Kupanga zipangizo za semiconductor kumaphatikizapo zipangizo zosiyana, ma circuits ophatikizidwa ndi njira zawo zopakira.
Kupanga kwa semiconductor kungagawidwe m'magawo atatu: kupanga zinthu za thupi la chinthu, kupanga zinthuchikwama cha mkatekupanga ndi kusonkhanitsa zipangizo. Pakati pawo, kuipitsa kwakukulu ndi gawo lopangira zinthu zophikidwa mu uvuni.
Zinthu zoipitsa mpweya zimagawidwa makamaka m'magulu a madzi otayira, mpweya woipa ndi zinyalala zolimba.
Njira yopangira chip:
Chophimba cha silikonipambuyo popera kunja - kuyeretsa - okosijeni - kukana kofanana - photolithography - chitukuko - kupukuta - kufalikira, kuyika ma ion - kuyika nthunzi ya mankhwala - kupukuta kwa makina a mankhwala - kupangidwa kwa zitsulo, ndi zina zotero.
Madzi otayira
Madzi ambiri otayira amapangidwa mu gawo lililonse la njira zopangira ndi kuyesa ma phukusi a semiconductor, makamaka madzi otayira ochokera ku acid, madzi otayira okhala ndi ammonia ndi madzi otayira achilengedwe.
1. Madzi otayira okhala ndi fluorine:
Hydrofluoric acid imakhala chosungunulira chachikulu chomwe chimagwiritsidwa ntchito mu njira zosungunulira ndi kupukuta chifukwa cha mphamvu zake zosungunulira ndi kuwononga. Madzi otayirira okhala ndi fluorine mu ndondomekoyi amachokera makamaka ku njira yofalitsira ndi njira yopukutira makina mu njira yopangira ma chip. Mu njira yotsuka ma silicon wafers ndi ziwiya zina, hydrochloric acid imagwiritsidwanso ntchito nthawi zambiri. Njira zonsezi zimamalizidwa m'matanki odzipangira okha kapena zida zotsukira, kotero madzi otayirira okhala ndi fluorine amatha kutulutsidwa pawokha. Malinga ndi kuchuluka kwake, amatha kugawidwa m'madzi otayirira okhala ndi fluorine wambiri komanso madzi otayirira okhala ndi ammonia ochepa. Kawirikawiri, kuchuluka kwa madzi otayirira okhala ndi ammonia wambiri kumatha kufika 100-1200 mg/L. Makampani ambiri amabwezeretsanso gawo ili la madzi otayirira kuti agwiritse ntchito njira zomwe sizifuna madzi abwino kwambiri.
2. Madzi otayira okhala ndi asidi:
Pafupifupi njira iliyonse yopangira ma circuit ophatikizika imafuna kuti chip chiyeretsedwe. Pakadali pano, sulfuric acid ndi hydrogen peroxide ndi zinthu zoyeretsera zomwe zimagwiritsidwa ntchito kwambiri popanga ma circuit ophatikizika. Nthawi yomweyo, zinthu zoyeretsera za acid-base monga nitric acid, hydrochloric acid ndi ammonia water zimagwiritsidwanso ntchito.
Madzi otayira ochokera ku asidi omwe amagwiritsidwa ntchito popanga ma chips amachokera makamaka ku njira yoyeretsera yomwe imachitika popanga ma chips. Mu njira yopakira, chips imachiritsidwa ndi yankho la acid-base panthawi yopaka ma electroplating ndi kusanthula mankhwala. Pambuyo pochikonza, imafunika kutsukidwa ndi madzi oyera kuti ipange madzi otayira ochokera ku acid-base. Kuphatikiza apo, ma reagents ochokera ku acid-base monga sodium hydroxide ndi hydrochloric acid amagwiritsidwanso ntchito pamalo oyeretsera madzi oyera kuti abwezeretsenso anion ndi cation resins kuti apange madzi otayira ochokera ku acid-base. Madzi otayira ochokera ku mchira amapangidwanso panthawi yotsuka mpweya wotayira wochokera ku acid-base. M'makampani opanga ma circuit ophatikizidwa, kuchuluka kwa madzi otayira ochokera ku acid-base ndi kwakukulu kwambiri.
