CVD coating focus mhete

Mhete yekutarisa yeCVD coating Mufananidzo Wakaratidzwa

Tsananguro pfupi:

Mhete yeCVD Coating yePlasma Etching yakagadzirirwa kugadzirisa kupararira kweplasma uye kuvandudza kufanana kwe etching mu etch systems yepamusoro. Iine substrate yakasimba yeSi kana SiC yakasanganiswa ne CVD SiC coating ine pureness yakakura, inopa resistance yepamusoro yeplasma, ultra-low particles generation, uye hupenyu hwebasa hwakareba. Inoshandiswa zvakanyanya mu ICP neCCP plasma etching processes, iyi focus ring inoderedza zvinobudirira edge effects, inodzikamisa maitiro eion, uye inodzivirira zvikamu zvemukamuri kubva mukukukurwa nekusvibiswa. Inoshandiswa zvakanyanya kuti uwane goho rakakura uye kuenderana kwemaitiro mukugadzira semiconductor yepamusoro.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Mhete yeCVD Coating Focus yePlasma Etching chinhu chakakosha chinoshandiswa mumasisitimu epamusoro ekucheka e semiconductor. Yakagadzirwa nechimiro chakabatanidzwa che substrate + CVD coating, chigadzirwa ichi chakagadzirirwa kugadzirisa kugoverwa kweplasma, kuvandudza kufanana kwekucheka, uye kuwedzera hupenyu hwechikamu chemukamuri.

KuVet Energy, tinoshandisa hunyanzvi hwakadzama mu chemical vapor deposition (CVD) tekinoroji uye zvinhu zvepamusoro zveceramic kuti tipe ma focus rings anoenderana nezvinodiwa zve semiconductor nodes dzemazuva ano, kusanganisira FinFET ne 3D NAND processes.

Basa reFocus Ring muPlasma Etching

Mumasystem etching eplasma (akadai seICP neCCP reactors), ring yekutarisa yakaiswa yakatenderedza mupendero wewafer uye inoita basa rakakosha mukugadzikana kwemaitiro uye kushanda kwegoho.

1. Kudzora Kufanana kwePlasma

Mhete yekutarisa inoshanda semuganhu wemagetsi uye wepanyama unobatsira kudzora kupararira kweplasma pamusoro pewafer.

Mabhenefiti makuru:

● Kuenzana kwehuwandu hwe etch
● Kuchinja-chinja kwepakati nepakati
● Kugona kudzokorora maitiro

2. Kubhadhara Mugumisiro weEdge

Pasina rin'i yekutarisa, kukanganisa kwe plasma sheath pamucheto we wafer kunogona kukonzera kusafanana.

Mhete yekutarisa inoshanda zvakanaka se "virtual wafer extension", ichideredza kusagadzikana kwakabatana nemucheto kwakadai se:

● Kucheka zvakanyanya pamucheto wewafer
● Kutsauka kwechikamu chakakosha (CD)
● Kukanganisa kweprofile

3. Kudzora Ion Trajectory uye Simba

Nekukanganisa simba remagetsi remunharaunda, rin'i yekutarisa inobatsira kudzikamisa makona ezviitiko zveion uye kugoverwa kwesimba, izvo zvakakosha kune:

● Kucheka kwehuwandu hwepamusoro (HAR)
● Kudzora chimiro cheAnisotropic
● Kukuvadzwa kwemativi emadziro kwakaderera