INDLELA YOKUYENZISA IWAFER YESILICON
A i-wafersisilayi sesilicon esimalunga ne-1 millimeter ubukhulu esinomphezulu othe tyaba kakhulu ngenxa yeenkqubo ezifuna kakhulu ubuchwepheshe. Ukusetyenziswa okulandelayo kumisela ukuba yeyiphi inkqubo yokukhulisa ikristale ekufuneka isetyenziswe. Kwinkqubo yeCzochralski, umzekelo, i-polycrystalline silicon iyanyibilika kwaye ikristale yembewu ebhityileyo ifakwa kwi-silicon enyibilikisiweyo. Ikristale yembewu emva koko iyajikeleziswa kwaye itsalwe kancinci phezulu. I-colossus enzima kakhulu, i-monocrystal, iphumela. Kunokwenzeka ukukhetha iimpawu zombane ze-monocrystal ngokongeza iiyunithi ezincinci zee-dopants ezicocekileyo kakhulu. Iikristale ziyaxutywa ngokuhambelana neenkcukacha zomthengi kwaye emva koko zicoliwe kwaye zinqunyulwe zibe ziingceba. Emva kwamanyathelo ahlukeneyo okuvelisa, umthengi ufumana ii-wafers zakhe ezichaziweyo kwiphakheji ekhethekileyo, evumela umthengi ukuba asebenzise i-wafer ngoko nangoko kumgca wayo wemveliso.
INKQUBO YECZOCHRALSKI
Namhlanje, inxalenye enkulu yee-silicon monocrystals ikhuliswa ngokwenkqubo yeCzochralski, ebandakanya ukunyibilikisa i-polycrystalline high-purity silicon kwi-hyperpure quartz crucible kunye nokongeza i-dopant (ngesiqhelo i-B, i-P, i-As, i-Sb). I-crystal encinci, yembewu ye-monocrystalline ifakwa kwi-silicon enyibilikisiweyo. I-CZ crystal enkulu emva koko iphuhliswa kule kristali incinci. Ulawulo oluchanekileyo lobushushu kunye nokuhamba kwe-silicon enyibilikisiweyo, ukujikeleza kwe-crystal kunye ne-crucible, kunye nesantya sokutsala i-crystal kubangela i-silicon ingot ekumgangatho ophezulu kakhulu.
INDLELA YOKUTYA INDAWO YOKUTHAMBA
IiMonocrystals ezenziwe ngendlela ye-float zone zilungele ukusetyenziswa kwizinto ze-power semiconductor, ezifana ne-IGBTs. I-cylindrical polycrystalline silicon ingot ifakwe phezu kwe-induction coil. I-radio frequency electromagnetic field inceda ukunyibilikisa i-silicon evela kwinxalenye esezantsi yentonga. I-electromagnetic field ilawula ukuhamba kwe-silicon ngomngxuma omncinci kwi-induction coil ukuya kwi-monocrystal engaphantsi (indlela ye-float zone). I-doping, edla ngokuba ne-B okanye i-P, ifezekiswa ngokongeza izinto zegesi.
Ixesha lokuthumela: Juni-07-2021