He rerekē i ngā taputapu S1C motuhake e whai ana i ngā āhuatanga hiko teitei, mana teitei, auau teitei me te pāmahana teitei, ko te whāinga rangahau o te ara iahiko whakauru SiC ko te tiki i te ara iahiko matihiko pāmahana teitei mō te ara iahiko whakahaere IC mana atamai. I te mea he tino iti te ara iahiko whakauru SiC mō te mara hiko ā-roto, nō reira ka tino heke te awe o te hapa o ngā microtubules, koinei te wāhanga tuatahi o te maramara whakakaha mahi whakauru SiC monolithic i manatokohia, ko te hua oti tuturu me te hua i whakatauhia e te hua he nui ake i ngā hapa microtubules, nō reira, i runga i te tauira hua SiC me te rauemi Si me CaAs he mārama te rerekētanga. Ko te maramara e hangai ana ki te hangarau NMOSFET whakaheke. Ko te take matua he iti rawa te nekehanga kawe whai hua o ngā MOSFET SiC hongere whakamuri. Hei whakapai ake i te nekehanga mata o Sic, me whakapai ake me te arotau i te tukanga waikura wera o Sic.
He nui ngā mahi a Te Whare Wānanga o Purdue mō ngā ara iahiko whakauru SiC. I te tau 1992, i angitu te whakawhanake i te wheketere i runga i te ara iahiko whakauru mamati monolithic 6H-SIC NMOSFET o te hongere whakamuri. Kei roto i te maramara ngā ara iahiko kāore he kuaha, kāore rānei he kuaha, kei runga i te kuaha, i te kaute rua, me te haurua tāpiri, ā, ka taea te mahi tika i roto i te awhe pāmahana mai i te 25°C ki te 300°C. I te tau 1995, i hangaia ngā IC MESFET papa SiC tuatahi mā te whakamahi i te hangarau wehe werohanga vanadium. Mā te whakahaere tika i te nui o te vanadium i werohanga, ka taea te whiwhi i te SiC ārai.
I roto i ngā ara iahiko arorau mamati, he nui ake te ātaahua o ngā ara iahiko CMOS i ngā ara iahiko NMOS. I te marama o Hepetema 1996, i hangaia te ara iahiko whakauru mamati CMOS 6H-SIC tuatahi. Ka whakamahia e te taputapu te paparanga waikura N-raupapa me te waikura tāpui, engari nā ētahi atu raruraru tukanga, he tino teitei rawa te ngaohiko paepae o te maramara PMOSFET. I te marama o Poutū-te-rangi 1997 i te wā i hangaia ai te ara iahiko SiC CMOS o te whakatipuranga tuarua. I whakamahia te hangarau o te werohanga mahanga P me te paparanga waikura tipu wera. Ko te ngaohiko paepae o ngā PMOSEFT i whiwhihia mā te whakapai ake tukanga he tata ki te -4.5V. Ka pai te mahi a ngā ara iahiko katoa i runga i te maramara i te pāmahana rūma tae atu ki te 300°C, ā, ka whakakahangia e te pūtake hiko kotahi, ka taea te noho mai i te 5 ki te 15V.
Mā te whakapai ake i te kounga o te papa angiangi, ka hangaia he ara iahiko whakauru mahi nui ake, ka nui ake te hua. Heoi, ina whakatauhia ngā raruraru rauemi me ngā tukanga SiC, ko te pono o te taputapu me te takai ka noho hei mea matua e pā ana ki te mahi o ngā ara iahiko whakauru SiC pāmahana-tiketike.
Wā tuku: 23 o Ākuhata-2022