Gukora ibikoresho bya semiconductor ahanini bikubiyemo ibikoresho bitandukanye, imiyoboro ihuriweho hamwe n'uburyo bwo gupakira.
Gukora ibikoresho bya semiconductor bishobora kugabanywamo ibice bitatu: gukora ibikoresho by'umusaruro, gukoraagace gatogukora no guteranya ibikoresho. Muri byo, umwanda ukomeye cyane ni icyiciro cyo gukora ibicuruzwa bya wafer.
Ibintu bihumanya ikirere bigabanyijemo amazi mabi, imyuka mibi n'imyanda ikomeye.
Uburyo bwo gukora chips:
Agatambaro ka silikoninyuma yo gusya inyuma - gusukura - oxidation - kurwanya kimwe - photolithography - iterambere - gusya - gukwirakwiza, gutera iyoni - gushyira umwuka muke w'ibinyabutabire - gusiga irangi rya shimi - gusiga irangi rya shimi - gukora metallization, nibindi.
Amazi y'imyanda
Muri buri ntambwe yo gukora no gupima amazi ya semiconductor, amazi yanduye menshi cyane cyane ashingiye kuri aside, amazi yanduye arimo amoniya n'amazi yanduye y’umwimerere.
1. Amazi mabi arimo fluorine:
Aside hydrofluoric iba umuti nyamukuru ukoreshwa mu bikorwa byo gusiga no gusya bitewe n’ubushobozi bwayo bwo gusya no kwangiza. Amazi yanduye arimo fluorine muri iki gikorwa ahanini aturuka mu gikorwa cyo gukwirakwiza no gusya hakoreshejwe imiti mu buryo bwa shimi mu gikorwa cyo gukora chips. Mu gikorwa cyo gusukura silicon wafers n'ibikoresho bifitanye isano, aside hydrochloric nayo ikoreshwa kenshi. Ibi bikorwa byose birangizwa mu bigega byabugenewe byo gusya cyangwa ibikoresho byo gusukura, bityo amazi yanduye arimo fluorine ashobora gusohoka ku giti cye. Dukurikije ingano yayo, ishobora kugabanywamo amazi yanduye arimo fluorine menshi n'amazi yanduye arimo ammonia make. Muri rusange, ingano y'amazi yanduye arimo ammonia menshi ishobora kugera kuri 100-1200 mg/L. Amasosiyete menshi asubiramo iki gice cy'amazi yanduye mu bikorwa bidasaba amazi meza.
2. Amazi yanduye ashingiye kuri aside:
Hafi ya buri gikorwa cyose mu gukora imiyoboro ivanze gisaba ko imashini isukurwa. Kuri ubu, aside sulfurike na peroxide ya hydrogen ni byo bikoreshwa cyane mu gukora imiyoboro ivanze. Muri icyo gihe, ibikoresho bikoresha aside nka aside nitrike, aside hydrochloric na aside ammonia nabyo birakoreshwa.
Amazi yanduye aside yo mu gikorwa cyo kuyakora aturuka ahanini mu gikorwa cyo gusukura mu gikorwa cyo gukora utubumbe. Mu gikorwa cyo gupakira, utubumbe dutunganywa n'amazi meza yo mu bwoko bwa aside mu gihe cyo gusiga irangi ry'amashanyarazi no gusesengura imiti. Nyuma yo kuyatunganya, agomba kozwa n'amazi meza kugira ngo hakorwe amazi yanduye yo mu bwoko bwa aside. Byongeye kandi, ibikoresho bitanga aside nka sodium hydroxide na aside hydrochloric nabyo bikoreshwa muri sitasiyo y'amazi meza kugira ngo hakorwe anion na cation resins kugira ngo hakorwe amazi yanduye yo mu bwoko bwa aside. Amazi yo mu bwoko bwa tail oza nayo akorwa mu gihe cyo gukaraba imyanda ya aside. Mu bigo bikora amashami ahuriweho, ingano y'amazi yanduye aside ni nini cyane.
3. Amazi y'imyanda y'umwimerere:
Bitewe n'uburyo butandukanye bwo gukora, ingano y'ibintu bisukura bikoreshwa mu nganda za semiconductor iratandukanye cyane. Ariko, nk'ibintu bisukura, ibintu bisukura biracyakoreshwa cyane mu buryo butandukanye bwo gupakira. Ibintu bimwe na bimwe bisukura bihinduka amazi mabi akoreshwa mu nganda.
4. Andi mazi mabi:
Uburyo bwo gukata mu buryo bwo gukora semiconductor buzakoresha ingano nini ya amoniya, fluorine n'amazi meza cyane mu gukuraho ubwandu, bityo bigatanga amazi mabi arimo amoniya menshi.
