I-Advanced SiC Cantilever Paddle yokucubungula i-Wafer

Incazelo emfushane:

I-Advanced SiC Cantilever Paddle yokucubungula i-Wafer eyethulwe yi-vet-china isebenzisa izinto ze-SiC zobuchwepheshe obuphezulu ukuthuthukisa ukusebenza kahle kanye nokunemba kokucubungula i-wafer. I-cantilever paddle ye-Vet-china inokumelana okuhle kakhulu nokushisa kanye nokumelana nokugqwala, iqinisekisa ukusebenza okuzinzile kokuphatha i-wafer ezindaweni zokukhiqiza ezinzima, okwenza kube ukukhetha okuhle kokuthuthukisa isivuno sokukhiqiza.


Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

OkuthuthukisiweI-SiC Cantilever PaddleUkucubungula i-Wafer okudalwe yi-vet-china kunikeza ikhambi elihle kakhulu lokukhiqiza ama-semiconductor. Leli paddle le-cantilever lenziwe ngezinto ze-SiC (silicon carbide), futhi ubulukhuni balo obuphezulu kanye nokumelana nokushisa kwenza likwazi ukugcina ukusebenza okuhle kakhulu ezindaweni ezinokushisa okuphezulu kanye nezindawo ezigqwalisayo. Ukwakheka kwe-Cantilever Paddle kuvumela i-wafer ukuthi isekelwe ngokuthembekile ngesikhathi sokucubungula, kunciphisa ingozi yokuqhekeka kanye nomonakalo.

I-SiC Cantilever Paddleiyisakhi esikhethekile esisetshenziswa emishinini yokukhiqiza ye-semiconductor njenge-oxidation furnace, i-diffusion furnace, kanye ne-annealing furnace, ukusetshenziswa okuyinhloko ukulayisha nokukhipha i-wafer, ukusekela nokuthutha ama-wafer ngesikhathi sezinqubo zokushisa okuphezulu.

Izakhiwo ezivamilekweI-SiCci-antiliverpi-addle: isakhiwo se-cantilever, esiqinile ngakolunye uhlangothi futhi esikhululekile kolunye, ngokuvamile sinomklamo oyisicaba nofana nesigwedlo.

I-VET Energy isebenzisa izinto ze-silicon carbide eziphinde zasetshenziswa kabusha ezimsulwa kakhulu ukuqinisekisa ikhwalithi.

Izakhiwo zomzimba ze-Recrystallised Silicon Carbide

Impahla

Inani Elijwayelekile

Izinga lokushisa lokusebenza (°C)

1600°C (ene-oxygen), 1700°C (indawo enciphisayo)

Okuqukethwe kwe-SiC

> 99.96%

Okuqukethwe kwe-Si kwamahhala

< 0.1%

Ubuningi obukhulu

2.60-2.70 g/cm3

Ukuvuleka okubonakalayo

< 16%

Amandla okucindezela

> 600I-MPa

Amandla okugoba abandayo

80-90 MPa (20°C)

Amandla okugoba ashisayo

90-100 MPa (1400°C)

Ukwandiswa kokushisa @1500°C

4.70 10-6/°C

Ukushisa kwe-conductivity @1200°C

23Ububanzi/m•K

Imodulus enwebekayo

240 GPa

Ukumelana nokushaqeka kokushisa

Kuhle kakhulu

Izinzuzo ze-VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing yilezi:

-Ukuqina kokushisa okuphezulu: kungasetshenziswa ezindaweni ezingaphezu kuka-1600°C;

-I-coefficient yokwanda kokushisa okuphansi: igcina ukuzinza kobukhulu, inciphisa ubungozi bokugoba kwe-wafer;

-Ukuhlanzeka okuphezulu: ingozi ephansi yokungcoliswa kwensimbi;

-Ukungasebenzi kahle kwamakhemikhali: ukumelana nokugqwala, kufanelekile ezindaweni ezahlukahlukene zegesi;

-Amandla aphezulu kanye nobunzima: Ihlala isikhathi eside futhi ayigugi;

-Ukusebenza kahle kokushisa: kusiza ekufudumaleni kwe-wafer efanayo.

I-Cantilever Paddle10
I-Cantilever Paddle16
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