Kugadzirwa kwemidziyo ye semiconductor kunosanganisira michina yakasiyana, maseketi akabatanidzwa uye maitiro ekurongedza kwawo.
Kugadzirwa kwe semiconductor kunogona kukamurwa muzvikamu zvitatu: kugadzirwa kwemuviri wechinhu, chigadzirwachifukidzirokugadzira nekugadzira zvishandiso. Pakati pazvo, kusvibiswa kwakanyanya ndiko kugadzirwa kwewafer yezvigadzirwa.
Zvinhu zvinosvibisa zvinokamurwa kuva mvura yakasviba, gasi rakasviba uye marara akaoma.
Maitiro ekugadzira chips:
Chingwa chesiliconemushure mekukuya kwekunze - kuchenesa - oxidation - yunifomu rekudzivirira - photolithography - kukura - etching - diffusion, ion implantation - chemical vapor deposition - chemical mechanical polishing - metallization, nezvimwewo.
Mvura Yakasviba
Mvura yakawanda yakasviba inogadzirwa muchikamu chega chega chekugadzira uye kuyedzwa kwekurongedza, kunyanya mvura yakasviba ine acid-base, mvura yakasviba ine ammonia uye mvura yakasviba yeorganic.
1. Mvura yakasviba ine fluorine:
Hydrofluoric acid ndiyo inonyanya kushandiswa mukuita oxidation ne etching nekuda kwehunhu hwayo hwekuoxidation ne corrosive. Mvura yakasviba ine fluorine mukuita uku inonyanya kubva mukuita diffusion uye chemical mechanical polishing mukuita chips. Mukuita kuchenesa silicon wafers nemidziyo yakafanana, hydrochloric acid inoshandiswawo kakawanda. Maitiro ese aya anopedzwa mumatangi akatsaurirwa etching kana michina yekuchenesa, saka mvura yakasviba ine fluorine inogona kuburitswa yega. Zvichienderana nehuwandu hwayo, inogona kukamurwa kuita mvura yakasviba ine fluorine yakawanda uye mvura yakasviba ine ammonia yakaderera. Kazhinji, huwandu hwemvura yakasviba ine ammonia yakawanda hunogona kusvika 100-1200 mg/L. Makambani mazhinji anodzokorodza chikamu ichi chemvura yakasviba kune maitiro asingade mvura yepamusoro.
2. Mvura yakasviba ine acid-base:
Maitiro ese ari mukugadzirwa kwedunhu rakabatanidzwa anoda kuti chip icheneswe. Parizvino, sulfuric acid nehydrogen peroxide ndizvo zvinonyanya kushandiswa pakuchenesa mukugadzirwa kwedunhu rakabatanidzwa. Panguva imwe chete, zvinhu zvinoshandiswa neacid-base zvakaita se nitric acid, hydrochloric acid uye ammonia water zvinoshandiswawo.
Mvura yakasviba ine acid-base yekugadzirwa kwayo inonyanya kubva pakuchenesa kwakaitwa mukugadzirwa kwemachip. Mukugadzirwa kwemachip, chip inorapwa ne acid-base solution panguva yekuisa electroplating uye kuongorora makemikari. Mushure mekurapa, inofanira kusukwa nemvura yakachena kuti igadzire mvura yakasviba ine acid-base. Pamusoro pezvo, ma reagents ane acid-base akadai se sodium hydroxide ne hydrochloric acid anoshandiswawo mu pure water station kugadzira anion ne cation resins kuti igadzire mvura yakasviba ine acid-base. Mvura yemuswe inogadzirwawo panguva ye acid-base waste gas washing. Mumakambani ekugadzira macircuit akabatanidzwa, huwandu hwe acid-base waste waste waste hwakanyanya.
3. Mvura yakasviba yemusikirwo:
Nekuda kwemaitiro akasiyana ekugadzira, huwandu hwezvinonyungudutsa zve organic zvinoshandiswa muindasitiri ye semiconductor hwakasiyana zvikuru. Zvisinei, sezvinhu zvinochenesa, zvinonyungudutsa zve organic zvichiri kushandiswa zvakanyanya muzvikamu zvakasiyana-siyana zvekugadzira. Zvimwe zvinonyungudutsa zvinova zvinoburitsa mvura yakasviba ye organic.
4. Dzimwe mvura dzakasviba:
Maitiro ekucheka ekugadzirwa kwe semiconductor anoshandisa huwandu hwakawanda hwe ammonia, fluorine uye mvura yakachena kwazvo kuti ibvise kusvibiswa, nokudaro ichiburitsa mvura yakasviba ine ammonia yakawanda.