Uburyo bwo gupakira hakoreshejwe amashanyarazi burakenewe mu buryo bwo gupakira ibikoresho bya semiconductor. Uduce tugomba gusukurwa nyuma yo gupakira hakoreshejwe amashanyarazi, kandi amazi mabi yo gusukura hakoreshejwe amashanyarazi azakorwa muri ubu buryo. Kubera ko hari ibyuma bikoreshwa mu gupakira hakoreshejwe amashanyarazi, hazabaho imyuka ya ion y'icyuma mu mazi mabi yo gusukura hakoreshejwe amashanyarazi, nka lisansi, tin, disiki, zinc, aluminiyumu, nibindi.
Gazi y'imyanda
Kubera ko inzira ya semiconductor ifite ibisabwa byinshi kugira ngo icyumba cyo kubaga kigire isuku, ubusanzwe amafeni akoreshwa mu gukuramo ubwoko butandukanye bw'imyanda ihindagurika mu gihe cyo gukora. Kubwibyo, imyuka ihumanya mu nganda za semiconductor irangwa n'ingano nini y'imyuka isohoka n'umuvuduko muke w'imyuka ihumanya. Imyuka ihumanya nayo ahanini ihindagurika.
Iyi myuka ihumanya ishobora kugabanywamo ibice bine: imyuka ihumanya, imyuka ya alkaline, imyuka y'imyanda y'umwimerere n'imyuka y'uburozi.
1. Imyanda ikomoka ku ruhu ishingiye kuri aside:
Imyanda ikomoka ku aside ikomoka ahanini ku gukwirakwira kw'ibintu,CVD, CMP n'uburyo bwo gukata, bikoresha umuti wo gusukura ushingiye kuri aside mu gusukura wafer.
Muri iki gihe, umuti wo gusukura ukoreshwa cyane mu gukora semiconductor ni uruvange rwa peroxide ya hydrogen na aside sulfurike.
Imyanda ikomoka muri izi nzira irimo imyuka ikomoka kuri aside nka aside sulfurike, aside hydrofluoric, aside hydrochloric, aside nitrike na aside phosphoric, naho ikomoka kuri aside alkaline ikaba ahanini ari ammonia.
2. Imyuka y'imyanda y'umwimerere:
Imyanda y’ibikomoka ku bimera ikomoka ahanini ku bikorwa nko gufotora, guteza imbere, gushushanya no gukwirakwiza. Muri ibi bikorwa, umuti w’ibimera (nk’inzoga ya isopropyl) ukoreshwa mu gusukura ubuso bw’agace k’umugati, kandi umwuka w’ibimera ukomoka ku guhindagurika kw’ikirere ni imwe mu soko y’imyanda y’ibimera;
Muri icyo gihe, icyuma gikingira umwuka (photoresist) gikoreshwa mu gupima no gushushanya imiterere y’ibintu birimo ibintu bihumanya ikirere, nka butyl acetate, bihinduka mu kirere mu gihe cyo gutunganya wafer, ikaba ari indi soko y’imyuka y’imyanda y’ibinyabuzima.
3. Imyanda y'uburozi:
Imyanda y’uburozi ituruka ahanini mu bikorwa nka crystal epitaxy, dry etching na CVD. Muri ibi bikorwa, hakoreshwa ubwoko butandukanye bw’imyuka yihariye isuku cyane mu gutunganya wafer, nka silicon (SiHj), fosifore (PH3), tetrachloride ya karuboni (CFJ), borane, boron trioxide, nibindi. Imwe mu myuka yihariye ni uburozi, irashira kandi irangiza.
Muri icyo gihe, mu gikorwa cyo gukaraba no gusukura byumye nyuma yo gushyira umwuka wa shimi mu nganda zikora ibikoresho bya semiconductor, hakenewe umwuka mwinshi wa okiside yuzuye (PFCS), nka NFS, C2F&CR, C3FS, CHF3, SF6, nibindi. Ibi bintu bivanze bifite fluorine bifite ubushobozi bwo kwinjiza urumuri rwa infrared kandi biguma mu kirere igihe kirekire. Muri rusange bifatwa nk'isoko nyamukuru y'ingaruka mbi z'ubushyuhe ku isi.
4. Gupakira imyanda ikomoka ku myuka:
Ugereranyije n'uburyo bwo gukora semiconductor, imyanda iva mu gupakira semiconductor ni yoroshye cyane, ahanini ni gaze ishaje, epoxy resin n'umukungugu.
Imyanda ikomoka kuri aside ikorwa ahanini mu bikorwa nko gushushanya hakoreshejwe amashanyarazi;
Imyanda yo guteka ikorwa mu gihe cyo guteka nyuma yo gufunga no gufunga ibicuruzwa;
Imashini ikata imyuka irimo ivumbi rya silikoni mu gihe cyo gukata wafer.
