Nei tichishandisa UV tepi yewafer dicing? | VET Energy

Mushure mewaferyapfuura neyakapfuura maitiro, iyo chip gadziriro yapedzwa, uye inoda kutemwa kuti iparadzanise machipisi pawafer, uye pakupedzisira yaiswa mukati. Thewaferkucheka nzira yakasarudzwa yewafers ehukobvu hwakasiyana kwakasiyanawo:

▪Wafersnehukobvu hunodarika 100um dzinowanzochekwa nemapanga;

▪Wafersnehupamhi husingasviki 100um dzinowanzochekwa nema lasers. Laser kucheka kunogona kuderedza matambudziko ekusvuura uye kutsemuka, asi kana iri pamusoro pe100um, kugona kwekugadzira kuchaderedzwa zvakanyanya;

▪Wafersnehupamhi husingasviki 30um dzinochekwa ne plasma. Plasma yekucheka inokurumidza uye haizokuvadzi pamusoro pechifukidziro, nekudaro ichivandudza goho, asi maitiro ayo anonyanya kuoma;

Munguva yekucheka kwechifukidziro, firimu rinozoiswa kune wafer pachine nguva kuti ive yakachengeteka "singling". Mabasa ayo makuru ndeaya anotevera.

Gadzirisa uye chengetedza wafer

Panguva yekuita dicing, wafer inoda kuchekwa nemazvo.Waferskazhinji dzakatetepa uye dzakaoma. UV tepi inogona kunamira zvakasimba chipfuro pafuremu kana kuti wafer nhanho kudzivirira wafer kubva pakuchinja uye kuzununguka panguva yekucheka, kuve nechokwadi chechokwadi uye chokwadi chekucheka.
Inogona kupa kudzivirirwa kwakanaka kwemuviri kwechingwa, kudzivirira kukanganisa kunewaferinokonzerwa nekunze kwesimba kukanganiswa uye kupesana kunogona kuitika panguva yekucheka, zvakadai sekutsemuka, kuparara kwemucheto uye zvimwe zvikanganiso, uye kudzivirira chip structure uye dunhu pamusoro pechifukidziro.

Yakanaka kucheka kushanda

UV tepi ine elasticity yakakodzera uye kuchinjika, uye inogona kukanganisa zvine mwero kana blade yekucheka ikacheka mukati, ichiita kuti nzira yekucheka iite mushe, kuderedza mhedzisiro yekucheka kuramba pablade uye wafer, uye kubatsira kuvandudza kunaka kwekucheka uye hupenyu hwebasa reblade. Hunhu hwayo hwepamusoro hunoita kuti marara anogadzirwa nekucheka anamate kune tepi zviri nani pasina kupuruzira kutenderedza, izvo zviri nyore kucheneswa kunotevera kwenzvimbo yekucheka, kuchengetedza nzvimbo yekushanda yakachena, uye kudzivirira marara kubva pakusvibisa kana kupindira newafer nemimwe michina.

Zviri nyore kubata gare gare

Mushure mekucheka, tepi yeUV inogona kukurumidza kuderedzwa mu viscosity kana kutorasikirwa zvachose nekuivhenekera ne ultraviolet mwenje weiyo wavelength uye kusimba, kuitira kuti iyo yakachekwa chip inogona kupatsanurwa nyore kubva kune tepi, iyo iri nyore kune inotevera chip kurongedza, kuyedza uye imwe nzira inoyerera, uye iyi nzira yekuparadzanisa ine njodzi yakaderera kwazvo yechip.