Silicon Carbide Coating Graphite Tray Plate uye Cover

Tsananguro pfupi:

VET Energy silicon carbide coating graphite plate and cover chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye kuramba kukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

 

 


Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Simba reVETSilicon Carbide Coating Graphite Tray, Plate, uye Cover zvakagadzirwa kuti zviite mashandiro epamusoro-soro, zvichipa mashandiro akavimbika uye anowirirana pakushandiswa kwenguva refu, zvichiita kuti ive sarudzo yakakosha pakushandisa wafer muindasitiri ye semiconductor.Graphite Plate yeSilicon CarbideInodzivirira kupisa zvakanyanya, yakafanana zvakanyanya pakupisa, uye kugadzikana kwemakemikari kwakanyanya, kunyanya mumamiriro ekupisa kwakanyanya. Kugadzirwa kwayo kwakachena kwazvo, pamwe chete nekudzivirira kukurwa kwevhu zvakanyanya, kunoita kuti ive yakakosha munzvimbo dzinoda simba dzakadai seZvishandiso zveMOCVD.

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Zvinhu Zvikuru zveSilicon Carbide Coating Graphite Tray, Plate, uye Cover

1. Kuramba Kupisa Kwepamusoro:Inotsungirira tembiricha inosvika 1700℃, zvichiita kuti ishande zvakanaka mumamiriro ezvinhu akaoma.

2. Kuchena Kwakanyanya uye Kufanana Kwekupisa:Kuchena kwakanyanya nguva dzose uye kupararira kwekupisa kwakaenzana zvakakosha pakushandisa MOCVD.

3. Kuramba Kusina Kunaka Kwengura:Haina simba kune acids, alkalis, munyu, uye ma reagents akasiyana-siyana eorganic, zvichiita kuti igare kwenguva refu munzvimbo dzakasiyana-siyana.

4. Kuomarara Kwakanyanya uye Pamusoro Padiki:Ine pamusoro wakakora une zvidimbu zvitete, zvichivandudza kugara kwenguva refu uye kuramba kupfeka.

5. Hupenyu Hwebasa Hwakawedzerwa:Yakagadzirwa kuti igare kwenguva refu, inobudirira kupfuura yekaresilicon carbide-yakafukidzwa ne graphite susceptorsmunzvimbo dzakaoma dzekugadzirisa semiconductor.

 

CVD SiC薄膜基本物理性能

Hunhu hweCVD SiCkuputira

性质 / Pfuma

典型数值 / Kukosha Kwakajairika

晶体结构 / Chimiro cheKristaro

Chikamu cheFCC β多晶,主要為(111)取向

密度 / Kuwanda kwehuwandu

3.21 g/cm³

硬度 / Kuomarara

2500 维氏硬度 (500g mutoro)

晶粒大小 / Saizi yeZviyo

2 ~ 10μm

纯度 / Kuchena kwemakemikari

99.99995%

热容 / Kugona Kupisa

640 J·kg-1·K-1

升华温度 / Kupisa kweSublimation

2700℃

抗弯强度 / Simba reKuchinjika

415 MPa RT ine mapoinzi mana

杨氏模量 / Modulus yeVadiki

430 Gpa 4pt bend, 1300℃

导热系数 / ThermalKufambisa kwemhepo

300W·m-1·K-1

热膨胀系数 / Kuwedzera kweThermal (CTE)

4.5×10-6K-1

Hunyanzvi hweVET Energy mukugadzirisa Graphite neSilicon Carbide Solutions

Semugadziri anovimbwa naye, VET Energy inonyanya kugadzira ma graphite susceptors akagadzirwa nemaoko uye silicon carbide coating solutions. Tinopa mhando dzakasiyana dzezvigadzirwa zvakagadzirirwa maindasitiri e semiconductor ne photovoltaic, kusanganisiraZvikamu zve graphite zvakaputirwa neSiCzvakaita sematireyi, maplate, uye macover. Zvigadzirwa zvedu zvinosanganisirawo sarudzo dzakasiyana-siyana dzekuputira, dzakadai seSiC coating yeMOCVD, Kuputira TaC, kuputira kabhoni kwakaita segirazi, uye pyrolytic carbon coating, zvichiita kuti tikwanise kusangana nezvinodiwa zvakasiyana-siyana zvemaindasitiri epamusoro-soro.

Chikwata chedu chine ruzivo rwehunyanzvi, chine nyanzvi dzinobva kumasangano makuru ekutsvagisa emuno, chinopa mhinduro dzakakwana dzezvinhu kune vatengi. Tinogara tichigadzirisa maitiro edu epamusoro, kusanganisira tekinoroji yakasarudzika ine patent iyo inosimbisa kubatana pakati pesilicon carbide coating ne graphite substrate, zvichideredza njodzi yekuparadzaniswa uye kuwedzera hupenyu hwechigadzirwa.

Mashandisirwo uye Mabhenefiti muKugadzira Semiconductor

IyoSilicon Carbide Coating yeMOCVDinoita kuti ma susceptor aya e graphite ashande zvakanaka munzvimbo dzinopisa zvakanyanya uye dzinoparadza. Ingave ichishandiswa se graphite wafer carriers kana zvimwe zvikamu zveMOCVD, ma susceptor aya ane silicon carbide-coated anoratidza kugara kwenguva refu uye kushanda zvakanaka. Kune avo vari kutsvaga mhinduro dzakavimbika muSiC-yakafukidzwa negrafiti susceptorMusika, VET Energy's silicon carbide-coated graphite tray, plate, uye cover zvinopa sarudzo yakasimba uye inoshanda zvakasiyana-siyana inosangana nezvinodiwa zvakanyanya zveindasitiri ye semiconductor.

Nekutarisa pane zvesainzi yezvinhu zvepamusoro, VET Energy yakazvipira kupa mhinduro dzepamusoro dzeSiC-coated graphite dzinokurudzira hunyanzvi mukugadzirisa semiconductor uye kuona kuti mashandiro akavimbika mune zvese zvinoshandiswa zvine chekuita neMOCVD.

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VET Energy ndiyo kambani chaiyo inogadzira zvigadzirwa zve graphite ne silicon carbide zvakagadzirwa ne SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo, inogona kupa zvikamu zvakasiyana-siyana zvakagadzirwa ne semiconductor ne photovoltaic industry.

Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

Tinogara tichigadzira maitiro epamusoro-soro kuti tipe zvinhu zvepamusoro-soro, uye takagadzira tekinoroji yakasarudzika ine patent, iyo inogona kuita kuti kubatana pakati pe coating ne substrate kuve kwakasimba uye kusanyanya kupatsanurwa.

Tinokugamuchirai neushamwari kuti mushanyire fekitori yedu, ngatikurukurei zvakawanda!

 

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