3. Madzi otayira achilengedwe:
Chifukwa cha njira zosiyanasiyana zopangira, kuchuluka kwa zosungunulira zachilengedwe zomwe zimagwiritsidwa ntchito mumakampani opanga zinthu zosiyanasiyana ndi kosiyana kwambiri. Komabe, monga zotsukira, zosungunulira zachilengedwe zimagwiritsidwabe ntchito kwambiri m'maulumikizano osiyanasiyana opangira zinthu. Zosungunulira zina zimakhala zotulutsa madzi otayira zachilengedwe.
4. Madzi ena otayira:
Njira yocheka ya njira yopangira semiconductor idzagwiritsa ntchito ammonia yambiri, fluorine ndi madzi oyera kwambiri kuti achotse kuipitsidwa, motero kupanga madzi otayira okhala ndi ammonia ambiri.
Njira yopangira ma electroplating imafunika mu njira yopangira ma semiconductor. Chip iyenera kutsukidwa pambuyo popangira ma electroplating, ndipo madzi otayira oyeretsera ma electroplating adzapangidwa mu njira iyi. Popeza zitsulo zina zimagwiritsidwa ntchito popanga ma electroplating, padzakhala kutulutsa kwa ayoni achitsulo mu madzi otayira oyeretsera ma electroplating, monga lead, tin, disc, zinc, aluminiyamu, ndi zina zotero.
Mpweya wotayira
Popeza njira ya semiconductor ili ndi zofunikira kwambiri paukhondo wa chipinda chochitira opaleshoni, mafani nthawi zambiri amagwiritsidwa ntchito kutulutsa mitundu yosiyanasiyana ya mpweya woipa womwe umasungunuka panthawiyi. Chifukwa chake, mpweya woipa womwe umatulutsa mumakampani opanga semiconductor umadziwika ndi kuchuluka kwa utsi woipa komanso kuchuluka kochepa kwa mpweya woipa. Mpweya woipa womwe umatulutsa umasungunukanso kwambiri.
Mpweya woipawu ukhoza kugawidwa m'magulu anayi: mpweya wa acidic, mpweya wa alkaline, mpweya wa organic zinyalala ndi mpweya wapoizoni.
1. Mpweya wotayira zinthu zochokera ku asidi:
Mpweya wotayira wa asidi umachokera makamaka ku kufalikira kwa mpweya,Matenda a mtima (CVD), CMP ndi njira zoyeretsera, zomwe zimagwiritsa ntchito njira yotsukira ya acid-base kuyeretsa wafer.
Pakadali pano, chosungunulira chogwiritsidwa ntchito kwambiri popanga zinthu za semiconductor ndi chisakanizo cha hydrogen peroxide ndi sulfuric acid.
Mpweya wotayira womwe umapangidwa m'njira zimenezi umaphatikizapo mpweya wa acidic monga sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid ndi phosphoric acid, ndipo mpweya wa alkaline makamaka ndi ammonia.
2. Mpweya wotayira zinthu zachilengedwe:
Mpweya wotayira zinyalala wachilengedwe umachokera makamaka ku njira monga photolithography, chitukuko, etching ndi diffusion. Mu njira izi, njira yachilengedwe (monga isopropyl alcohol) imagwiritsidwa ntchito kuyeretsa pamwamba pa wafer, ndipo mpweya wotayira womwe umapangidwa chifukwa cha volatilization ndi imodzi mwa magwero a mpweya wotayira zinyalala wachilengedwe;
Nthawi yomweyo, choletsa kuwala (photoresist) chomwe chimagwiritsidwa ntchito popanga photolithography ndi etching chili ndi zinthu zosungunuka zachilengedwe, monga butyl acetate, zomwe zimasinthasintha mumlengalenga panthawi yokonza wafer, yomwe ndi gwero lina la mpweya woipa wachilengedwe.
