Papa a me ka Uhi o ka Papa Graphite Uhi Silicon Carbide

Wehewehe Pōkole:

ʻO ka VET Energy silicon carbide coating graphite plate a me ka uhi he huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūlike a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ke kūlike wela, ka maʻemaʻe kiʻekiʻe, ke kūpaʻa i ka ʻino, e lilo ia i hopena kūpono no nā noi hana wafer.

 

 


Nā kikoʻī huahana

Nā Lepili Huahana

Ikehu VETPā Graphite Uhi ʻia ʻo Silicon CarbideUa hana ʻia ʻo Plate, a me Cover e hāʻawi i ka hana kiʻekiʻe loa, e hāʻawi ana i ka hana hilinaʻi a kūlike ma luna o ka hoʻohana lōʻihi, e lilo ia i koho koʻikoʻi no nā noi hana wafer i ka ʻoihana semiconductor. ʻO kēia hana kiʻekiʻePapa Graphite Uhi ʻia ʻo Silicon Carbidehaʻaheo i ke kūpaʻa wela kūikawā, ke ʻano like o ka wela, a me ke kūpaʻa kemika koʻikoʻi, ʻoi aku hoʻi i nā kūlana wela kiʻekiʻe. ʻO kona kūkulu maʻemaʻe kiʻekiʻe, me ka pale ʻana i ka ʻino holomua, e lilo ia i mea pono no nā wahi koi e like meNā mea hoʻopaʻa MOCVD.

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Nā Hiʻohiʻona Koʻikoʻi o ka Silicon Carbide Coating Graphite Tray, Plate, a me ka Uhi

1. Ke kū'ē'ē'ana i ka wela ki'eki'e:Kū i nā mahana a hiki i 1700℃, e hiki ai iā ia ke hana me ka hilinaʻi i nā kūlana koʻikoʻi.

2. Ka Maʻemaʻe Kiʻekiʻe a me ke ʻAno like o ka Thermal:He mea nui ka maʻemaʻe kiʻekiʻe mau a me ka hoʻolaha like ʻana o ka wela no nā noi MOCVD.

3. Ke kū'ē kū'ē i ka palaho:Kūpaʻa i nā waikawa, alkalis, paʻakai, a me nā reagents organik like ʻole, e hōʻoiaʻiʻo ana i ka kūpaʻa lōʻihi ma nā ʻano like ʻole.

4. Paʻakikī kiʻekiʻe a me ka ʻili liʻiliʻi:Hōʻike ʻia kahi ʻili mānoanoa me nā ʻāpana lahilahi, e hoʻomaikaʻi ana i ke kūpaʻa holoʻokoʻa a me ke kūpaʻa i ka ʻaʻahu ʻana.

5. Hoʻolōʻihi ʻia ke ola lawelawe:Hana ʻia no ke ola lōʻihi, ʻoi aku ka maikaʻi ma mua o ka maʻamaunā mea hoʻopaʻa graphite i uhi ʻia me ka silicon carbidema nā wahi hana semiconductor paʻakikī.

 

CVD SiC薄膜基本物理性能

Nā waiwai kino kumu o CVD SiCuhi ʻana

性质 / Waiwai

典型数值 / Waiwai Maʻamau

晶体结构 / ʻAno Crystal

Pae FCC β多晶,主要为(111)取向

密度 / Ka nui o ka paʻa

3.21 g/cm³

硬度 / Paʻakikī

2500 维氏硬度(500g load)

晶粒大小 / Ka nui o ka palaoa

2~10μm

纯度 / Maʻemaʻe Kemika

99.99995%

热容 / Ka Mana Wela

640 J·kg-1·K-1

升华温度 / Mahana Hoʻohaʻahaʻa

2700℃

抗弯强度 / Ikaika Flexural

415 MPa RT 4-kiko

杨氏模量 / Modulus o Young

430 Gpa 4pt kūlou, 1300 ℃

导热系数 / ThermalKa hoʻokele ʻana

300W·m-1·K-1

热膨胀系数 / Hoʻonui Wela (CTE)