Maitiro ekugadzira ma "electroplating" anodiwa mukurongedza ma "semiconductor". Chip inofanira kucheneswa mushure mekurongedza ma "electroplating", uye mvura yakasviba inocheneswa ne "electroplating" ichagadzirwa mukuita uku. Sezvo dzimwe simbi dzichishandiswa mukugadzira ma "electroplating", pachava nekuburitswa kwema "ion" esimbi mumvura yakasviba inocheneswa ne "electroplating", senge lead, tin, disc, zinc, aluminium, nezvimwewo.
Gasi retsvina
Sezvo maitiro e semiconductor aine zvinodiwa zvakanyanya zvekuchena kwekamuri rekuvhiyira, mafeni anowanzo shandiswa kubvisa mhando dzakasiyana dzemagasi anoshanduka panguva yekushanda. Nokudaro, magasi anobuda muindasitiri ye semiconductor anozivikanwa nehuwandu hwakawanda hweutsi uye huwandu hushoma hweutsi hunobuda. Magasi anobuda anoshandukawo zvakanyanya.
Magasi aya anoburitswa anogona kukamurwa kuita zvikamu zvina: gasi rine acidic, gasi rine alkaline, gasi rine organic waste uye gasi rine chepfu.
1. Gasi rinoraswa neasidhi:
Gasi rinoraswa neacid-base rinonyanya kubva mukupararira,CVD, CMP uye maitiro ekucheka, anoshandisa mushonga wekuchenesa une acid-base kuchenesa wafer.
Parizvino, chinhu chinonyanya kushandiswa pakuchenesa mukugadzira semiconductor musanganiswa wehydrogen peroxide nesulfuric acid.
Gasi rinoraswa rinogadzirwa mumaitiro aya rinosanganisira magasi ane acidic akadai sesulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid uye phosphoric acid, uye gasi realkaline rinonyanya kuve ammonia.
2. Gasi remarara reorganic:
Gasi remarara eorganic rinonyanya kubva mumabasa akadai se photolithography, development, etching uye diffusion. Mumaitiro aya, organic solution (yakadai se isopropyl alcohol) inoshandiswa kuchenesa pamusoro pe wafer, uye marara egasi anokonzerwa ne volatilization ndeimwe yenzvimbo dzinokonzera marara eorganic;
Panguva imwe chete, photoresist (photoresist) inoshandiswa mukuita photolithography uye etching ine zvinonyungudutsa zvipenyu, zvakaita sebutyl acetate, iyo inoshanduka kuita mhepo panguva yekugadzirisa wafer, inova imwe nzvimbo yegasi remarara eorganic.
3. Gasi rine chepfu:
Gasi rine chepfu rinonyanya kubva mumabasa akadai se crystal epitaxy, dry etching uye CVD. Mumaitiro aya, magasi akasiyana-siyana akachena zvakanyanya anoshandiswa kugadzirisa wafer, akadai se silicon (SiHj), phosphorus (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, nezvimwewo. Mamwe magasi akakosha ane chepfu, anokachidza uye anoparadza.
Panguva imwe chete, mukuita kwekuchenesa nekuchenesa mushure mekuiswa kwemhepo inodziya mukugadzirwa kwe semiconductor, huwandu hwakawanda hwegesi yakazara ye oxide (PFCS) hunodiwa, senge NFS, C2F&CR, C3FS, CHF3, SF6, nezvimwewo. Aya macompounds ane perfluorinated anonyudzwa zvakanyanya munzvimbo ye infrared light uye anogara mumhepo kwenguva yakareba. Anowanzoonekwa seanonyanya kukonzera global greenhouse effect.
4. Kurongedza marara egasi:
Kana tichienzanisa nemaitiro ekugadzira ma semiconductor, gasi rinoraswa rinogadzirwa nemaitiro ekurongedza ma semiconductor rakareruka, rinonyanya kuve gasi rine acidic, epoxy resin uye guruva.
Gasi rine acidic rasta rinonyanya kugadzirwa mumabasa akadai se electroplating;
Gasi rekubikira rinogadzirwa panguva yekubikira mushure mekunamira nekuvhara chigadzirwa;
Muchina wekuchekerera unogadzira gasi rakasviba rine guruva resilicon shoma panguva yekucheka wafer.
Matambudziko ekusvibiswa kwezvakatipoteredza
Pamatambudziko ekusvibiswa kwezvakatipoteredza muindasitiri ye semiconductor, matambudziko makuru anofanirwa kugadziriswa ndeaya:
· Kuburitswa kukuru kwemhepo inosvibisa uye makemikari anoshanduka-shanduka (VOCs) mukuita kwephotolithography;
· Kuburitswa kwemakemikari ane perfluorinated (PFCS) mu plasma etching uye chemical vapor deposition processes;
· Kushandiswa kwesimba nemvura zvakanyanya mukugadzira nekuchengetedza kuchengetedzeka kwevashandi;
· Kudzokorodza uye kutarisa kusvibiswa kwezvinhu zvakasara;
· Matambudziko ekushandisa makemikari ane njodzi muzvirongwa zvekurongedza.
