukhiqiza.
Yamukela noma yimaphi amakhasimende avela emhlabeni wonke ukuthi asivakashele ukuze sixoxe kabanzi!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Isikhathi sokuthunyelwe: Agasti-13-2024