4.5×10-6K-1

ʻO ka ʻike loea o VET Energy i nā hoʻonā Graphite a me Silicon Carbide i hana maʻamau ʻia

Ma ke ʻano he mea hana hilinaʻi, loea ʻo VET Energy i nā mea hoʻopili graphite i hoʻolālā kūikawā ʻia a me nā hoʻonā uhi silicon carbide. Hāʻawi mākou i nā huahana like ʻole i hana ʻia no nā ʻoihana semiconductor a me photovoltaic, me kaNā ʻāpana graphite i uhi ʻia me SiCe like me nā pā, nā pā, a me nā uhi. Hoʻokomo pū kā mākou papa inoa huahana i nā koho uhi like ʻole, e like meʻO ka uhi ʻana o SiC no MOCVD, Uhi ʻana o TaC, uhi kalapona aniani, a me ka uhi kalapona pyrolytic, e hōʻoiaʻiʻo ana ua hoʻokō mākou i nā koi like ʻole o nā ʻoihana ʻenehana kiʻekiʻe.

ʻO kā mākou hui loea akamai, nona nā loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hāʻawi i nā hoʻonā mea piha no nā mea kūʻai aku. Hoʻomaʻemaʻe mau mākou i kā mākou mau kaʻina hana holomua, me kahi ʻenehana patent kūʻokoʻa e hoʻomaikaʻi ai i ka pilina ma waena o ka uhi silicon carbide a me ka substrate graphite, e hōʻemi ana i ka pilikia o ka hemo ʻana a hoʻolōʻihi hou i ke ola o ka huahana.

Nā noi a me nā pono i ka hana ʻana o Semiconductor

ʻO kaʻO ka uhi ʻana o Silicon Carbide no MOCVDʻO kēia mau mea hoʻopaʻa graphite e hana pono loa i nā wahi wela kiʻekiʻe, corrosive. Inā hoʻohana ʻia ma ke ʻano he mea lawe wafer graphite a i ʻole nā ​​​​​​mea MOCVD ʻē aʻe, hōʻike kēia mau mea hoʻopaʻa i uhi ʻia me ka silicon carbide i ka lōʻihi a me ka hana maikaʻi loa. No ka poʻe e ʻimi nei i nā hopena hilinaʻi i loko o kaMea hoʻopaʻa graphite i uhi ʻia me SiCma ka mākeke, hāʻawi ka pā graphite i uhi ʻia i ka silicon carbide, ka pā, a me ka uhi o VET Energy i kahi koho paʻa a maʻalahi hoʻi e hoʻokō ai i nā koi koʻikoʻi o ka ʻoihana semiconductor.

Ma ka nānā ʻana i ka ʻepekema mea holomua, ua kūpaʻa ʻo VET Energy i ka hāʻawi ʻana i nā hopena graphite i uhi ʻia me ka SiC kiʻekiʻe e hoʻokele i ka hana hou i ka hana semiconductor a hōʻoia i ka hana hilinaʻi ma nā noi āpau e pili ana iā MOCVD.

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ʻO VET Energy ka mea hana maoli o nā huahana graphite a me silicon carbide i hoʻopilikino ʻia me nā uhi like ʻole e like me ka uhi ʻana o SiC, ka uhi ʻana o TaC, ka uhi ʻana o ke kalapona aniani, ka uhi ʻana o ke kalapona pyrolytic, a me nā mea ʻē aʻe, hiki ke hoʻolako i nā ʻāpana like ʻole no ka ʻoihana semiconductor a me ka photovoltaic.

Loaʻa kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā hoʻonā mea ʻoihana hou aku nāu.

Ke hoʻomau nei mākou i ka hoʻomohala ʻana i nā kaʻina hana holomua e hoʻolako i nā mea holomua hou aʻe, a ua hana i kahi ʻenehana i hoʻopaʻa ʻia, hiki ke hoʻopaʻa i ka pilina ma waena o ka uhi a me ka substrate a emi iki ka maʻalahi o ka hemo ʻana.

Ke hoʻokipa maikaʻi nei iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou aku kākou!

 

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