YADDA AKE YIN WAFAR SILICON
A wafer ɗin waferyanki ne na silicon mai kauri kusan milimita 1 wanda ke da faɗin fili mai faɗi sosai godiya ga hanyoyin da ke da matuƙar wahala a fannin fasaha. Amfanin da aka yi daga baya yana ƙayyade irin tsarin girma kristal da ya kamata a yi amfani da shi. A cikin tsarin Czochralski, misali, ana narkar da silicon polycrystalline kuma ana tsoma kristal iri mai siririn fensir a cikin silicon da aka narke. Daga nan ana juya kristal ɗin iri a hankali ana jan shi sama. Wani babban launi mai nauyi, monocrystal, ya haifar. Yana yiwuwa a zaɓi halayen lantarki na monocrystal ta hanyar ƙara ƙananan raka'a na dopants masu tsabta. Ana shafa lu'ulu'un daidai da ƙayyadaddun buƙatun abokin ciniki sannan a goge su a yanka su yanka. Bayan ƙarin matakai daban-daban na samarwa, abokin ciniki yana karɓar wafers ɗinsa da aka ƙayyade a cikin marufi na musamman, wanda ke ba abokin ciniki damar amfani da wafer nan da nan a cikin layin samarwa.
Tsarin CZOCHRALSKI
A yau, ana noma babban ɓangare na silicon monocrystals bisa ga tsarin Czochralski, wanda ya haɗa da narkar da polycrystalline high-purity silicon a cikin wani babban quartz crucible da kuma ƙara dopant (yawanci B, P, As, Sb). Ana tsoma sirara mai sirara mai monocrystalline cikin silicon da aka narkar. Babban lu'ulu'u na CZ yana tasowa daga wannan lu'ulu'u mai sirara. Daidaito na zafin da kwararar silicon da aka narkar, juyawar lu'ulu'u da crucible, da kuma saurin jan lu'ulu'u yana haifar da ingot mai inganci sosai.
HANYAR YANKIN RUWAN RUFEWA
Monocrystals da aka ƙera bisa ga hanyar yankin float sun dace da amfani a cikin sassan semiconductor mai ƙarfi, kamar IGBTs. An ɗora wani silinda na silicon polycrystalline a kan na'urar induction. Filin lantarki na mitar rediyo yana taimakawa wajen narke silicon daga ƙasan sandar. Filin lantarki yana daidaita kwararar silicon ta cikin ƙaramin rami a cikin na'urar induction da kuma zuwa monocrystal da ke ƙasa (hanyar float zone). Ana samun maganin, yawanci tare da B ko P, ta hanyar ƙara abubuwan iskar gas.
Lokacin Saƙo: Yuni-07-2021