Sei tichishandisa tepi yeUV pakucheka wafer? | VET Energy

Mushure mechifukidziroKana zvapfuura nemaitiro apfuura, kugadzirira chip kwapera, uye chinofanira kuchekwa kuti chiparadzanise chips dziri pawafer, uye pakupedzisira chikaputirwa.chifukidziroMaitiro ekucheka akasarudzwa ezvingwa zvemawafers ane ukobvu hwakasiyana akasiyanawo:

▪Mawaferine ukobvu hunopfuura 100um inowanzo temwa nemapanga;

▪MawaferZvine ukobvu husingasviki 100um zvinowanzochekwa nelaser. Kucheka nelaser kunogona kuderedza matambudziko ekukwenya nekutsemuka, asi kana zvasvika pamusoro pe100um, kushanda zvakanaka kwekugadzira kuchaderera zvakanyanya;

▪Mawaferkana yakakora pasi pe30um, inochekwa neplasma. Kucheka kweplasma kunokurumidza uye hakukuvadzi pamusoro pewafer, nokudaro zvichivandudza goho, asi maitiro ayo akaomarara;

Munguva yekucheka wafer, firimu rinozoiswa pawafer pachine nguva kuti ive nechokwadi chekuti "inobviswa yoga" yakachengeteka. Mabasa ayo makuru ndeaya anotevera.

Gadzirisa uye chengetedza wafer

Munguva yekuchekerera, wafer inofanira kuchekwa nemazvo.Mawaferkazhinji kacho dzakatetepa uye dzinopwanyika. Tepi yeUV inogona kunamira wafer zvakasimba pafuremu kana pachidanho chewafer kudzivirira wafer kuti isazununguke kana kuzununguka panguva yekucheka, zvichiita kuti kucheka kuve kwakarurama uye kwakarurama.
Inogona kupa dziviriro yakanaka yemuviri kune wafer, kudzivirira kukuvarachifukidzirokunokonzerwa nekukanganiswa kwekunze uye kukweshana kunogona kuitika panguva yekucheka, senge kutsemuka, kudonha kwemucheto nezvimwe zvikanganiso, uye kudzivirira chimiro chechip uye circuit pamusoro pewafer.

Kucheka kuri nyore

Tepi yeUV ine kutwasuka kwakakodzera uye kuchinjika, uye inogona kuchinja chimiro zvine mwero kana banga rekucheka racheka, zvichiita kuti maitiro ekucheka ave nyore, zvichideredza migumisiro yakaipa yekuramba kucheka pabanga newafer, uye zvichibatsira kuvandudza kunaka kwekucheka uye hupenyu hwebasa rebanga. Hunhu hwayo hwepamusoro hunoita kuti marara anokonzerwa nekucheka anamatire patepi zviri nani pasina kupararira, izvo zviri nyore kuchenesa nzvimbo yekucheka, kuchengetedza nzvimbo yekushandira yakachena, uye kudzivirira marara kuti asasvibise kana kukanganisa wafer nezvimwe zvishandiso.

Zviri nyore kubata gare gare

Mushure mekunge wafer yachekwa, tepi yeUV inogona kukurumidza kuderedzwa mu viscosity kana kutorasikirwa zvachose nekuipisa nechiedza che ultraviolet chine wavelength chaiyo uye simba, kuitira kuti chip yakachekwa ikwanise kuparadzaniswa nyore nyore netepi, izvo zviri nyore kurongedza chip inotevera, kuyedzwa uye mamwe maitiro ekuyerera, uye maitiro aya ekuparadzanisa ane njodzi shoma yekukuvadza chip.