3. Mpweya woipa:
Mpweya woipa umachokera makamaka ku njira monga kristalo epitaxy, dry etching ndi CVD. Mu njira izi, mitundu yosiyanasiyana ya mpweya wapadera woyera kwambiri imagwiritsidwa ntchito pokonza wafer, monga silicon (SiHj), phosphorous (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, ndi zina zotero. Mpweya wina wapadera ndi woopsa, woyambitsa mpweya komanso wowononga.
Nthawi yomweyo, poyeretsa ndi kupukuta mouma pambuyo poika nthunzi ya mankhwala mu semiconductor manufactures, mpweya wambiri wa oxide (PFCS) umafunika, monga NFS, C2F&CR, C3FS, CHF3, SF6, ndi zina zotero. Mankhwalawa omwe ali ndi perfluorine amatha kuyamwa kwambiri m'dera la infrared light ndipo amakhala mumlengalenga kwa nthawi yayitali. Kawirikawiri amaonedwa kuti ndi gwero lalikulu la zotsatira za kutentha kwa dziko lapansi.
4. Kulongedza zinthu zotayira mpweya:
Poyerekeza ndi njira yopangira zinthu zopangidwa ndi semiconductor, mpweya wotayidwa womwe umapangidwa ndi njira yopangira zinthu zopangidwa ndi semiconductor ndi wosavuta, makamaka mpweya wa acidic, epoxy resin ndi fumbi.
Mpweya wotayira asidi umapangidwa makamaka m'njira monga electroplating;
Mpweya wotayira wophikira umapangidwa pophika pambuyo popaka ndi kutseka zinthuzo;
Makina odulira zinthu amapanga mpweya woipa wokhala ndi fumbi la silikoni panthawi yodulira wafer.
Mavuto a kuipitsa chilengedwe
Pa mavuto okhudza kuipitsidwa kwa chilengedwe m'makampani opanga zinthu zamagetsi, mavuto akuluakulu omwe ayenera kuthetsedwa ndi awa:
· Kutulutsa mpweya woipa kwambiri ndi zinthu zachilengedwe zosasunthika (VOCs) mu njira yojambulira zithunzi;
· Kutulutsa kwa mankhwala opangidwa ndi perfluorinated (PFCS) mu plasma etching ndi njira zosungira nthunzi ya mankhwala;
· Kugwiritsa ntchito mphamvu ndi madzi kwambiri popanga ndi kuteteza chitetezo cha ogwira ntchito;
· Kuyang'anira kubwezeretsanso ndi kuipitsa zinthu zina;
· Mavuto ogwiritsira ntchito mankhwala oopsa pokonza zinthu.
Kupanga koyera
Ukadaulo wopanga zinthu zoyera pogwiritsa ntchito zipangizo za semiconductor ukhoza kukonzedwa bwino pogwiritsa ntchito zipangizo zopangira, njira zoyendetsera ntchito, ndi kuwongolera njira zoyendetsera ntchito.
Kukonza zipangizo zopangira ndi mphamvu
Choyamba, kuyera kwa zinthu kuyenera kulamulidwa mosamala kuti kuchepetse kulowetsedwa kwa zinyalala ndi tinthu tating'onoting'ono.
Kachiwiri, kutentha kosiyanasiyana, kuzindikira kutuluka kwa madzi, kugwedezeka, kugwedezeka kwa magetsi amphamvu kwambiri ndi mayeso ena ayenera kuchitika pa zinthu zomwe zikubwera kapena zinthu zomwe zatha pang'ono zisanapangidwe.
Kuphatikiza apo, kuyera kwa zinthu zothandizira kuyenera kulamulidwa mosamala. Pali ukadaulo wambiri womwe ungagwiritsidwe ntchito popanga mphamvu zoyera.
