Mahele Halfmoon SiC Coated Graphitehe mea nui i hoʻohana ʻia i nā kaʻina hana semiconductor, ʻoi aku hoʻi no nā lako epitaxial SiC. ʻO kāna hoʻolālā hoʻolālā a me nā waiwai waiwai e hoʻoholo pololei i ka maikaʻi a me ka hana pono o nā wafers epitaxial.
Hana ʻia ke keʻena pane:
ʻO ka hapa o ka mahina he ʻelua ʻāpana, ʻo ka ʻaoʻao o luna a me lalo, i hoʻopaʻa ʻia e hana i kahi keʻena ulu paʻa, kahi e hoʻokipa ai i ka substrate silicon carbide (maʻamau ʻo 4H-SiC a i ʻole 6H-SiC) a loaʻa i ka ulu ʻana o ka epitaxial layer ma ke kāohi pono ʻana i ke kahua kahe o ke kinoea (e like me ka hui ʻana o C₃₄₄₄, H₄).
Hoʻoponopono kahua wela:
Hiki i ke kumu graphite hoʻomaʻemaʻe kiʻekiʻe i hui pū ʻia me ka induction heating coil hiki ke mālama i ka like o ka mahana o ke keʻena (i loko o ± 5 ° C) ma kahi kiʻekiʻe o 1500-1700 ° C e hōʻoia i ka kūlike o ka mānoanoa o ka epitaxial layer.
Ke alakaʻi ʻana i ka ea:
Ma ka hoʻolālā ʻana i ke kūlana o ka ea inlet a me ka puka waho (e like me ka ʻaoʻao ea inlet a me ka puka makani ʻaoʻao o ke kino kapuahi ākea), alakaʻi ʻia ke kahe o ke kinoea kinoea ma o ka ʻili substrate e hōʻemi i nā hemahema o ka ulu ʻana ma muli o ka haunaele.
Mea kumu: graphite maʻemaʻe kiʻekiʻe
Pono maʻemaʻe:carbon maʻiʻo ≥99.99%, lehu maʻiʻo ≤5ppm, e hōʻoiaʻiʻoʻaʻohe haumia i precipitated e hoʻohaumia i ka epitaxial papa ma kiʻekiʻe wela.
Nā pono hana:
Kiʻekiʻe thermal conductivity:Hiki i ka 150W/(m・K) ka wela wela ma ka lumi wela, kahi kokoke i ka pae keleawe a hiki ke hoʻololi koke i ka wela.
ʻĀpana hoʻonui haʻahaʻa:5×10-6/ ℃ (25-1000 ℃), e pili ana i ka substrate carbide silika (4.2×10-6/ ℃), e hōʻemi ana i ka haki ʻana o ka uhi i hana ʻia e ke kaumaha wela.
Ka pololei o ka hana ana:Loaʻa ka hoʻomanawanui ʻana o ± 0.05mm ma o ka mīkini CNC e hōʻoia i ka sila ʻana o ke keʻena.
Nā noi like ʻole o CVD SiC a me CVD TaC
| Ka uhi ʻana | Kaʻina hana | Hoʻohālikelike | Hoʻohana maʻamau |
| CVD-SiC | Temperaute: 1000-1200 ℃ Puhi: 10-100 Torr | ʻO ka paʻakikī HV2500, mānoanoa 50-100um, kūpaʻa maikaʻi i ka oxidation (paʻa ma lalo o 1600 ℃) | ʻO nā kapuahi epitaxial universal, kūpono i nā lewa maʻamau e like me ka hydrogen a me ka silane |
| CVD-TaC | Ka Mahana: 1600-1800 ℃ Pihi: 1-10 Torr | ʻO ka paʻakikī HV3000, ka mānoanoa 20-50um, hiki ke pale i nā kinoea corrosive e like me HCl, NH₃, etc.) | ʻO nā kaiapuni ʻino loa (e like me GaN epitaxy a me nā mea hana etching), a i ʻole nā kaʻina hana kūikawā e koi ana i nā wela kiʻekiʻe loa o 2600°C |
ʻO VET Energy kahi mea hana loea e kālele ana i ka R&D a me ka hana ʻana i nā mea kiʻekiʻe kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc.
Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.
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