Kugadzirwa kwakachena
Tekinoroji yekugadzira michina ye semiconductor inogona kuvandudzwa kubva pazvinhu zvekugadzira, maitiro uye kutonga maitiro.
Kuvandudza zvinhu zvakagadzirwa nesimba
Kutanga, kuchena kwezvinhu kunofanira kudzorwa zvakasimba kuderedza kusviba uye zvidimbu.
Chechipiri, tembiricha dzakasiyana-siyana, kuonekwa kwekubuda kwemvura, kudedera, kuvhunduka kwemagetsi ane simba guru uye mimwe miedzo inofanirwa kuitwa pazvinhu zviri kuuya kana zvigadzirwa zvakapedzwa zvishoma zvisati zvagadzirwa.
Pamusoro pezvo, kuchena kwezvinhu zvekuwedzera kunofanira kudzorwa zvakasimba. Kune matekinoroji akawanda anogona kushandiswa kugadzira simba rakachena.
Gadzirisa maitiro ekugadzira
Indasitiri yesemiconductor pachayo inoedza kuderedza kukanganisa kwayo nharaunda kuburikidza nekuvandudza tekinoroji yemaitiro.
Semuenzaniso, muma1970, organic solvents ndiyo yainyanya kushandiswa kuchenesa mawafers mu integrated circuit cleaning technology. Muma1980, acid nealkali solutions zvakaita sesulfuric acid zvaishandiswa kuchenesa mawafers. Kusvika kuma1990, plasma oxygen cleaning technology yakagadzirwa.
Panyaya yekurongedza, makambani mazhinji pari zvino anoshandisa tekinoroji ye electroplating, iyo inokonzera kusvibiswa kwesimbi inorema kunharaunda.
Zvisinei, mafekitori ekurongedza muShanghai haachashandisi tekinoroji yemagetsi, saka hapana kukanganiswa kwesimbi dzinorema panharaunda. Zvinogona kuwanikwa kuti indasitiri yesemiconductor iri kuderedza zvishoma nezvishoma kukanganiswa kwayo panharaunda kuburikidza nekuvandudza maitiro uye kutsiva makemikari mumaitiro ayo ekugadzira, izvo zvinotevedzerawo maitiro aripo epasi rose ekusimudzira maitiro uye dhizaini yechigadzirwa zvichibva pane nharaunda.
Parizvino, kune mamwe mabasa ekuvandudza maitiro emunharaunda ari kuitwa, anosanganisira:
·Kutsiva nekuderedza gasi re-all-ammonium PFCS, zvakaita sekushandisa gasi rePFC rine simba shoma rekudziya pasi kuti ritsive gasi rine simba guru rekudziya pasi, zvakaita sekuvandudza kufamba kwemaitiro uye kuderedza huwandu hwegasi rePFCS rinoshandiswa mukuita basa iri;
·Kuvandudza kuchenesa kwewafer yakawanda kuenda pakuchenesa kwewafer imwe chete kuderedza huwandu hwemakemikari anoshandiswa pakuchenesa.
·Kudzora kwakasimba maitiro:
a. Ziva otomatiki yemaitiro ekugadzira, ayo anogona kuita kuti kugadzirisa kwacho kuve kwakanyatsojeka uye kugadzirwa kwebatch, uye kuderedza mwero wekukanganisa kwakanyanya kwekushanda nemaoko;
b. Zvinhu zvekuchengetedza nharaunda zvakachena zvakanyanya, inenge 5% kana pasi pekurasikirwa kwegoho kunokonzerwa nevanhu nenzvimbo. Zvinhu zvekuchengetedza nharaunda zvakachena zvakanyanya zvinosanganisira kuchena kwemhepo, mvura yakachena zvakanyanya, mhepo yakamanikidzwa, CO2, N2, tembiricha, hunyoro, nezvimwewo. Hutsanana hwemushandi wekuchenesa hunowanzo kuyerwa nehuwandu hwezvinhu zvinotenderwa pahuwandu hwemhepo, kureva huwandu hwezvinhu;
c. Simbisai kuona, uye sarudzai zvinhu zvakakosha zvekuona panzvimbo dzebasa dzine marara akawanda panguva yekugadzira.
Gamuchirai vatengi vanobva kumativi ese epasi kuti vatishanyire kuti tikurukure zvakawanda!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Nguva yekutumira: Nyamavhuvhu-13-2024