Vet-HainaUku Hiraka WarowaihāKo te paninga he paninga tiaki mahi-teitei i hangaia ki te mea tino mārō, ā, he ātete ki te kakahu.kāpira silicon (SiC)he rauemi, e whakarato ana i te ātete pai ki te waikura matū me te pumau pāmahana teitei. He mea nui ēnei āhuatanga i roto i te hanga semiconductor, nō reiraPaninga Ukume Silicon Carbidee whakamahia whānuitia ana i roto i ngā wāhanga matua o ngā taputapu hanga semiconductor.
Te tūranga motuhake o Vet-ChinaUku Hiraka WarowaihāKo te paninga i roto i te hanga haurua-ā-ira e whai ake nei:
Whakapai ake i te roa o te mau o ngā taputapu:Paninga Ukume Silicon Carbide He tino pai te tiaki mata o te Paninga Ukume Silicon Carbide mō ngā taputapu hanga semiconductor me tōna tino pakeke me te ātete ki te kakahu. Ina koa i roto i ngā taiao tukanga pāmahana teitei me te waikura nui, pērā i te whakatakotoranga kohu matū (CVD) me te whakairo plasma, ka taea e te paninga te ārai i te mata o te taputapu kei pakaru i te horo matū, i te kakahu tinana rānei, ā, ka roa ake te ora o te taputapu me te whakaiti i te wā kore mahi i puta mai i te whakakapinga me te whakatikatika pinepine.
Whakapai ake i te parakore o te tukanga:I roto i te tukanga hanga haurua-ira, ka pāngia pea te hua e ngā parahanga iti. Mā te koretake o te matū o te paninga uku Silicon Carbide ka taea te noho pumau i raro i ngā āhuatanga tino kino, ka ārai i te rauemi kei tukuna ngā matūriki, ngā poke rānei, ā, ka whakarite kia parakore te taiao o te tukanga. He mea nui tēnei mō ngā mahi hanga e hiahia ana kia tino tika me te tino ma, pērā i te PECVD me te whakaurunga katote.
Arotauhia te whakahaere wera:I roto i te tukatuka haurua-rahi pāmahana, pērā i te tukatuka wera tere (RTP) me ngā tukanga waikura, mā te kawe wera teitei o te paninga uku Silicon Carbide ka taea te tohatoha pāmahana ōrite i roto i ngā taputapu. Ka āwhina tēnei ki te whakaiti i te ahotea wera me te whakarerekētanga rauemi i puta mai i ngā piki me ngā heke o te pāmahana, ā, ka whakapai ake i te tika me te ōrite o te hanga hua.
Tautoko i ngā taiao tukanga uaua:I roto i ngā tukanga e hiahia ana kia whakahaerea te āhuarangi uaua, pērā i te whakairo ICP me ngā tukanga whakairo PSS, mā te pumau me te ātete ki te waikura o te Silicon Carbide Ceramic Coating ka mau tonu te mahi pumau a te taputapu i roto i te mahi roa, ka whakaiti i te mōrearea o te pirau rauemi, te kino rānei o ngā taputapu nā ngā huringa taiao.
| CVD SiC薄膜基本物理性能 Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga | |
| 性质 / Taonga | 典型数值 / Uara Noa |
| 晶体结构 / Hanganga Karaihe | Wāhanga β FCC多晶，主要为（111）取向 |
| 密度 / Kiato | 3.21 karamu/cm³ |
| 硬度 / Te pakeketanga | 2500 维氏硬度（500g kawenga） |
| 晶粒大小 / Rahi o te Witi | 2~10μm |
| 纯度 / Te Parakore o te Matū | 99.99995% |
| 热容 / Te kaha wera | 640 J·kg-1·K-1 |
| 升华温度 / Te Pāmahana Whakatōtō | 2700℃ |
| 抗弯强度 / Kaha Whakapiko | 415 MPa RT 4-ira |
| 杨氏模量 / Te Tauwehenga o te Young | 430 Gpa 4pt piko, 1300℃ |
| 导热系数 / Te whakamahanalTe kawe i te hiko | 300W·m-1·K-1 |
| 热膨胀系数 / Te Whanuitanga Wera (CTE) | 4.5×10-6K-1 |
Nau mai haere mai ki tō mātou wheketere, kia kōrero anō tātou!
