Tlhahiso ea lisebelisoa tsa semiconductor e kenyelletsa haholo-holo lisebelisoa tse arohaneng, lipotoloho tse kopantsoeng le lits'ebetso tsa tsona tsa ho paka.
Tlhahiso ea semiconductor e ka aroloa ka mekhahlelo e meraro: tlhahiso ea thepa ea 'mele oa sehlahisoa, sehlahisoasejana sa bohobetlhahiso le kopano ea lisebelisoa. Har'a tsona, tšilafalo e tebileng ka ho fetisisa ke mohato oa tlhahiso ea wafer ea lihlahisoa.
Lintho tse silafatsang li arotsoe haholo-holo ka metsi a litšila, khase e litšila le litšila tse tiileng.
Mokhoa oa tlhahiso ea chip:
Sejana sa siliconkamora ho sila ka ntle - ho hlwekisa - ho oxidation - ho hanyetsa ka tsela e ts'oanang - photolithography - nts'etsopele - ho fata - ho hasanya, ho kenya li-ion - ho beha mouoane oa lik'hemik'hale - ho bentša ka mechine ea lik'hemik'hale - ho etsa tšepe, jj.
Metsi a litšila
Palo e kholo ea metsi a litšila e hlahisoa mohatong o mong le o mong oa ts'ebetso ea tlhahiso ea semiconductor le liteko tsa ho paka, haholo-holo metsi a litšila a thehiloeng ho asiti, metsi a litšila a nang le ammonia le metsi a litšila a tlhaho.
1. Metsi a litšila a nang le fluorine:
Asiti ea hydrofluoric e fetoha tharollo e ka sehloohong e sebelisoang lits'ebetsong tsa oxidation le etching ka lebaka la thepa ea eona ea oxidizing le e senyang. Metsi a litšila a nang le fluorine ts'ebetsong a tsoa haholo-holo ts'ebetsong ea ho hasana le ts'ebetsong ea ho bentša ka mechine ea lik'hemik'hale ts'ebetsong ea tlhahiso ea chip. Ts'ebetsong ea ho hloekisa li-wafer tsa silicon le lisebelisoa tse amanang le tsona, hydrochloric acid le eona e sebelisoa ka makhetlo a mangata. Ts'ebetso tsena kaofela li phethoa ka litanka tse inehetseng tsa ho betla kapa lisebelisoa tsa ho hloekisa, kahoo metsi a litšila a nang le fluorine a ka ntšoa ka boikemelo. Ho ea ka mahloriso, a ka aroloa ka metsi a litšila a nang le fluorine a nang le mahloriso a mangata le metsi a litšila a nang le ammonia a nang le mahloriso a tlase. Ka kakaretso, mahloriso a metsi a litšila a nang le ammonia a nang le mahloriso a mangata a ka fihla ho 100-1200 mg/L. Lik'hamphani tse ngata li sebelisa hape karolo ena ea metsi a litšila bakeng sa lits'ebetso tse sa hlokeng boleng bo phahameng ba metsi.
2. Metsi a litšila a thehiloeng ho asiti:
Hoo e ka bang ts'ebetso e 'ngoe le e 'ngoe ts'ebetsong ea tlhahiso ea potoloho e kopaneng e hloka hore chip e hloekisoe. Hona joale, asiti ea sulfuric le hydrogen peroxide ke maro a ho hloekisa a sebelisoang haholo ts'ebetsong ea tlhahiso ea potoloho e kopaneng. Ka nako e ts'oanang, li-reagent tse thehiloeng ho asiti tse kang nitric acid, hydrochloric acid le metsi a ammonia le tsona lia sebelisoa.
