Nhazi UV maka Ngwugwu Ọkwa Wafer nke Fan-Out

Nkwakọ ngwaahịa ọkwa wafer nke Fan out (FOWLP) bụ ụzọ dị ọnụ ala na ụlọ ọrụ semiconductor. Mana mmetụta ndị a na-ahụkarị na usoro a bụ ịgbawa na mwepụ nke chip. N'agbanyeghị mmezi na-aga n'ihu nke ọkwa wafer na teknụzụ ọkwa fan out panel, nsogbu ndị a metụtara ịkpụzi ka dị.

Mbelata kemịkalụ nke ihe mejupụtara ihe eji akpụzi mmiri mmiri (LCM) n'oge a na-agwọ ma na-ajụ oyi mgbe a kpụchara ya. Ihe nke abụọ kpatara mgbagharị bụ enweghị nkwekọ na coefficient nke mgbasawanye okpomọkụ (CTE) n'etiti chip silicon, ihe eji akpụzi, na substrate. Mbelata bụ n'ihi na ihe eji akpụzi viscous nwere ọdịnaya dị elu nwere ike iji naanị n'okpuru oke okpomọkụ na nrụgide dị elu. Ebe ọ bụ na a na-etinye chip ahụ na ihe na-ebu ya site na njikọ nwa oge, mmụba okpomọkụ ga-eme ka ihe na-arapara ahụ dị nro, si otú a na-ebelata ike nrapado ya ma belata ikike ya idozi chip ahụ. Ihe nke abụọ kpatara mgbagharị ahụ bụ na nrụgide achọrọ maka ịkpụzi na-emepụta nrụgide na chip ọ bụla.

Iji chọta ihe ngwọta nye nsogbu ndị a, DELO mere nnyocha gbasara ihe ga-ekwe omume site n'ịjikọta obere mgbawa analog n'elu ihe e ji ebu ibu. N'ihe gbasara ntọala, a na-eji ihe nrapado njikọ nwa oge kpuchie wafer ebu ibu, a na-etinyekwa chip ahụ ihu ala. Mgbe nke ahụ gasịrị, a na-eji obere viscosity DELO gluu kpụọ wafer ahụ ma jiri radieshon ultraviolet gwọọ ya tupu ewepụ wafer ebu ibu ahụ. N'ime ngwa ndị dị otú ahụ, a na-ejikarị ihe mejupụtara ihe ndị na-akpụ thermosetting dị elu.

DELO tụnyerekwara mgbawa nke ihe ndị e ji akpụzi thermosetting na ngwaahịa UV gwọrọ na nnwale ahụ, nsonaazụ ya gosikwara na ihe ndị e ji akpụzi nkịtị ga-agbagharị n'oge oyi mgbe thermosetting gasịrị. Ya mere, iji ọgwụgwọ ultraviolet okpomọkụ ụlọ kama ịgbasa okpomọkụ nwere ike ibelata mmetụta nke enweghị nkwekọ nke ihe na-eme ka okpomọkụ gbasaa n'etiti ihe e ji akpụzi na ihe e ji ebu ya, si otú a belata mgbagharị ruo n'ókè kachasị ukwuu enwere ike.

Ojiji nke ihe na-agwọ ultraviolet nwekwara ike ibelata ojiji nke ihe ndị na-ejupụta ihe, si otú a belata viscosity na modulus Young. viscosity nke ihe nrapado nlereanya ejiri mee nnwale ahụ bụ 35000 mPa · s, modulus Young bụkwa 1 GPa. N'ihi enweghị okpomọkụ ma ọ bụ nrụgide dị elu na ihe e ji akpụ ihe, enwere ike ibelata mgbawa chip ruo n'ókè kachasị ukwuu enwere ike. Ihe mejupụtara ihe e ji akpụ ihe nwere viscosity nke ihe dị ka 800000 mPa · s na modulus Young n'ọtụtụ ọnụọgụ abụọ.

N'ozuzu, nchọpụta egosila na iji ihe ndị e ji UV gwọọ maka ịkpụzi ebe buru ibu bara uru maka imepụta ngwugwu ọkwa wafer nke na-eduga na chip leader, ebe ọ na-ebelata warpage na chip deficit ruo n'ókè kachasị ukwuu enwere ike. N'agbanyeghị nnukwu ọdịiche dị na coefficients mgbasa okpomọkụ dị n'etiti ihe eji eme ihe, usoro a ka nwere ọtụtụ ojiji n'ihi enweghị mgbanwe okpomọkụ. Na mgbakwunye, ọgwụgwọ UV nwekwara ike ibelata oge ọgwụgwọ na oriri ike.

UV kama ọgwụgwọ okpomọkụ na-ebelata warpage na die shift na fan-out wafer-level plọg

Ntụnyere nke wafers ekpuchiri ekpuchi nke dị sentimita iri na abụọ site na iji ihe mejupụtara ya nke a gwọrọ n'ọkụ, nke nwere ihe na-ejupụta nke ukwuu (A) na ihe mejupụtara ya nke a gwọrọ n'ọkụ (B)