Konzani njira zopangira
Makampani opanga zinthu zamagetsi zamagetsi okha amayesetsa kuchepetsa mphamvu zake pa chilengedwe kudzera mu kusintha kwa ukadaulo.
Mwachitsanzo, m'zaka za m'ma 1970, zinthu zosungunulira zachilengedwe zinkagwiritsidwa ntchito makamaka kuyeretsa ma wafer mu ukadaulo woyeretsera ma circuit. M'zaka za m'ma 1980, njira zoyeretsera ma wafer monga sulfuric acid zinkagwiritsidwa ntchito kuyeretsa ma wafer. Mpaka m'ma 1990, ukadaulo woyeretsera okosijeni m'magazi unapangidwa.
Ponena za kulongedza, makampani ambiri pakali pano amagwiritsa ntchito ukadaulo wamagetsi, zomwe zimayambitsa kuipitsa chilengedwe ndi zitsulo zolemera.
Komabe, mafakitale opaka zinthu ku Shanghai sakugwiritsanso ntchito ukadaulo wamagetsi, kotero palibe chomwe chingakhudze chilengedwe chifukwa cha zitsulo zolemera. Zitha kupezeka kuti makampani opanga zinthu zamagetsi akuchepetsa pang'onopang'ono mphamvu zake pa chilengedwe kudzera mu kusintha kwa njira ndi kusintha kwa mankhwala mu njira yake yopangira zinthu, zomwe zimatsatiranso njira yomwe ikuchitika padziko lonse lapansi yolimbikitsa njira ndi kapangidwe ka zinthu kutengera chilengedwe.
Pakadali pano, kusintha kwakukulu kwa njira zakomweko kukuchitika, kuphatikizapo:
·Kusintha ndi kuchepetsa mpweya wa PFCS wa ammonium, monga kugwiritsa ntchito mpweya wa PFCs wokhala ndi mphamvu yochepa yotenthetsera mpweya kuti ulowe m'malo mwa mpweya wokhala ndi mphamvu yayikulu yotenthetsera mpweya, monga kukonza kayendedwe ka ntchito ndikuchepetsa kuchuluka kwa mpweya wa PFCS womwe umagwiritsidwa ntchito pochita izi;
·Kukonza kutsuka kwa mawafer ambiri kukhala kutsuka kwa mawafer amodzi kuti muchepetse kuchuluka kwa mankhwala oyeretsera omwe amagwiritsidwa ntchito poyeretsa.
·Kulamulira mwamphamvu njira:
a. Kuzindikira njira zodzipangira zokha, zomwe zimatha kukwaniritsa kukonza kolondola ndi kupanga gulu, ndikuchepetsa kuchuluka kwa zolakwika pakugwiritsa ntchito pamanja;
b. Zinthu zachilengedwe zoyera kwambiri, pafupifupi 5% kapena kuchepera kwa kutayika kwa zokolola kumachitika chifukwa cha anthu ndi chilengedwe. Zinthu zachilengedwe zoyera kwambiri zimaphatikizapo ukhondo wa mpweya, madzi oyera kwambiri, mpweya wopanikizika, CO2, N2, kutentha, chinyezi, ndi zina zotero. Mlingo wa ukhondo wa malo ochitirako ntchito yoyera nthawi zambiri umayesedwa ndi kuchuluka kwa tinthu tomwe timaloledwa pa unit iliyonse ya mpweya, kutanthauza kuchuluka kwa tinthu;
c. Limbikitsani kuzindikira, ndikusankha mfundo zofunika kuzindikirika m'malo ogwirira ntchito omwe ali ndi zinyalala zambiri panthawi yopanga.
Takulandirani makasitomala ochokera padziko lonse lapansi kuti adzatichezere kuti tikambirane zambiri!
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Nthawi yotumizira: Ogasiti-13-2024