Metsi a litšila a motheo oa asiti a ts'ebetsong ea tlhahiso haholo-holo a tsoa ts'ebetsong ea ho hloekisa ts'ebetsong ea tlhahiso ea li-chip. Ts'ebetsong ea ho paka, chip e phekoloa ka tharollo ea motheo oa asiti nakong ea ho penta ka motlakase le tlhahlobo ea lik'hemik'hale. Kamora kalafo, e hloka ho hlatsuoa ka metsi a hloekileng ho hlahisa metsi a litšila a hlatsoang motheo oa asiti. Ho phaella moo, li-reagent tsa motheo oa asiti tse kang sodium hydroxide le hydrochloric acid le tsona li sebelisoa seteisheneng sa metsi a hloekileng ho nchafatsa li-anion le li-cation resins ho hlahisa metsi a litšila a tsosolositsoeng motheong oa asiti. Metsi a mohatla a hlatsoang le 'ona a hlahisoa nakong ea ts'ebetso ea ho hlatsoa khase ea litšila tsa motheo oa asiti. Lik'hamphaning tse kopaneng tsa tlhahiso ea potoloho, bongata ba metsi a litšila a motheo oa asiti bo boholo haholo.
3. Metsi a litšila a tlhaho:
Ka lebaka la mekhoa e fapaneng ea tlhahiso, palo ea litharollo tsa tlhaho tse sebelisoang indastering ea semiconductor e fapane haholo. Leha ho le joalo, joalo ka lisebelisoa tsa ho hloekisa, litharollo tsa tlhaho li ntse li sebelisoa haholo lihokelong tse fapaneng tsa liphutheloana tsa tlhahiso. Litharollo tse ling li fetoha metsi a litšila a tlhaho.
4. Metsi a mang a litšila:
Ts'ebetso ea ho hlaba ea ts'ebetso ea tlhahiso ea semiconductor e tla sebelisa ammonia e ngata, fluorine le metsi a hloekileng haholo bakeng sa ho tlosa litšila, ka hona e hlahisa metsi a litšila a nang le ammonia a nang le mahloriso a mangata.
Ts'ebetso ea ho polata ka motlakase ea hlokahala ts'ebetsong ea ho paka ea semiconductor. Chip e hloka ho hloekisoa kamora ho polata ka motlakase, 'me metsi a litšila a ho hloekisa ka motlakase a tla hlahisoa ts'ebetsong ena. Kaha litšepe tse ling li sebelisoa ho polata ka motlakase, ho tla ba le mesi ea li-ion tsa tšepe metsing a litšila a ho hloekisa ka motlakase, joalo ka loto, tin, disc, zinc, aluminium, jj.
Khase e litšila
Kaha ts'ebetso ea semiconductor e na le litlhoko tse phahameng haholo bakeng sa bohloeki ba kamore ea ts'ebetso, hangata lifene li sebelisoa ho ntša mefuta e fapaneng ea likhase tse litšila tse feto-fetohang nakong ea ts'ebetso. Ka hona, likhase tse litšila tse hlahisoang indastering ea semiconductor li khetholloa ka bongata bo boholo ba mosi o tsoang le bongata bo tlase ba mosi o tsoang. Mosi o tsoang khase e litšila le oona o feto-fetoha haholo.
Mesi ena e ntšang khase e litšila e ka aroloa haholo-holo ka mekhahlelo e mene: khase e nang le asiti, khase ea alkaline, khase ea litšila tsa tlhaho le khase e chefo.
1. Khase e silafetseng e thehiloeng ho asiti:
Khase e silafetseng e thehiloeng ho asiti e hlaha haholo-holo ka lebaka la ho hasana ha eona,CVD, CMP le mekhoa ea ho hlaba, e sebelisang tharollo ea ho hloekisa ea motheo oa asiti ho hloekisa wafer.
Hona joale, tharollo e sebelisoang haholo ea ho hloekisa ts'ebetsong ea tlhahiso ea semiconductor ke motsoako oa hydrogen peroxide le sulfuric acid.
Khase e lahloang e hlahisoang lits'ebetsong tsena e kenyelletsa likhase tse nang le asiti tse kang sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid le phosphoric acid, 'me khase ea alkaline haholo-holo ke ammonia.
