Chifukwa chiyani timagwiritsa ntchito tepi ya UV podula ma wafer? | VET Energy

Pambuyo pachikwama cha mkatePambuyo pochita kale, kukonzekera kwa chip kwatha, ndipo kuyenera kudulidwa kuti mulekanitse chips pa wafer, kenako ndikuyika m'matumba.chikwama cha mkateNjira yodulira yomwe yasankhidwa pa ma wafers a makulidwe osiyanasiyana ndi yosiyananso:

▪Ma WaferMasamba okhala ndi makulidwe opitilira 100um nthawi zambiri amadulidwa ndi masamba;

▪Ma WaferMa laser okwana 100mm nthawi zambiri amadulidwa ndi laser. Kudula kwa laser kumatha kuchepetsa mavuto otupa ndi kusweka, koma akapitirira 100mm, mphamvu yopangira idzachepa kwambiri;

▪Ma WaferMa plasma odulidwa ndi makulidwe osakwana 30um ndi ofulumira ndipo sawononga pamwamba pa wafer, motero amawonjezera phindu, koma njira yake ndi yovuta kwambiri;

Pa nthawi yodula wafer, filimu idzaikidwa pa wafer pasadakhale kuti zitsimikizire kuti "kudula" kwabwino kwambiri. Ntchito zake zazikulu ndi izi:

Konzani ndi kuteteza chidebecho

Pa nthawi yoduladula, wafer iyenera kudulidwa bwino.Ma Wafernthawi zambiri zimakhala zoonda komanso zofooka. Tepi ya UV imatha kumamatira mwamphamvu wafer ku chimango kapena gawo la wafer kuti wafer isasunthike ndikugwedezeka panthawi yodula, ndikutsimikizira kulondola ndi kulondola kwa kudula.
Ikhoza kupereka chitetezo chabwino chakuthupi kwa wafer, kupewa kuwonongeka kwachikwama cha mkateZoyambitsidwa ndi mphamvu yakunja ndi kukangana komwe kungachitike panthawi yodula, monga ming'alu, kugwa kwa m'mphepete ndi zolakwika zina, komanso kuteteza kapangidwe ka chip ndi dera pamwamba pa wafer.

Ntchito yodula yosavuta

Tepi ya UV imakhala ndi kusinthasintha koyenera komanso kusinthasintha, ndipo imatha kusokonekera pang'ono tsamba lodulira likadula, zomwe zimapangitsa kuti njira yodulira ikhale yosalala, kuchepetsa zotsatira zoyipa za kukana kudula pa tsamba ndi wafer, komanso kuthandiza kukonza mtundu wa kudula ndi moyo wa ntchito ya tsambalo. Makhalidwe ake pamwamba amalola zinyalala zomwe zimapangidwa ndi kudula kuti zigwirizane bwino ndi tepi popanda kufalikira, zomwe zimakhala zosavuta kuyeretsa malo odulira pambuyo pake, kusunga malo ogwirira ntchito oyera, komanso kupewa zinyalala kuti zisaipitse kapena kusokoneza wafer ndi zida zina.

Zosavuta kuzigwira pambuyo pake

Pambuyo poti wafer yadulidwa, tepi ya UV imatha kuchepetsedwa mwachangu mu kukhuthala kapena kutayika kwathunthu mwa kuiwala ndi kuwala kwa ultraviolet kwa kutalika kwa nthawi ndi mphamvu inayake, kotero kuti chip yodulidwayo ikhoza kulekanitsidwa mosavuta ndi tepi, zomwe zimakhala zosavuta kuyika ma chips, kuyesa ndi njira zina zoyendetsera ntchito, ndipo njira yolekanitsira iyi ili ndi chiopsezo chochepa kwambiri chowononga chip.