OTÚ E SI EME WAFER SILIKỌN

OTÚ E SI EME WAFER SILIKỌN

A waferbụ iberibe silicon dị ihe dị ka milimita 1 n'ọkpụrụkpụ nke nwere elu dị larịị nke ukwuu site na usoro ndị siri ike nke ukwuu n'ụzọ teknụzụ. Ojiji na-esote na-ekpebi usoro ịkụ kristal kwesịrị iji. Dịka ọmụmaatụ, na usoro Czochralski, a na-agbaze silicon polycrystalline ma tinye kristal mkpụrụ dị gịrịgịrị n'ime silicon a gbazere agbaze. A na-atụgharị kristal mkpụrụ ahụ ma jiri nwayọ dọpụta ya elu. Colossus dị arọ, monocrystal, na-apụta. O kwere omume ịhọrọ njirimara eletriki nke monocrystal site na ịgbakwunye obere nkeji nke dopants dị ọcha. A na-etinye kristal ndị ahụ dịka nkọwapụta ndị ahịa si dị ma tee ya mma ma bee ya n'ime iberibe. Mgbe usoro mmepụta ọzọ gasịrị, onye ahịa na-enweta wafers akọwapụtara ya na ngwugwu pụrụ iche, nke na-enye onye ahịa ohere iji wafer ozugbo na ahịrị mmepụta ya.

Usoro CZOCHRALSKI

Taa, a na-akọ nnukwu akụkụ nke silicon monocrystal dịka usoro Czochralski si dị, nke gụnyere ịgbaze polycrystalline high-purity silicon n'ime hyperpur quartz crucible ma tinye dopant (nke na-abụkarị B, P, As, Sb). A na-etinye kristal mkpụrụ monocrystalline dị gịrịgịrị n'ime silicon gbazere agbaze. Kristal CZ buru ibu na-esi na kristal dị gịrịgịrị a apụta. Nhazi ziri ezi nke okpomọkụ na mmiri silicon gbazere agbaze, ntụgharị kristal na crucible, yana ọsọ ndọda kristal na-eme ka ingot silicon monocrystalline dị elu.

ỤZỌ EBE A NA-EFE EFU

Monocrystals e mepụtara dịka usoro mpaghara float si dị dị mma maka iji ya na ihe ndị na-emepụta semiconductor ike, dịka IGBTs. A na-etinye ingot silicon polycrystalline cylindrical n'elu coil induction. Oghere electromagnetic ugboro redio na-enyere aka ịgbaze silicon site na ala nke mkpanaka ahụ. Oghere electromagnetic na-achịkwa usoro silicon site na obere oghere dị na coil induction na na monocrystal nke dị n'okpuru (usoro mpaghara float). A na-enweta doping ahụ, nke na-abụkarị na B ma ọ bụ P, site na ịgbakwunye ihe gas.