2. Khase e silafetseng ea lintho tse phelang:
Khase ea litšila tsa tlhaho e tsoa haholo-holo lits'ebetsong tse kang photolithography, nts'etsopele, ho hlaba le ho hasana. Ts'ebetsong tsena, tharollo ea tlhaho (joalo ka isopropyl alcohol) e sebelisoa ho hloekisa bokaholimo ba wafer, 'me khase ea litšila e hlahisoang ke ho fetoha ha mocheso ke e 'ngoe ea mehloli ea khase ea litšila tsa tlhaho;
Ka nako e ts'oanang, photoresist (photoresist) e sebelisoang ts'ebetsong ea photolithography le etching e na le li-solvents tse feto-fetohang tsa organic, tse kang butyl acetate, e fetohang sepakapakeng nakong ea ts'ebetso ea ho sebetsana le wafer, e leng mohloli o mong oa khase ea litšila tsa organic.
3. Khase e chefo e se nang thuso:
Khase e nang le chefo e hlaha haholo-holo lits'ebetsong tse kang kristale epitaxy, dry etching le CVD. Ts'ebetsong tsena, mefuta e fapaneng ea likhase tse khethehileng tse hloekileng haholo li sebelisoa ho sebetsana le wafer, joalo ka silicon (SiHj), phosphorus (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, jj. Likhase tse ling tse khethehileng li na le chefo, lia khantša ebile lia senya.
Ka nako e ts'oanang, ts'ebetsong ea ho hlaba le ho hloekisa ka mor'a ho kenngoa ha mouoane oa lik'hemik'hale tlhahisong ea semiconductor, ho hlokahala khase e ngata ea oxide e felletseng (PFCS), joalo ka NFS, C2F&CR, C3FS, CHF3, SF6, jj. Metsoako ena e nang le perfluorine e na le monya o matla sebakeng sa leseli la infrared 'me e lula sepakapakeng nako e telele. Ka kakaretso e nkoa e le mohloli o ka sehloohong oa phello ea lefats'e ea ho futhumala ha lefatše.
4. Ts'ebetso ea ho paka litšila tsa khase:
Ha ho bapisoa le mokhoa oa tlhahiso ea semiconductor, khase e litšila e hlahisoang ke mokhoa oa ho paka oa semiconductor e bonolo haholo, haholo-holo khase e nang le asiti, resin ea epoxy le lerōle.
Khase e nang le asiti e hlahisoa haholo-holo lits'ebetsong tse kang ho betla ka motlakase;
Khase e silafetseng ea ho baka e hlahisoa nakong ea ho baka ka mor'a ho khomaretsa le ho tiisa sehlahisoa;
Mochini o sehang o hlahisa khase e senyehileng e nang le lerole la silicon e nyenyane nakong ea ts'ebetso ea ho seha wafer.
Mathata a tšilafalo ea tikoloho
Bakeng sa mathata a tšilafalo ea tikoloho indastering ea semiconductor, mathata a maholo a hlokang ho rarolloa ke:
· Ho ntšoa ha litšila tsa moea le metsoako ea lintho tse phelang e feto-fetohang (VOCs) ka bongata bo boholo ts'ebetsong ea photolithography;
· Ho ntšoa ha metsoako e nang le perfluorine (PFCS) lits'ebetsong tsa ho hlaba ka plasma le ho boloka mouoane ka lik'hemik'hale;
· Tšebeliso e kholo ea matla le metsi tlhahisong le tšireletsong ea polokeho ea basebetsi;
· Ho lekola ho sebelisoa hape le tšilafalo ea lihlahisoa tse ling;
· Mathata a ho sebelisa lik'hemik'hale tse kotsi lits'ebetsong tsa ho paka.
Tlhahiso e hloekileng
Theknoloji ea tlhahiso e hloekileng ea lisebelisoa tsa semiconductor e ka ntlafatsoa ho latela likarolo tsa thepa e tala, lits'ebetso le taolo ea ts'ebetso.
Ho ntlafatsa thepa e tala le matla
Taba ea pele, bohloeki ba thepa bo lokela ho laoloa ka thata ho fokotsa ho kenngoa ha litšila le likaroloana.
Taba ea bobeli, mocheso o fapaneng, ho lemoha ho dutla ha metsi, ho thothomela, ho tšoha ha motlakase ka motlakase o phahameng le liteko tse ling li lokela ho etsoa likarolong tse kenang kapa lihlahisoa tse seng li felile pele li kenngoa tlhahisong.
