INDLELA YOKUKWENZA I-SILICON WAFER
A i-waferucezu lwe-silicon olucishe lube yi-1 millimeter ubukhulu olunobuso obuyisicaba kakhulu ngenxa yezinqubo ezidinga kakhulu ubuchwepheshe. Ukusetshenziswa okulandelayo kunquma ukuthi iyiphi inqubo yokukhulisa ikristalu okufanele isetshenziswe. Enqubweni ye-Czochralski, isibonelo, i-polycrystalline silicon iyancibilika bese kuthi ikristalu yembewu encane njengepensela ifakwe ku-silicon encibilikisiwe. Ikristalu yembewu bese ijikeleziswa bese idonswa kancane kancane phezulu. Kuvela i-colossus esindayo kakhulu, i-monocrystal. Kungenzeka ukukhetha izici zikagesi ze-monocrystal ngokungeza amayunithi amancane ama-dopants ahlanzekile kakhulu. Amakristalu afakwa ngokuhambisana nemininingwane yekhasimende bese epholishwa futhi anqunywe abe yizicucu. Ngemuva kwezinyathelo ezahlukahlukene zokukhiqiza ezengeziwe, ikhasimende lithola ama-wafer alo acacisiwe ekupakishweni okukhethekile, okuvumela ikhasimende ukuthi lisebenzise i-wafer ngokushesha emgqeni walo wokukhiqiza.
INQUBO YE-CZOCHRALSKI
Namuhla, ingxenye enkulu yama-silicon monocrystals ikhuliswa ngokwenqubo ye-Czochralski, ehilela ukuncibilikisa i-polycrystalline high-purity silicon ku-hyperpure quartz crucible bese kungezwa i-dopant (ngokuvamile i-B, i-P, i-As, i-Sb). I-crystal encane, yembewu ye-monocrystalline ifakwa ku-silicon encibilikisiwe. I-CZ crystal enkulu bese ikhula kule kristalu encane. Ukulawulwa okunembile kokushisa nokugeleza kwe-silicon encibilikisiwe, ukujikeleza kwe-crystal kanye ne-crucible, kanye nesivinini sokudonsa i-crystal kuphumela ku-silicon ingot esezingeni eliphezulu kakhulu ye-monocrystalline.
INDLELA YENDAWO YOKUTHATHA
Ama-monocrystal akhiqizwa ngendlela ye-float zone afanele ukusetshenziswa ezingxenyeni ze-semiconductor zamandla, njenge-IGBTs. I-cylindrical polycrystalline silicon ingot ifakwe phezu kwe-induction coil. Insimu ye-electromagnetic ye-radio frequency isiza ukuncibilikisa i-silicon engxenyeni engezansi yenduku. Insimu ye-electromagnetic ilawula ukugeleza kwe-silicon ngembobo encane ku-induction coil bese ingena ku-monocrystal engezansi (indlela ye-float zone). I-doping, ngokuvamile ene-B noma i-P, itholakala ngokungeza izinto zegesi.
Isikhathi sokuthunyelwe: Juni-07-2021