Ibibazo by'ihumana ry'ibidukikije
Ku bibazo by’ihumana ry’ibidukikije mu nganda zikora ibikoresho bya semiconductor, ibibazo by’ingenzi bigomba gukemurwa ni ibi bikurikira:
· Gusohora umwuka uhumanya ikirere n'ibintu bihumanya ikirere (VOCs) ku rugero runini mu gikorwa cyo gufotora;
· Gusohora ibintu bivanze na perfluorine (PFCS) mu buryo bwo gushushanya plasma no gushyira umwuka mu binyabutabire;
· Gukoresha ingufu n'amazi ku rugero runini mu musaruro no kurinda umutekano w'abakozi;
· Gutunganya no kugenzura ihumana ry'ibikomoka ku bimera;
· Ibibazo byo gukoresha imiti ihumanya mu gupakira.
Umusaruro usukuye
Ikoranabuhanga ryo gukora ibikoresho bya semiconductor rishobora kunozwa uhereye ku bikoresho fatizo, inzira n'igenzura ry'imikorere.
Kunoza ibikoresho fatizo n'ingufu
Ubwa mbere, ubuziranenge bw'ibikoresho bugomba kugenzurwa neza kugira ngo bigabanye imyanda n'uduce duto twinjizwamo.
Icya kabiri, ubushyuhe butandukanye, kumenya aho amazi aturuka, guhinda umushyitsi, gushoka kw'amashanyarazi afite ingufu nyinshi n'ibindi bipimo bigomba gukorwa ku bice byinjira cyangwa ibicuruzwa byarangije gukorwa mbere yuko bishyirwa mu bikorwa.
Byongeye kandi, ubuziranenge bw'ibikoresho by'inyongera bugomba kugenzurwa cyane. Hari ikoranabuhanga rinini rishobora gukoreshwa mu gutanga ingufu zisukuye.
Kunoza inzira yo gukora
Inganda za semiconductor ubwazo ziharanira kugabanya ingaruka zabyo ku bidukikije binyuze mu kunoza ikoranabuhanga mu mikorere.
Urugero, mu myaka ya 1970, ibintu bisukura ibinyabuzima byakoreshejwe cyane cyane mu gusukura wafers mu ikoranabuhanga ryo gusukura uruziga. Mu myaka ya 1980, aside na alkali nka aside sulfurike byakoreshwaga mu gusukura wafers. Kugeza mu myaka ya 1990, ikoranabuhanga ryo gusukura ogisijeni mu maraso ryarashyizweho.
Mu bijyanye no gupakira, amasosiyete menshi muri iki gihe akoresha ikoranabuhanga rya electroplating, rizatuma ibidukikije bihumana cyane bitewe n’ibyuma biremereye.
Ariko, inganda zo gupakira i Shanghai ntizigikoresha ikoranabuhanga rya electroplating, bityo nta ngaruka z'ibyuma biremereye zigira ku bidukikije. Byaragaragaye ko inganda za semiconductor zigenda zigabanya ingaruka zazo ku bidukikije binyuze mu kunoza imikorere no gusimbuza imiti mu iterambere ryazo, ibi bikaba binakurikiza iterambere ry’isi yose ryo gushyigikira imiterere n’ibishushanyo mbonera by’ibicuruzwa bishingiye ku bidukikije.
Kuri ubu, hari ibikorwa byinshi byo kunoza ibikorwa byo mu gace, birimo:
·Gusimbuza no kugabanya umwuka wa PFCS ukomoka kuri ammonium, nko gukoresha umwuka wa PFC ufite ingaruka nke ku bushyuhe kugira ngo usimbuze umwuka ufite ingaruka nyinshi ku bushyuhe, nko kunoza inzira no kugabanya ingano ya PFCS ikoreshwa muri uwo murimo;
·Guteza imbere isuku ya "multi-wafer" kugeza kuri "single-wafer" kugira ngo bigabanye ingano y'imiti ikoreshwa mu isuku.
·Gucunga neza ibikorwa:
a. Kumenya uburyo bwo gukora ibintu mu buryo bwikora, bushobora gutunganya neza no gukora ibintu mu buryo bunoze, no kugabanya amakosa menshi mu mikorere y'intoki;
b. Ibintu bisukuye cyane ku bidukikije, hafi 5% cyangwa munsi yabyo, igihombo cy’umusaruro giterwa n’abantu n’ibidukikije. Ibintu bisukuye cyane ku bidukikije birimo isuku y’umwuka, amazi meza cyane, umwuka ufunze, CO2, N2, ubushyuhe, ubushuhe, nibindi. Urwego rw’isuku rw’aho gukorera isuku rukunze gupimwa n’umubare ntarengwa w’uduce tw’umwuka twemerewe kuri buri gipimo cy’umwuka, ni ukuvuga umubare w’uduce tw’umwuka;
c. Kongera imbaraga mu gutahura, no guhitamo ingingo z'ingenzi zikwiye zo gutahura ku bigo by'akazi birimo imyanda myinshi mu gihe cyo kuyitunganya.
Murakaza neza abakiriya bose baturutse impande zose z'isi baza kudusura kugira ngo tuganireho byinshi!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
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Igihe cyo kohereza: Kanama-13-2024