Ho phaella moo, bohloeki ba thepa e thusang bo lokela ho laolwa ka thata. Ho na le mahlale a mangata a ka sebediswang bakeng sa tlhahiso e hlwekileng ya eneji.
Ntlafatsa ts'ebetso ea tlhahiso
Indasteri ea li-semiconductor ka boeona e loanela ho fokotsa tšusumetso ea eona tikolohong ka ntlafatso ea theknoloji ea ts'ebetso.
Mohlala, lilemong tsa bo-1970, metsoako ea tlhaho e ne e sebelisoa haholo ho hloekisa li-wafer theknolojing e kopaneng ea ho hloekisa potoloho. Lilemong tsa bo-1980, litharollo tsa asiti le alkali tse kang sulfuric acid li ne li sebelisoa ho hloekisa li-wafer. Ho fihlela lilemong tsa bo-1990, theknoloji ea ho hloekisa oksijene ea plasma e ile ea ntlafatsoa.
Mabapi le ho paka, lik'hamphani tse ngata hona joale li sebelisa theknoloji ea electroplating, e tla baka tšilafalo ea tšepe e boima tikolohong.
Leha ho le jwalo, difeme tsa ho paka tsa Shanghai ha di sa sebedisa theknoloji ya electroplating, kahoo ha ho na tshusumetso ya ditshipi tse boima tikolohong. Ho ka fumanwa hore indasteri ya di-semiconductor e ntse e fokotsa tshusumetso ya yona tikolohong butle-butle ka ntlafatso ya tshebetso le ho nkela sebaka dikhemikhale tshebetsong ya yona ya ntshetsopele, e leng se latelang le mokgwa wa hajwale wa ntshetsopele ya lefatshe wa ho buella tshebetso le moralo wa dihlahiswa ho itshetlehile tikolohong.
Hona jwale, ho ntse ho etswa dintlafatso tse ding tsa tshebetso tsa lehae, ho kenyeletswa:
·Ho nkela sebaka le ho fokotsa khase ea ammonium PFCS kaofela sebaka, joalo ka ho sebelisa khase ea PFC e nang le phello e tlase ea mocheso ho nkela khase sebaka ka phello e phahameng ea mocheso, joalo ka ho ntlafatsa phallo ea ts'ebetso le ho fokotsa bongata ba khase ea PFCS e sebelisoang ts'ebetsong;
·Ho ntlafatsa tlhoekiso ea li-wafer tse ngata ho isa ho tlhoekiso ea li-wafer tse le 'ngoe ho fokotsa bongata ba lisebelisoa tsa ho hloekisa lik'hemik'hale tse sebelisoang ts'ebetsong ea ho hloekisa.
·Taolo e tiileng ea ts'ebetso:
a. Hlokomela boiketsetso ba ts'ebetso ea tlhahiso, e ka etsang hore ts'ebetso e nepahetseng le tlhahiso ea sehlopha e be teng, le ho fokotsa sekhahla se phahameng sa liphoso tsa ts'ebetso ea letsoho;
b. Mabaka a tikoloho a hlwekileng haholo, hoo e ka bang 5% kapa ka tlase ho moo ya tahlehelo ya chai e bakwa ke batho le tikoloho. Mabaka a tikoloho a hlwekileng haholo a kenyeletsa bohloeki ba moya, metsi a hlwekileng haholo, moya o hatelletsoeng, CO2, N2, mocheso, mongobo, jj. Boemo ba bohloeki ba workshop e hlwekileng hangata bo lekanngwa ka palo e hodimo ya dikarolwana tse dumelletsweng ka yuniti ya bophahamo ba moya, ke hore, palo ya dikarolwana e hodimo;
c. Matlafatsa ho lemoha, 'me u khethe lintlha tsa bohlokoa tse loketseng bakeng sa ho lemoha libakeng tsa mosebetsi tse nang le litšila tse ngata nakong ea ts'ebetso ea tlhahiso.
Amohela bareki ba tsoang lefats'eng lohle ho re etela bakeng sa puisano e 'ngoe!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nako ea poso: Phato-13-2024