Inxalenye yeSiC Coated Graphite Half Moon kunye neNdibano yeSiC Epitaxy

Inkcazo emfutshane:

I-VET Energy ngumvelisi ochwephesha kunye nomthengisi wezinto eziphambili zee-silicon carbide epitaxial furnaces. I-half moon assembly yethu isebenzisa i-graphite ecocekileyo kakhulu edityaniswe netekhnoloji yokugquma ye-CVD ephucukileyo. Yenzelwe iindawo ze-epitaxial ezinobushushu obuphezulu nezirhabaxa kakhulu. I-graphite ecocekileyo kakhulu inika le nxalenye ukumelana okuhle kakhulu nobushushu obuphezulu (>1600℃) kunye nokuzinza kobushushu, iqinisekisa ukufana kwentsimi yobushushu; i-CVD coating yenza umaleko okhuselekileyo kumphezulu ngetekhnoloji ye-CVD, iphucula kakhulu iipropati zokulwa ne-oxidation kunye ne-anti-etching, kwaye yandisa ubomi benkonzo ngaphezu kwezihlandlo ezi-3.

Izixhobo:I-graphite ecocekileyo kakhulu

Unyango:Ukwaleka kwe-CVD-SiC okanye i-CVD-TaC

Ukwenziwa ngokwezifiso:Iyafumaneka

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inxalenye yeGraphite egqunywe yiSiClicandelo eliphambili elisetyenziswa kwiinkqubo zokwenziwa kwee-semiconductor, ingakumbi kwizixhobo ze-epitaxial ze-SiC. Uyilo lwayo lwesakhiwo kunye neempawu zezinto ezibonakalayo zimisela ngokuthe ngqo umgangatho kunye nokusebenza kakuhle kwemveliso yee-epitaxial wafers.

Ukwakhiwa kwegumbi lokusabela:
Inxalenye yesiqingatha senyanga yenziwe ngamacandelo amabini, angaphezulu nasezantsi, adityaniswe ndawonye ukuze enze igumbi lokukhula elivaliweyo, elihlala i-silicon carbide substrate (ngesiqhelo i-4H-SiC okanye i-6H-SiC) kwaye ifezekisa ukukhula komaleko we-epitaxial ngokulawula ngokuchanekileyo intsimi yokuhamba kwegesi (njengomxube we-SiH₄, C₃H₈, kunye ne-H₂).
Ulawulo lwentsimi yobushushu:
Isiseko segrafiti esicocekileyo kakhulu kunye ne-induction heating coil sinokugcina ubushushu begumbi bufana (ngaphakathi kwe-±5°C) kubushushu obuphezulu be-1500-1700°C ukuqinisekisa ukuhambelana kobukhulu beleyara ye-epitaxial.
Isikhokelo sokuhamba komoya:
Ngokuyila indawo yokungena kunye nendawo yokukhupha umoya (njengokungena komoya ecaleni kunye nendawo yokukhupha umoya ephezulu yomzimba we-furnace ethe tye), ukuhamba kwe-laminar yegesi yokusabela kukhokelwa kumphezulu we-substrate ukunciphisa iziphene zokukhula ezibangelwa kukuphazamiseka.

Izinto ezisisiseko: i-graphite ecocekileyo kakhulu
Iimfuno zococeko:umxholo wekhabhoni ≥99.99%, umxholo wothuthu ≤5ppm, ukuqinisekisa ukuba akukho kungcola kubangelwa kukungcolisa umaleko we-epitaxial kumaqondo obushushu aphezulu.
Iingenelo zokusebenza:
Ukuqhuba okuphezulu kobushushu:Ubushushu obuphezulu bufikelela kwi-150W/(m・K), ekufutshane nenqanaba lobhedu kwaye inokudlulisa ubushushu ngokukhawuleza.
I-coefficient yokwandisa ephantsi:5×10^-6/℃ (25-1000℃), ihambelana nesiseko se-silicon carbide (4.2×10^-6/℃), kunciphisa ukuqhekeka kwengubo ebangelwa kuxinzelelo lobushushu.
Ukuchaneka kokucubungula:Ukunyamezelana okulinganayo kwe-±0.05mm kufezekiswa ngomatshini we-CNC ukuqinisekisa ukutywinwa kwegumbi.

Ukusetyenziswa okwahlukileyo kwe-CVD SiC kunye ne-CVD TaC

Ukwaleka	Inkqubo	Uthelekiso	Isicelo esiqhelekileyo
I-CVD-SiC	Ubushushu: 1000-1200℃ Uxinzelelo: 10-100 Torr	Ubunzima HV2500, ubukhulu 50-100um, ukumelana okuhle kakhulu kwe-oxidation (izinzile ngaphantsi kwe-1600℃)	Iifurnace ze-epitaxial ze-Universal, ezifanelekileyo kwiindawo ezishushu zendalo ezifana ne-hydrogen kunye ne-silane
I-CVD-TaC	Ubushushu: 1600-1800℃ Uxinzelelo: 1-10 Torr	Ukuqina HV3000, ubukhulu obuyi-20-50um, ayimelani nokugqwala kakhulu (iyakwazi ukumelana neegesi ezigqwalisayo ezifana ne-HCl, i-NH₃, njl.njl.)	Iindawo ezinobungozi kakhulu (ezifana ne-GaN epitaxy kunye nezixhobo zokugrumba), okanye iinkqubo ezikhethekileyo ezifuna amaqondo obushushu aphezulu kakhulu angama-2600°C

I-VET Energy ngumvelisi ochwephesha ogxile kwi-R&D kunye nemveliso yezinto eziphambili ezifana ne-graphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njl. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.

Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.

Iingenelo ze-VET Energy ziquka:
• Ilabhoratri yakho yomzi-mveliso kunye neyobungcali;
• Amanqanaba ococeko kunye nomgangatho ophambili kushishino;
• Ixabiso elikhuphisanayo kunye nexesha lokuhambisa elikhawulezayo;
• Ubudlelwane obuninzi kushishino kwihlabathi liphela;

Siyakwamkela ukuba undwendwele ifektri yethu kunye nelebhu nangaliphi na ixesha!